JPS6138859B2 - - Google Patents
Info
- Publication number
- JPS6138859B2 JPS6138859B2 JP3789179A JP3789179A JPS6138859B2 JP S6138859 B2 JPS6138859 B2 JP S6138859B2 JP 3789179 A JP3789179 A JP 3789179A JP 3789179 A JP3789179 A JP 3789179A JP S6138859 B2 JPS6138859 B2 JP S6138859B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- semiconductor
- substrate
- forming
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3789179A JPS55130141A (en) | 1979-03-30 | 1979-03-30 | Fabricating method of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3789179A JPS55130141A (en) | 1979-03-30 | 1979-03-30 | Fabricating method of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55130141A JPS55130141A (en) | 1980-10-08 |
| JPS6138859B2 true JPS6138859B2 (enrdf_load_stackoverflow) | 1986-09-01 |
Family
ID=12510153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3789179A Granted JPS55130141A (en) | 1979-03-30 | 1979-03-30 | Fabricating method of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55130141A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5793524A (en) * | 1980-12-03 | 1982-06-10 | Fujitsu Ltd | Manufacture of semiconductor device |
| JP2764727B2 (ja) * | 1988-09-30 | 1998-06-11 | ソニー株式会社 | 半導体装置の製造方法 |
-
1979
- 1979-03-30 JP JP3789179A patent/JPS55130141A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS55130141A (en) | 1980-10-08 |
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