JPS55127077A - Thin film solar battery device - Google Patents
Thin film solar battery deviceInfo
- Publication number
- JPS55127077A JPS55127077A JP3607079A JP3607079A JPS55127077A JP S55127077 A JPS55127077 A JP S55127077A JP 3607079 A JP3607079 A JP 3607079A JP 3607079 A JP3607079 A JP 3607079A JP S55127077 A JPS55127077 A JP S55127077A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film layer
- solar battery
- piled
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/548—Amorphous silicon PV cells
Landscapes
- Photovoltaic Devices (AREA)
Abstract
PURPOSE: To obtain a high reliability of series connection by isolating a junction with a continuous intrinsic semiconductor thin film layer or a high specific resistance semiconductor thin film layer forming and connecting in series a plural thin film solar battery on a single substrate with pn-junctions given in reverse structure each other.
CONSTITUTION: A transparent conductive film 22 consisting of In2O3-SnO2 is fixed at given intervals on a borosilicate glass 21 working as a light receiving side of a solar battery panel at the same time, and an n+-type amorphous Si thin film layer n+ is piled up onto an exposed portion of the film 22 by means of a mask 23 having a given pattern through low-pressure glow discharge for which a mixed gas of SiH4, PH3, H2 is used. Next, the mask 23 is moved, a p+-type thin film layer p+ is piled up onto the film 22 exposed adjacently to the layer n+ by means of B2H6 instead of PH3, and an undoped high specific resistance i-type thin film layer i0 is grown on the overall surface. After that, p+- and n+-type layers are piled up thereon according to the layers n+ and p+ so as to have pn-junctions in reverse structure, and these are connected with a back electrode 24 of Ag, Al, etc.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3607079A JPS55127077A (en) | 1979-03-26 | 1979-03-26 | Thin film solar battery device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3607079A JPS55127077A (en) | 1979-03-26 | 1979-03-26 | Thin film solar battery device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55127077A true JPS55127077A (en) | 1980-10-01 |
JPS6148797B2 JPS6148797B2 (en) | 1986-10-25 |
Family
ID=12459463
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3607079A Granted JPS55127077A (en) | 1979-03-26 | 1979-03-26 | Thin film solar battery device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55127077A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59161081A (en) * | 1983-03-03 | 1984-09-11 | Fuji Electric Corp Res & Dev Ltd | Thin-film solar cell |
-
1979
- 1979-03-26 JP JP3607079A patent/JPS55127077A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59161081A (en) * | 1983-03-03 | 1984-09-11 | Fuji Electric Corp Res & Dev Ltd | Thin-film solar cell |
Also Published As
Publication number | Publication date |
---|---|
JPS6148797B2 (en) | 1986-10-25 |
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