JPS55127077A - Thin film solar battery device - Google Patents

Thin film solar battery device

Info

Publication number
JPS55127077A
JPS55127077A JP3607079A JP3607079A JPS55127077A JP S55127077 A JPS55127077 A JP S55127077A JP 3607079 A JP3607079 A JP 3607079A JP 3607079 A JP3607079 A JP 3607079A JP S55127077 A JPS55127077 A JP S55127077A
Authority
JP
Japan
Prior art keywords
thin film
film layer
solar battery
piled
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3607079A
Other languages
Japanese (ja)
Other versions
JPS6148797B2 (en
Inventor
Akio Suzuki
Katsumi Imaizumi
Yutaka Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP3607079A priority Critical patent/JPS55127077A/en
Publication of JPS55127077A publication Critical patent/JPS55127077A/en
Publication of JPS6148797B2 publication Critical patent/JPS6148797B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/548—Amorphous silicon PV cells

Abstract

PURPOSE: To obtain a high reliability of series connection by isolating a junction with a continuous intrinsic semiconductor thin film layer or a high specific resistance semiconductor thin film layer forming and connecting in series a plural thin film solar battery on a single substrate with pn-junctions given in reverse structure each other.
CONSTITUTION: A transparent conductive film 22 consisting of In2O3-SnO2 is fixed at given intervals on a borosilicate glass 21 working as a light receiving side of a solar battery panel at the same time, and an n+-type amorphous Si thin film layer n+ is piled up onto an exposed portion of the film 22 by means of a mask 23 having a given pattern through low-pressure glow discharge for which a mixed gas of SiH4, PH3, H2 is used. Next, the mask 23 is moved, a p+-type thin film layer p+ is piled up onto the film 22 exposed adjacently to the layer n+ by means of B2H6 instead of PH3, and an undoped high specific resistance i-type thin film layer i0 is grown on the overall surface. After that, p+- and n+-type layers are piled up thereon according to the layers n+ and p+ so as to have pn-junctions in reverse structure, and these are connected with a back electrode 24 of Ag, Al, etc.
COPYRIGHT: (C)1980,JPO&Japio
JP3607079A 1979-03-26 1979-03-26 Thin film solar battery device Granted JPS55127077A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3607079A JPS55127077A (en) 1979-03-26 1979-03-26 Thin film solar battery device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3607079A JPS55127077A (en) 1979-03-26 1979-03-26 Thin film solar battery device

Publications (2)

Publication Number Publication Date
JPS55127077A true JPS55127077A (en) 1980-10-01
JPS6148797B2 JPS6148797B2 (en) 1986-10-25

Family

ID=12459463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3607079A Granted JPS55127077A (en) 1979-03-26 1979-03-26 Thin film solar battery device

Country Status (1)

Country Link
JP (1) JPS55127077A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59161081A (en) * 1983-03-03 1984-09-11 Fuji Electric Corp Res & Dev Ltd Thin-film solar cell

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59161081A (en) * 1983-03-03 1984-09-11 Fuji Electric Corp Res & Dev Ltd Thin-film solar cell

Also Published As

Publication number Publication date
JPS6148797B2 (en) 1986-10-25

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