JPS571262A - Solar cell - Google Patents
Solar cellInfo
- Publication number
- JPS571262A JPS571262A JP7384380A JP7384380A JPS571262A JP S571262 A JPS571262 A JP S571262A JP 7384380 A JP7384380 A JP 7384380A JP 7384380 A JP7384380 A JP 7384380A JP S571262 A JPS571262 A JP S571262A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- amorphous
- sif4
- sih4
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract 3
- 229910004014 SiF4 Inorganic materials 0.000 abstract 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract 2
- 238000000926 separation method Methods 0.000 abstract 2
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 229910001220 stainless steel Inorganic materials 0.000 abstract 1
- 239000010935 stainless steel Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
- H01L31/202—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic Table
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Abstract
PURPOSE:To prevent separation of layers during the operation by layering amorphous Si containing H and amorphours Si containing H and F on a conductive substrate. CONSTITUTION:On a stainless steel plate 1, an N type amorphous layer 2 is formed by the glow discharge of SiH4+H2+PH3. Then SiH4 is changed to SiF4, and an N type amorphous Si layer 3 containing H and F is provided. Thereafter an I layer 4 is formed by SiF4+H2. Subsequently, B2H6 is mixed, and a P type Si layer 5 containing H and F is formed. Thus a PIN junction structure is formed, and an active photoelectric conversion layer having exellent characteristics can be obtained. A grid electrode 6 is formed on the P layer 5. Since the amorphous Si layers containing H and having excellent bonding property are provided on the substrate, the separation of the layers during the operation is not caused, and the stable device can be obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7384380A JPS571262A (en) | 1980-06-02 | 1980-06-02 | Solar cell |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7384380A JPS571262A (en) | 1980-06-02 | 1980-06-02 | Solar cell |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS571262A true JPS571262A (en) | 1982-01-06 |
JPS6143869B2 JPS6143869B2 (en) | 1986-09-30 |
Family
ID=13529819
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7384380A Granted JPS571262A (en) | 1980-06-02 | 1980-06-02 | Solar cell |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS571262A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58155774A (en) * | 1982-03-11 | 1983-09-16 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
JPS5954276A (en) * | 1982-09-22 | 1984-03-29 | Sanyo Electric Co Ltd | Photovoltaic device |
JPS5954273A (en) * | 1982-09-21 | 1984-03-29 | Semiconductor Energy Lab Co Ltd | Photoelectric converter |
JPS5983916A (en) * | 1982-11-01 | 1984-05-15 | Kanegafuchi Chem Ind Co Ltd | Amorphous multielement semiconductor |
JPS59149149A (en) * | 1983-02-17 | 1984-08-27 | テルモ株式会社 | Urine amount measuring apparatus |
-
1980
- 1980-06-02 JP JP7384380A patent/JPS571262A/en active Granted
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58155774A (en) * | 1982-03-11 | 1983-09-16 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
JPH0432552B2 (en) * | 1982-03-11 | 1992-05-29 | ||
JPS5954273A (en) * | 1982-09-21 | 1984-03-29 | Semiconductor Energy Lab Co Ltd | Photoelectric converter |
JPS5954276A (en) * | 1982-09-22 | 1984-03-29 | Sanyo Electric Co Ltd | Photovoltaic device |
JPS5983916A (en) * | 1982-11-01 | 1984-05-15 | Kanegafuchi Chem Ind Co Ltd | Amorphous multielement semiconductor |
JPS59149149A (en) * | 1983-02-17 | 1984-08-27 | テルモ株式会社 | Urine amount measuring apparatus |
JPH0155011B2 (en) * | 1983-02-17 | 1989-11-22 | Terumo Corp |
Also Published As
Publication number | Publication date |
---|---|
JPS6143869B2 (en) | 1986-09-30 |
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