JPS55124077A - Semiconductor wafer electric characteristic testing apparatus - Google Patents

Semiconductor wafer electric characteristic testing apparatus

Info

Publication number
JPS55124077A
JPS55124077A JP3144479A JP3144479A JPS55124077A JP S55124077 A JPS55124077 A JP S55124077A JP 3144479 A JP3144479 A JP 3144479A JP 3144479 A JP3144479 A JP 3144479A JP S55124077 A JPS55124077 A JP S55124077A
Authority
JP
Japan
Prior art keywords
value
testing
subtractor
warning
defective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3144479A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6142829B2 (enrdf_load_stackoverflow
Inventor
Akio Ihayazaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3144479A priority Critical patent/JPS55124077A/ja
Publication of JPS55124077A publication Critical patent/JPS55124077A/ja
Publication of JPS6142829B2 publication Critical patent/JPS6142829B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP3144479A 1979-03-16 1979-03-16 Semiconductor wafer electric characteristic testing apparatus Granted JPS55124077A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3144479A JPS55124077A (en) 1979-03-16 1979-03-16 Semiconductor wafer electric characteristic testing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3144479A JPS55124077A (en) 1979-03-16 1979-03-16 Semiconductor wafer electric characteristic testing apparatus

Publications (2)

Publication Number Publication Date
JPS55124077A true JPS55124077A (en) 1980-09-24
JPS6142829B2 JPS6142829B2 (enrdf_load_stackoverflow) 1986-09-24

Family

ID=12331410

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3144479A Granted JPS55124077A (en) 1979-03-16 1979-03-16 Semiconductor wafer electric characteristic testing apparatus

Country Status (1)

Country Link
JP (1) JPS55124077A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58214844A (ja) * 1982-05-24 1983-12-14 バリアン・アソシエイツ・インコ−ポレイテツド ウエフアの欠落又は破損を検出する装置
JPS63234539A (ja) * 1987-03-24 1988-09-29 Tokyo Electron Ltd プローバシステム
JPH0285374U (enrdf_load_stackoverflow) * 1988-12-20 1990-07-04
CN105789076A (zh) * 2014-12-22 2016-07-20 旺矽科技股份有限公司 点测机故障判别方法
CN110160918A (zh) * 2018-02-12 2019-08-23 黄彦凯 晶圆再验的方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58214844A (ja) * 1982-05-24 1983-12-14 バリアン・アソシエイツ・インコ−ポレイテツド ウエフアの欠落又は破損を検出する装置
JPS63234539A (ja) * 1987-03-24 1988-09-29 Tokyo Electron Ltd プローバシステム
JPH0285374U (enrdf_load_stackoverflow) * 1988-12-20 1990-07-04
CN105789076A (zh) * 2014-12-22 2016-07-20 旺矽科技股份有限公司 点测机故障判别方法
CN110160918A (zh) * 2018-02-12 2019-08-23 黄彦凯 晶圆再验的方法

Also Published As

Publication number Publication date
JPS6142829B2 (enrdf_load_stackoverflow) 1986-09-24

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