JPS5679268A - Inspection apparatus for integrated circuit - Google Patents
Inspection apparatus for integrated circuitInfo
- Publication number
- JPS5679268A JPS5679268A JP15616179A JP15616179A JPS5679268A JP S5679268 A JPS5679268 A JP S5679268A JP 15616179 A JP15616179 A JP 15616179A JP 15616179 A JP15616179 A JP 15616179A JP S5679268 A JPS5679268 A JP S5679268A
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- prober
- signal
- sent
- test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To reduce the time needed for measuring an integrated circuit and increase the degree of the inspection accuracy by forming an inspection apparatus so that the circuit function test and the DC characteristic test can be performed simultaneously without contention.
CONSTITUTION: When the measurement signal is sent from an A prober, the signal is latched in an 8-bit data and INTREG to interrupt a CPU, which discriminates between A and B interruptions, confirms the A start, connects the A prober to the FT side and sends the test start signal to a FT tester to perform the measurement. When the FT measurement of A has passed, the A prober is then connected to the DC side and the test start signal is sent to a DC tester to perform the measurement. When the DC measurement of A has passed, the pass signal is sent to the A prober to wait for the next measurement. The A side is run by sense processing, while the B side is always run by interruption processing.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15616179A JPS5679268A (en) | 1979-11-30 | 1979-11-30 | Inspection apparatus for integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15616179A JPS5679268A (en) | 1979-11-30 | 1979-11-30 | Inspection apparatus for integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5679268A true JPS5679268A (en) | 1981-06-29 |
Family
ID=15621674
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15616179A Pending JPS5679268A (en) | 1979-11-30 | 1979-11-30 | Inspection apparatus for integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5679268A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5891176U (en) * | 1981-12-14 | 1983-06-20 | 日本電気株式会社 | Semiconductor device characteristic measurement equipment |
JPS5997064A (en) * | 1982-11-26 | 1984-06-04 | Nec Corp | Apparatus for measuring semiconductor element |
JPS59228177A (en) * | 1983-06-10 | 1984-12-21 | Hitachi Electronics Eng Co Ltd | Test head with dc measuring function for ic tester |
-
1979
- 1979-11-30 JP JP15616179A patent/JPS5679268A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5891176U (en) * | 1981-12-14 | 1983-06-20 | 日本電気株式会社 | Semiconductor device characteristic measurement equipment |
JPS5997064A (en) * | 1982-11-26 | 1984-06-04 | Nec Corp | Apparatus for measuring semiconductor element |
JPS59228177A (en) * | 1983-06-10 | 1984-12-21 | Hitachi Electronics Eng Co Ltd | Test head with dc measuring function for ic tester |
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