JPS5679268A - Inspection apparatus for integrated circuit - Google Patents

Inspection apparatus for integrated circuit

Info

Publication number
JPS5679268A
JPS5679268A JP15616179A JP15616179A JPS5679268A JP S5679268 A JPS5679268 A JP S5679268A JP 15616179 A JP15616179 A JP 15616179A JP 15616179 A JP15616179 A JP 15616179A JP S5679268 A JPS5679268 A JP S5679268A
Authority
JP
Japan
Prior art keywords
measurement
prober
signal
sent
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15616179A
Other languages
Japanese (ja)
Inventor
Noriyoshi Akaboshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP15616179A priority Critical patent/JPS5679268A/en
Publication of JPS5679268A publication Critical patent/JPS5679268A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the time needed for measuring an integrated circuit and increase the degree of the inspection accuracy by forming an inspection apparatus so that the circuit function test and the DC characteristic test can be performed simultaneously without contention.
CONSTITUTION: When the measurement signal is sent from an A prober, the signal is latched in an 8-bit data and INTREG to interrupt a CPU, which discriminates between A and B interruptions, confirms the A start, connects the A prober to the FT side and sends the test start signal to a FT tester to perform the measurement. When the FT measurement of A has passed, the A prober is then connected to the DC side and the test start signal is sent to a DC tester to perform the measurement. When the DC measurement of A has passed, the pass signal is sent to the A prober to wait for the next measurement. The A side is run by sense processing, while the B side is always run by interruption processing.
COPYRIGHT: (C)1981,JPO&Japio
JP15616179A 1979-11-30 1979-11-30 Inspection apparatus for integrated circuit Pending JPS5679268A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15616179A JPS5679268A (en) 1979-11-30 1979-11-30 Inspection apparatus for integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15616179A JPS5679268A (en) 1979-11-30 1979-11-30 Inspection apparatus for integrated circuit

Publications (1)

Publication Number Publication Date
JPS5679268A true JPS5679268A (en) 1981-06-29

Family

ID=15621674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15616179A Pending JPS5679268A (en) 1979-11-30 1979-11-30 Inspection apparatus for integrated circuit

Country Status (1)

Country Link
JP (1) JPS5679268A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5891176U (en) * 1981-12-14 1983-06-20 日本電気株式会社 Semiconductor device characteristic measurement equipment
JPS5997064A (en) * 1982-11-26 1984-06-04 Nec Corp Apparatus for measuring semiconductor element
JPS59228177A (en) * 1983-06-10 1984-12-21 Hitachi Electronics Eng Co Ltd Test head with dc measuring function for ic tester

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5891176U (en) * 1981-12-14 1983-06-20 日本電気株式会社 Semiconductor device characteristic measurement equipment
JPS5997064A (en) * 1982-11-26 1984-06-04 Nec Corp Apparatus for measuring semiconductor element
JPS59228177A (en) * 1983-06-10 1984-12-21 Hitachi Electronics Eng Co Ltd Test head with dc measuring function for ic tester

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