JPS5728339A - Probe card - Google Patents

Probe card

Info

Publication number
JPS5728339A
JPS5728339A JP10385080A JP10385080A JPS5728339A JP S5728339 A JPS5728339 A JP S5728339A JP 10385080 A JP10385080 A JP 10385080A JP 10385080 A JP10385080 A JP 10385080A JP S5728339 A JPS5728339 A JP S5728339A
Authority
JP
Japan
Prior art keywords
probe card
good product
pellet
constitution
terminals
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10385080A
Other languages
Japanese (ja)
Inventor
Masanori Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP10385080A priority Critical patent/JPS5728339A/en
Publication of JPS5728339A publication Critical patent/JPS5728339A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To facilitate prechecking of the total measurement system, by providing the means for easy fitting and removing products on a probe card and connecting each of terminals of the products and each of styluses of the probe card. CONSTITUTION:When legs 8 of a mount 7 of a semiconductor pellet 5 are inserted into metal fittings 4 on a probe card 1, terminals 6 of the pellet contact with probes 2. First, a good product is fitted to the probe card 1, and its electric characteristic is measured to certificate that it is a good product. Then the good product is removed, and the pellet selection is started. According to said constitution, the total measuring system including the probe card can be prechecked extremely easily.
JP10385080A 1980-07-29 1980-07-29 Probe card Pending JPS5728339A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10385080A JPS5728339A (en) 1980-07-29 1980-07-29 Probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10385080A JPS5728339A (en) 1980-07-29 1980-07-29 Probe card

Publications (1)

Publication Number Publication Date
JPS5728339A true JPS5728339A (en) 1982-02-16

Family

ID=14364909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10385080A Pending JPS5728339A (en) 1980-07-29 1980-07-29 Probe card

Country Status (1)

Country Link
JP (1) JPS5728339A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58170026A (en) * 1982-03-31 1983-10-06 Fujitsu Ltd Primary validation method
JPS61234321A (en) * 1985-04-10 1986-10-18 Hamamatsu Photonics Kk Two-dimensional infrared radiation image detecting device
JPH02222555A (en) * 1989-02-23 1990-09-05 Mitsubishi Electric Corp Test head for semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58170026A (en) * 1982-03-31 1983-10-06 Fujitsu Ltd Primary validation method
JPS61234321A (en) * 1985-04-10 1986-10-18 Hamamatsu Photonics Kk Two-dimensional infrared radiation image detecting device
JPH0533331B2 (en) * 1985-04-10 1993-05-19 Hamamatsu Photonics Kk
JPH02222555A (en) * 1989-02-23 1990-09-05 Mitsubishi Electric Corp Test head for semiconductor device

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