JPS56116637A - Detector for semiconductor device - Google Patents

Detector for semiconductor device

Info

Publication number
JPS56116637A
JPS56116637A JP2011580A JP2011580A JPS56116637A JP S56116637 A JPS56116637 A JP S56116637A JP 2011580 A JP2011580 A JP 2011580A JP 2011580 A JP2011580 A JP 2011580A JP S56116637 A JPS56116637 A JP S56116637A
Authority
JP
Japan
Prior art keywords
signal
probe
circuit
detecting
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011580A
Other languages
Japanese (ja)
Inventor
Hiromi Takano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP2011580A priority Critical patent/JPS56116637A/en
Publication of JPS56116637A publication Critical patent/JPS56116637A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To make the judgement of a tester correspond to that of a probing device as to whether there exists an element or not by a method wherein a probe on a probing card is used to detect whether it has been contacted by an IC and send information concerning the detection to a tester simultaneously with a signal indicating that it has started measuring. CONSTITUTION:When a detecting probe 5 comes in contact with a semiconductor substrate 2, the probe is separated from a detecting probe 4. Therefore, the voltage in a detection circuit 19 rises to synthesize the information as to the rise in voltage and the output of a circuit 21 for generating a signal informing the commencement of measurement, together in an output circuit 20 so that the information is output. Since a detecting probe 6 does not contact a substrate 2 but a detecting probe 7, the voltage in the detecting circuit 19 does not change, allowing no transmission of the output signal. The output signal 20 opens a relay 16 and maintains the detecting signal, while the signal in the circuit 21 for generating a signal informing the commencement of measurement and the signal 20 are transmitted simultaneously. As a result, the counting of the tester can be made conformable with that of the probe, making it possible to obtain a highly reliable substrate tester.
JP2011580A 1980-02-20 1980-02-20 Detector for semiconductor device Pending JPS56116637A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011580A JPS56116637A (en) 1980-02-20 1980-02-20 Detector for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011580A JPS56116637A (en) 1980-02-20 1980-02-20 Detector for semiconductor device

Publications (1)

Publication Number Publication Date
JPS56116637A true JPS56116637A (en) 1981-09-12

Family

ID=12018116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011580A Pending JPS56116637A (en) 1980-02-20 1980-02-20 Detector for semiconductor device

Country Status (1)

Country Link
JP (1) JPS56116637A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58145140A (en) * 1982-02-23 1983-08-29 Nec Corp Semiconductor characteristic measuring device
JPS6310553U (en) * 1986-07-08 1988-01-23
US4950618A (en) * 1989-04-14 1990-08-21 Texas Instruments, Incorporated Masking scheme for silicon dioxide mesa formation

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58145140A (en) * 1982-02-23 1983-08-29 Nec Corp Semiconductor characteristic measuring device
JPS6310553U (en) * 1986-07-08 1988-01-23
US4950618A (en) * 1989-04-14 1990-08-21 Texas Instruments, Incorporated Masking scheme for silicon dioxide mesa formation

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