JPS55116604A - Manufacture of finely powdered silicon nitride - Google Patents
Manufacture of finely powdered silicon nitrideInfo
- Publication number
- JPS55116604A JPS55116604A JP2537979A JP2537979A JPS55116604A JP S55116604 A JPS55116604 A JP S55116604A JP 2537979 A JP2537979 A JP 2537979A JP 2537979 A JP2537979 A JP 2537979A JP S55116604 A JPS55116604 A JP S55116604A
- Authority
- JP
- Japan
- Prior art keywords
- nitrogen
- argon
- plasma stream
- chamber
- silicon nitride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title abstract 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 12
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 10
- 229910052786 argon Inorganic materials 0.000 abstract 5
- 229910052757 nitrogen Inorganic materials 0.000 abstract 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- 229910001873 dinitrogen Inorganic materials 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 238000007664 blowing Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 239000003779 heat-resistant material Substances 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 239000000843 powder Substances 0.000 abstract 1
- 239000007858 starting material Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2537979A JPS55116604A (en) | 1979-03-05 | 1979-03-05 | Manufacture of finely powdered silicon nitride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2537979A JPS55116604A (en) | 1979-03-05 | 1979-03-05 | Manufacture of finely powdered silicon nitride |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55116604A true JPS55116604A (en) | 1980-09-08 |
| JPS6229364B2 JPS6229364B2 (cg-RX-API-DMAC7.html) | 1987-06-25 |
Family
ID=12164212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2537979A Granted JPS55116604A (en) | 1979-03-05 | 1979-03-05 | Manufacture of finely powdered silicon nitride |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55116604A (cg-RX-API-DMAC7.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5950007A (ja) * | 1982-09-13 | 1984-03-22 | Toa Nenryo Kogyo Kk | 窒化珪素焼結体のための前駆物質とそれを用いた窒化珪素焼結体の製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52128900A (en) * | 1976-02-17 | 1977-10-28 | Montedison Spa | Plasmaarc method for producing particulate ceramic metal and similar products |
| JPS5377000A (en) * | 1976-12-20 | 1978-07-07 | Ppg Industries Inc | Recovery of refractory hard alloy powdered products |
-
1979
- 1979-03-05 JP JP2537979A patent/JPS55116604A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52128900A (en) * | 1976-02-17 | 1977-10-28 | Montedison Spa | Plasmaarc method for producing particulate ceramic metal and similar products |
| JPS5377000A (en) * | 1976-12-20 | 1978-07-07 | Ppg Industries Inc | Recovery of refractory hard alloy powdered products |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5950007A (ja) * | 1982-09-13 | 1984-03-22 | Toa Nenryo Kogyo Kk | 窒化珪素焼結体のための前駆物質とそれを用いた窒化珪素焼結体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6229364B2 (cg-RX-API-DMAC7.html) | 1987-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0087798B1 (en) | A method and apparatus for making a fine powder compound of a metal and another element | |
| US4769064A (en) | Method for synthesizing ultrafine powder materials | |
| US4632849A (en) | Method for making a fine powder of a metal compound having ceramic coatings thereon | |
| MXPA02006226A (es) | Proceso para formar materiales de fase 312 y proceso para sinterizar los mismos. | |
| JPS5578524A (en) | Manufacture of semiconductor device | |
| GB1050932A (cg-RX-API-DMAC7.html) | ||
| JPS57209810A (en) | Preparation of silicon nitride | |
| JPS56100114A (en) | Alpha-type silicon nitride of high purity and its manufacture | |
| JPS55116604A (en) | Manufacture of finely powdered silicon nitride | |
| JPS53133600A (en) | Production of silicon nitride | |
| NO172228B (no) | Apparatur og fremgangsmaate for fremstilling av metallisk silisium av hoey renhet | |
| JPS57175718A (en) | Preparation of silicon carbide fine powder | |
| JPS56155639A (en) | Apparatus for treatment of powder with microwave plasma | |
| JPS54124898A (en) | Preparation of silicon nitride | |
| JPS6461307A (en) | Production of beta-type silicon carbide fine powder | |
| JPS5567514A (en) | High purity alpha-type silicon nitride and production thereof | |
| JPH0127773B2 (cg-RX-API-DMAC7.html) | ||
| JPS56149306A (en) | Formation of silicon nitride film | |
| ES468692A1 (es) | Un procedimiento para el tratamiento termico de solidos de granulado fino. | |
| SU1135414A1 (ru) | Установка дл получени высокодисперсных порошков | |
| JPS5658537A (en) | Ultrafine powder synthesizing furnace | |
| Schulz et al. | Plasma synthesis of silicon nitride powders. I. RF-plasma system for the synthesis of ceramic powders | |
| JPS5597239A (en) | Method and apparatus for calcining powdery raw material | |
| JPS54137973A (en) | Formation method of plasma nitride | |
| JPS5632316A (en) | Manufacture of sic superfine particle |