JPS55110126A - Preparation of antireflection film - Google Patents

Preparation of antireflection film

Info

Publication number
JPS55110126A
JPS55110126A JP1764979A JP1764979A JPS55110126A JP S55110126 A JPS55110126 A JP S55110126A JP 1764979 A JP1764979 A JP 1764979A JP 1764979 A JP1764979 A JP 1764979A JP S55110126 A JPS55110126 A JP S55110126A
Authority
JP
Japan
Prior art keywords
film
ionized
antireflection film
substance
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1764979A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6149387B2 (enrdf_load_stackoverflow
Inventor
Hiroichi Deguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP1764979A priority Critical patent/JPS55110126A/ja
Publication of JPS55110126A publication Critical patent/JPS55110126A/ja
Publication of JPS6149387B2 publication Critical patent/JPS6149387B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Surface Treatment Of Optical Elements (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Physical Vapour Deposition (AREA)
JP1764979A 1979-02-16 1979-02-16 Preparation of antireflection film Granted JPS55110126A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1764979A JPS55110126A (en) 1979-02-16 1979-02-16 Preparation of antireflection film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1764979A JPS55110126A (en) 1979-02-16 1979-02-16 Preparation of antireflection film

Publications (2)

Publication Number Publication Date
JPS55110126A true JPS55110126A (en) 1980-08-25
JPS6149387B2 JPS6149387B2 (enrdf_load_stackoverflow) 1986-10-29

Family

ID=11949694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1764979A Granted JPS55110126A (en) 1979-02-16 1979-02-16 Preparation of antireflection film

Country Status (1)

Country Link
JP (1) JPS55110126A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60225101A (ja) * 1984-04-23 1985-11-09 Minolta Camera Co Ltd プラスチツク製光学部品
JPS6243601A (ja) * 1985-08-22 1987-02-25 Kyowa Gas Chem Ind Co Ltd 合成樹脂製光学物品の多層反射防止膜の形成方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03114882U (enrdf_load_stackoverflow) * 1990-03-09 1991-11-26

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50118978A (enrdf_load_stackoverflow) * 1974-03-04 1975-09-18
JPS50148285A (enrdf_load_stackoverflow) * 1974-05-02 1975-11-27
JPS51117984A (en) * 1975-04-10 1976-10-16 Matsushita Electric Ind Co Ltd Ionization plating apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50118978A (enrdf_load_stackoverflow) * 1974-03-04 1975-09-18
JPS50148285A (enrdf_load_stackoverflow) * 1974-05-02 1975-11-27
JPS51117984A (en) * 1975-04-10 1976-10-16 Matsushita Electric Ind Co Ltd Ionization plating apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60225101A (ja) * 1984-04-23 1985-11-09 Minolta Camera Co Ltd プラスチツク製光学部品
JPS6243601A (ja) * 1985-08-22 1987-02-25 Kyowa Gas Chem Ind Co Ltd 合成樹脂製光学物品の多層反射防止膜の形成方法

Also Published As

Publication number Publication date
JPS6149387B2 (enrdf_load_stackoverflow) 1986-10-29

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