JPS55108732A - Manufacture of ohmic electrode - Google Patents
Manufacture of ohmic electrodeInfo
- Publication number
- JPS55108732A JPS55108732A JP1665579A JP1665579A JPS55108732A JP S55108732 A JPS55108732 A JP S55108732A JP 1665579 A JP1665579 A JP 1665579A JP 1665579 A JP1665579 A JP 1665579A JP S55108732 A JPS55108732 A JP S55108732A
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- inp
- reaction compound
- evaporation
- coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 150000001875 compounds Chemical class 0.000 abstract 4
- 238000006243 chemical reaction Methods 0.000 abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 3
- 229910052738 indium Inorganic materials 0.000 abstract 3
- 230000008020 evaporation Effects 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 abstract 2
- 229910052751 metal Inorganic materials 0.000 abstract 2
- 239000002184 metal Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910001297 Zn alloy Inorganic materials 0.000 abstract 1
- 229910052785 arsenic Inorganic materials 0.000 abstract 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 abstract 1
- 238000000354 decomposition reaction Methods 0.000 abstract 1
- 238000010494 dissociation reaction Methods 0.000 abstract 1
- 230000005593 dissociations Effects 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229910052698 phosphorus Inorganic materials 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 229910052725 zinc Inorganic materials 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1665579A JPS55108732A (en) | 1979-02-14 | 1979-02-14 | Manufacture of ohmic electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1665579A JPS55108732A (en) | 1979-02-14 | 1979-02-14 | Manufacture of ohmic electrode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55108732A true JPS55108732A (en) | 1980-08-21 |
| JPS6138849B2 JPS6138849B2 (enrdf_load_stackoverflow) | 1986-09-01 |
Family
ID=11922349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1665579A Granted JPS55108732A (en) | 1979-02-14 | 1979-02-14 | Manufacture of ohmic electrode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55108732A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62252134A (ja) * | 1986-04-24 | 1987-11-02 | Matsushita Electric Ind Co Ltd | 化合物半導体装置の製造方法 |
| JPH01307278A (ja) * | 1988-06-04 | 1989-12-12 | Nippon Mining Co Ltd | 太陽電池 |
-
1979
- 1979-02-14 JP JP1665579A patent/JPS55108732A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62252134A (ja) * | 1986-04-24 | 1987-11-02 | Matsushita Electric Ind Co Ltd | 化合物半導体装置の製造方法 |
| JPH01307278A (ja) * | 1988-06-04 | 1989-12-12 | Nippon Mining Co Ltd | 太陽電池 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6138849B2 (enrdf_load_stackoverflow) | 1986-09-01 |
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