JPS55102252A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS55102252A
JPS55102252A JP895279A JP895279A JPS55102252A JP S55102252 A JPS55102252 A JP S55102252A JP 895279 A JP895279 A JP 895279A JP 895279 A JP895279 A JP 895279A JP S55102252 A JPS55102252 A JP S55102252A
Authority
JP
Japan
Prior art keywords
layer
mask
impurities
region
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP895279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6252459B2 (enExample
Inventor
Haruo Amano
Hideto Goto
Koji Takemae
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP895279A priority Critical patent/JPS55102252A/ja
Publication of JPS55102252A publication Critical patent/JPS55102252A/ja
Publication of JPS6252459B2 publication Critical patent/JPS6252459B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP895279A 1979-01-29 1979-01-29 Manufacture of semiconductor device Granted JPS55102252A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP895279A JPS55102252A (en) 1979-01-29 1979-01-29 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP895279A JPS55102252A (en) 1979-01-29 1979-01-29 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS55102252A true JPS55102252A (en) 1980-08-05
JPS6252459B2 JPS6252459B2 (enExample) 1987-11-05

Family

ID=11707000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP895279A Granted JPS55102252A (en) 1979-01-29 1979-01-29 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS55102252A (enExample)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140866A (enExample) * 1974-10-04 1976-04-06 Nippon Electric Co
JPS5365083A (en) * 1976-11-22 1978-06-10 Nec Corp Production of field effect mos semiconductor device
JPS5386177A (en) * 1977-01-07 1978-07-29 Matsushita Electric Ind Co Ltd Production of semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140866A (enExample) * 1974-10-04 1976-04-06 Nippon Electric Co
JPS5365083A (en) * 1976-11-22 1978-06-10 Nec Corp Production of field effect mos semiconductor device
JPS5386177A (en) * 1977-01-07 1978-07-29 Matsushita Electric Ind Co Ltd Production of semiconductor device

Also Published As

Publication number Publication date
JPS6252459B2 (enExample) 1987-11-05

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