JPS55102169A - Ultraviolet ray generator - Google Patents

Ultraviolet ray generator

Info

Publication number
JPS55102169A
JPS55102169A JP917579A JP917579A JPS55102169A JP S55102169 A JPS55102169 A JP S55102169A JP 917579 A JP917579 A JP 917579A JP 917579 A JP917579 A JP 917579A JP S55102169 A JPS55102169 A JP S55102169A
Authority
JP
Japan
Prior art keywords
cavity
discharge tube
conductor
semi
ultraviolet rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP917579A
Other languages
Japanese (ja)
Other versions
JPS6222222B2 (en
Inventor
Yoshio Yazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OAK SEISAKUSHO KK
OKU SEISAKUSHO CO Ltd
Original Assignee
OAK SEISAKUSHO KK
OKU SEISAKUSHO CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OAK SEISAKUSHO KK, OKU SEISAKUSHO CO Ltd filed Critical OAK SEISAKUSHO KK
Priority to JP917579A priority Critical patent/JPS55102169A/en
Publication of JPS55102169A publication Critical patent/JPS55102169A/en
Publication of JPS6222222B2 publication Critical patent/JPS6222222B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To generate strong parallel ultraviolet rays, by setting a discharge tube in a cavity resonator of semi-coaxial microwave for making no-electrode discharge. CONSTITUTION:A cavity resonator of semi-coaxial microwave is composed of an external conductor 2, internal conductor 3 and end plates 4-7, the cavity length l of the external conductor being adjustable by shifting the end plate 4 and the cavity length l' of the inner conductor by shifting itself, respectively. The inner conductor 3 has a discharge tube 1 on its center line to feed microwave power through a coupling connector 5. The appropriate setting of the cavity lengthes l, l' effectively feeds microwave power in the discharge tube 1 to generate high density plasma for emitting strong and parallel ultraviolet rays.
JP917579A 1979-01-31 1979-01-31 Ultraviolet ray generator Granted JPS55102169A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP917579A JPS55102169A (en) 1979-01-31 1979-01-31 Ultraviolet ray generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP917579A JPS55102169A (en) 1979-01-31 1979-01-31 Ultraviolet ray generator

Publications (2)

Publication Number Publication Date
JPS55102169A true JPS55102169A (en) 1980-08-05
JPS6222222B2 JPS6222222B2 (en) 1987-05-16

Family

ID=11713228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP917579A Granted JPS55102169A (en) 1979-01-31 1979-01-31 Ultraviolet ray generator

Country Status (1)

Country Link
JP (1) JPS55102169A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58196023A (en) * 1982-03-29 1983-11-15 フユ−ジヨン・システムズ・コ−ポレ−シヨン Method and device for performing deep ultraviolet ray photolithography
JPS5987751A (en) * 1982-10-06 1984-05-21 フュージョン・システムズ・コーポレーション Far uv beam bulb with improved filler

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0540437U (en) * 1991-10-30 1993-06-01 株式会社屋根技術研究所 Roof door

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49106202A (en) * 1973-01-16 1974-10-08
US4001631A (en) * 1975-04-21 1977-01-04 Gte Laboratories Incorporated Adjustable length center conductor for termination fixtures for electrodeless lamps

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49106202A (en) * 1973-01-16 1974-10-08
US4001631A (en) * 1975-04-21 1977-01-04 Gte Laboratories Incorporated Adjustable length center conductor for termination fixtures for electrodeless lamps

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58196023A (en) * 1982-03-29 1983-11-15 フユ−ジヨン・システムズ・コ−ポレ−シヨン Method and device for performing deep ultraviolet ray photolithography
US4532427A (en) * 1982-03-29 1985-07-30 Fusion Systems Corp. Method and apparatus for performing deep UV photolithography
JPS5987751A (en) * 1982-10-06 1984-05-21 フュージョン・システムズ・コーポレーション Far uv beam bulb with improved filler
JPH0423378B2 (en) * 1982-10-06 1992-04-22 Fusion Systems Corp

Also Published As

Publication number Publication date
JPS6222222B2 (en) 1987-05-16

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