JPS55102169A - Ultraviolet ray generator - Google Patents
Ultraviolet ray generatorInfo
- Publication number
- JPS55102169A JPS55102169A JP917579A JP917579A JPS55102169A JP S55102169 A JPS55102169 A JP S55102169A JP 917579 A JP917579 A JP 917579A JP 917579 A JP917579 A JP 917579A JP S55102169 A JPS55102169 A JP S55102169A
- Authority
- JP
- Japan
- Prior art keywords
- cavity
- discharge tube
- conductor
- semi
- ultraviolet rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To generate strong parallel ultraviolet rays, by setting a discharge tube in a cavity resonator of semi-coaxial microwave for making no-electrode discharge. CONSTITUTION:A cavity resonator of semi-coaxial microwave is composed of an external conductor 2, internal conductor 3 and end plates 4-7, the cavity length l of the external conductor being adjustable by shifting the end plate 4 and the cavity length l' of the inner conductor by shifting itself, respectively. The inner conductor 3 has a discharge tube 1 on its center line to feed microwave power through a coupling connector 5. The appropriate setting of the cavity lengthes l, l' effectively feeds microwave power in the discharge tube 1 to generate high density plasma for emitting strong and parallel ultraviolet rays.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP917579A JPS55102169A (en) | 1979-01-31 | 1979-01-31 | Ultraviolet ray generator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP917579A JPS55102169A (en) | 1979-01-31 | 1979-01-31 | Ultraviolet ray generator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55102169A true JPS55102169A (en) | 1980-08-05 |
JPS6222222B2 JPS6222222B2 (en) | 1987-05-16 |
Family
ID=11713228
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP917579A Granted JPS55102169A (en) | 1979-01-31 | 1979-01-31 | Ultraviolet ray generator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55102169A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58196023A (en) * | 1982-03-29 | 1983-11-15 | フユ−ジヨン・システムズ・コ−ポレ−シヨン | Method and device for performing deep ultraviolet ray photolithography |
JPS5987751A (en) * | 1982-10-06 | 1984-05-21 | フュージョン・システムズ・コーポレーション | Far uv beam bulb with improved filler |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0540437U (en) * | 1991-10-30 | 1993-06-01 | 株式会社屋根技術研究所 | Roof door |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49106202A (en) * | 1973-01-16 | 1974-10-08 | ||
US4001631A (en) * | 1975-04-21 | 1977-01-04 | Gte Laboratories Incorporated | Adjustable length center conductor for termination fixtures for electrodeless lamps |
-
1979
- 1979-01-31 JP JP917579A patent/JPS55102169A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49106202A (en) * | 1973-01-16 | 1974-10-08 | ||
US4001631A (en) * | 1975-04-21 | 1977-01-04 | Gte Laboratories Incorporated | Adjustable length center conductor for termination fixtures for electrodeless lamps |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58196023A (en) * | 1982-03-29 | 1983-11-15 | フユ−ジヨン・システムズ・コ−ポレ−シヨン | Method and device for performing deep ultraviolet ray photolithography |
US4532427A (en) * | 1982-03-29 | 1985-07-30 | Fusion Systems Corp. | Method and apparatus for performing deep UV photolithography |
JPS5987751A (en) * | 1982-10-06 | 1984-05-21 | フュージョン・システムズ・コーポレーション | Far uv beam bulb with improved filler |
JPH0423378B2 (en) * | 1982-10-06 | 1992-04-22 | Fusion Systems Corp |
Also Published As
Publication number | Publication date |
---|---|
JPS6222222B2 (en) | 1987-05-16 |
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