JPS5575905A - Ozone generating tube - Google Patents
Ozone generating tubeInfo
- Publication number
- JPS5575905A JPS5575905A JP14720778A JP14720778A JPS5575905A JP S5575905 A JPS5575905 A JP S5575905A JP 14720778 A JP14720778 A JP 14720778A JP 14720778 A JP14720778 A JP 14720778A JP S5575905 A JPS5575905 A JP S5575905A
- Authority
- JP
- Japan
- Prior art keywords
- dielectric
- ozone generating
- electrode
- space
- ozone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 title abstract 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
PURPOSE: To enhance the ozone yield of an ozone generating tube by arranging the inner electrode, the dielectric and the outer electrode of the tube in the form of a coaxial cylinder and by specifying the product of the distance between the outside of the inner electrode and the inside of the dielectric by the press. of air in the ozone generating space.
CONSTITUTION: The ozone generating tube is mainly composed of inner electrode 13, dielectric 12 and outer electrode 11 arranged in the form of a coaxial cylinder. By applying a high voltage between electrodes 13, 11 silent discharge is produced to ozonize air or oxygen flowing through ozone generating space 14 between electrode 13 and dielectric 12. At this time, the product of distance d of space 14, i.e. distance d between the inside of dielectric 12 and the outside of electrode 13 by press. P of air in space 14, Pd value is set within the range of 150W250cm.mmHg. this Pd value is a rational value supported by experiments, and thus the ozone yield can be enhanced stably.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14720778A JPS5575905A (en) | 1978-11-30 | 1978-11-30 | Ozone generating tube |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14720778A JPS5575905A (en) | 1978-11-30 | 1978-11-30 | Ozone generating tube |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5575905A true JPS5575905A (en) | 1980-06-07 |
Family
ID=15424979
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14720778A Pending JPS5575905A (en) | 1978-11-30 | 1978-11-30 | Ozone generating tube |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5575905A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6325204A (en) * | 1986-07-18 | 1988-02-02 | Terukazu Suzuki | Ozonizer |
FR2692730A1 (en) * | 1992-06-19 | 1993-12-24 | Air Liquide | Device for forming excited or unstable gas molecules and uses of such a device. |
AU658532B1 (en) * | 1993-09-24 | 1995-04-13 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Apparatus for the formation of excited or unstable gaseous molecules and uses of such an apparatus |
EP0679608A3 (en) * | 1994-04-28 | 1997-11-19 | Mitsubishi Denki Kabushiki Kaisha | Ozone generating apparatus |
JP2014058424A (en) * | 2012-09-18 | 2014-04-03 | Kitz Corp | Ozonizer, liquid cleaning apparatus and processing method using the same |
JP2017515286A (en) * | 2014-03-06 | 2017-06-08 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Capacitively coupled plasma source, mitigation system, and vacuum processing system with enhanced Hall effect |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51110494A (en) * | 1975-03-25 | 1976-09-30 | Mitsubishi Electric Corp | OZONHATSUSE ISOCHI |
-
1978
- 1978-11-30 JP JP14720778A patent/JPS5575905A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51110494A (en) * | 1975-03-25 | 1976-09-30 | Mitsubishi Electric Corp | OZONHATSUSE ISOCHI |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6325204A (en) * | 1986-07-18 | 1988-02-02 | Terukazu Suzuki | Ozonizer |
FR2692730A1 (en) * | 1992-06-19 | 1993-12-24 | Air Liquide | Device for forming excited or unstable gas molecules and uses of such a device. |
US5458856A (en) * | 1992-06-19 | 1995-10-17 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Apparatus for the formation of excited or unstable gaseous molecules and uses of such an apparatus |
AU658532B1 (en) * | 1993-09-24 | 1995-04-13 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Apparatus for the formation of excited or unstable gaseous molecules and uses of such an apparatus |
EP0679608A3 (en) * | 1994-04-28 | 1997-11-19 | Mitsubishi Denki Kabushiki Kaisha | Ozone generating apparatus |
EP1069071A3 (en) * | 1994-04-28 | 2006-09-27 | Mitsubishi Denki Kabushiki Kaisha | Ozone generating apparatus |
JP2014058424A (en) * | 2012-09-18 | 2014-04-03 | Kitz Corp | Ozonizer, liquid cleaning apparatus and processing method using the same |
JP2017515286A (en) * | 2014-03-06 | 2017-06-08 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Capacitively coupled plasma source, mitigation system, and vacuum processing system with enhanced Hall effect |
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