JPS5492534A - Plasma treating device - Google Patents
Plasma treating deviceInfo
- Publication number
- JPS5492534A JPS5492534A JP16070977A JP16070977A JPS5492534A JP S5492534 A JPS5492534 A JP S5492534A JP 16070977 A JP16070977 A JP 16070977A JP 16070977 A JP16070977 A JP 16070977A JP S5492534 A JPS5492534 A JP S5492534A
- Authority
- JP
- Japan
- Prior art keywords
- rods
- electrode
- pair
- wafers
- uniform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16070977A JPS5492534A (en) | 1977-12-28 | 1977-12-28 | Plasma treating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16070977A JPS5492534A (en) | 1977-12-28 | 1977-12-28 | Plasma treating device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5492534A true JPS5492534A (en) | 1979-07-21 |
Family
ID=15720761
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16070977A Pending JPS5492534A (en) | 1977-12-28 | 1977-12-28 | Plasma treating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5492534A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5850735A (ja) * | 1981-09-21 | 1983-03-25 | Fuji Electric Corp Res & Dev Ltd | 量産型薄膜生成装置 |
JPS59227169A (ja) * | 1983-06-08 | 1984-12-20 | Agency Of Ind Science & Technol | 太陽電池製造装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4834482A (ja) * | 1971-09-04 | 1973-05-18 | ||
JPS5214374A (en) * | 1975-07-25 | 1977-02-03 | Hitachi Ltd | Treatment equpment for ion beam |
JPS52127766A (en) * | 1976-04-19 | 1977-10-26 | Fujitsu Ltd | Plasma etching unit |
-
1977
- 1977-12-28 JP JP16070977A patent/JPS5492534A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4834482A (ja) * | 1971-09-04 | 1973-05-18 | ||
JPS5214374A (en) * | 1975-07-25 | 1977-02-03 | Hitachi Ltd | Treatment equpment for ion beam |
JPS52127766A (en) * | 1976-04-19 | 1977-10-26 | Fujitsu Ltd | Plasma etching unit |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5850735A (ja) * | 1981-09-21 | 1983-03-25 | Fuji Electric Corp Res & Dev Ltd | 量産型薄膜生成装置 |
JPH0340500B2 (ja) * | 1981-09-21 | 1991-06-19 | ||
JPS59227169A (ja) * | 1983-06-08 | 1984-12-20 | Agency Of Ind Science & Technol | 太陽電池製造装置 |
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