JPS5492534A - Plasma treating device - Google Patents

Plasma treating device

Info

Publication number
JPS5492534A
JPS5492534A JP16070977A JP16070977A JPS5492534A JP S5492534 A JPS5492534 A JP S5492534A JP 16070977 A JP16070977 A JP 16070977A JP 16070977 A JP16070977 A JP 16070977A JP S5492534 A JPS5492534 A JP S5492534A
Authority
JP
Japan
Prior art keywords
rods
electrode
pair
wafers
uniform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16070977A
Other languages
English (en)
Inventor
Daijiro Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16070977A priority Critical patent/JPS5492534A/ja
Publication of JPS5492534A publication Critical patent/JPS5492534A/ja
Pending legal-status Critical Current

Links

JP16070977A 1977-12-28 1977-12-28 Plasma treating device Pending JPS5492534A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16070977A JPS5492534A (en) 1977-12-28 1977-12-28 Plasma treating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16070977A JPS5492534A (en) 1977-12-28 1977-12-28 Plasma treating device

Publications (1)

Publication Number Publication Date
JPS5492534A true JPS5492534A (en) 1979-07-21

Family

ID=15720761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16070977A Pending JPS5492534A (en) 1977-12-28 1977-12-28 Plasma treating device

Country Status (1)

Country Link
JP (1) JPS5492534A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850735A (ja) * 1981-09-21 1983-03-25 Fuji Electric Corp Res & Dev Ltd 量産型薄膜生成装置
JPS59227169A (ja) * 1983-06-08 1984-12-20 Agency Of Ind Science & Technol 太陽電池製造装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834482A (ja) * 1971-09-04 1973-05-18
JPS5214374A (en) * 1975-07-25 1977-02-03 Hitachi Ltd Treatment equpment for ion beam
JPS52127766A (en) * 1976-04-19 1977-10-26 Fujitsu Ltd Plasma etching unit

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834482A (ja) * 1971-09-04 1973-05-18
JPS5214374A (en) * 1975-07-25 1977-02-03 Hitachi Ltd Treatment equpment for ion beam
JPS52127766A (en) * 1976-04-19 1977-10-26 Fujitsu Ltd Plasma etching unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5850735A (ja) * 1981-09-21 1983-03-25 Fuji Electric Corp Res & Dev Ltd 量産型薄膜生成装置
JPH0340500B2 (ja) * 1981-09-21 1991-06-19
JPS59227169A (ja) * 1983-06-08 1984-12-20 Agency Of Ind Science & Technol 太陽電池製造装置

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