JPS4834482A - - Google Patents

Info

Publication number
JPS4834482A
JPS4834482A JP6831571A JP6831571A JPS4834482A JP S4834482 A JPS4834482 A JP S4834482A JP 6831571 A JP6831571 A JP 6831571A JP 6831571 A JP6831571 A JP 6831571A JP S4834482 A JPS4834482 A JP S4834482A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6831571A
Other versions
JPS549471B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6831571A priority Critical patent/JPS549471B2/ja
Publication of JPS4834482A publication Critical patent/JPS4834482A/ja
Publication of JPS549471B2 publication Critical patent/JPS549471B2/ja
Expired legal-status Critical Current

Links

JP6831571A 1971-09-04 1971-09-04 Expired JPS549471B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6831571A JPS549471B2 (ja) 1971-09-04 1971-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6831571A JPS549471B2 (ja) 1971-09-04 1971-09-04

Publications (2)

Publication Number Publication Date
JPS4834482A true JPS4834482A (ja) 1973-05-18
JPS549471B2 JPS549471B2 (ja) 1979-04-24

Family

ID=13370247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6831571A Expired JPS549471B2 (ja) 1971-09-04 1971-09-04

Country Status (1)

Country Link
JP (1) JPS549471B2 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51157512U (ja) * 1975-06-10 1976-12-15
JPS5279861U (ja) * 1975-12-11 1977-06-14
JPS5285371U (ja) * 1975-12-20 1977-06-25
JPS5492534A (en) * 1977-12-28 1979-07-21 Fujitsu Ltd Plasma treating device
JPS5681951A (en) * 1980-11-10 1981-07-04 Toshiba Corp Holder of semiconductor substrate

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51157512U (ja) * 1975-06-10 1976-12-15
JPS5279861U (ja) * 1975-12-11 1977-06-14
JPS5285371U (ja) * 1975-12-20 1977-06-25
JPS5552673Y2 (ja) * 1975-12-20 1980-12-06
JPS5492534A (en) * 1977-12-28 1979-07-21 Fujitsu Ltd Plasma treating device
JPS5681951A (en) * 1980-11-10 1981-07-04 Toshiba Corp Holder of semiconductor substrate

Also Published As

Publication number Publication date
JPS549471B2 (ja) 1979-04-24

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