JPS4834482A - - Google Patents
Info
- Publication number
- JPS4834482A JPS4834482A JP6831571A JP6831571A JPS4834482A JP S4834482 A JPS4834482 A JP S4834482A JP 6831571 A JP6831571 A JP 6831571A JP 6831571 A JP6831571 A JP 6831571A JP S4834482 A JPS4834482 A JP S4834482A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6831571A JPS549471B2 (ja) | 1971-09-04 | 1971-09-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6831571A JPS549471B2 (ja) | 1971-09-04 | 1971-09-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4834482A true JPS4834482A (ja) | 1973-05-18 |
JPS549471B2 JPS549471B2 (ja) | 1979-04-24 |
Family
ID=13370247
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6831571A Expired JPS549471B2 (ja) | 1971-09-04 | 1971-09-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS549471B2 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51157512U (ja) * | 1975-06-10 | 1976-12-15 | ||
JPS5279861U (ja) * | 1975-12-11 | 1977-06-14 | ||
JPS5285371U (ja) * | 1975-12-20 | 1977-06-25 | ||
JPS5492534A (en) * | 1977-12-28 | 1979-07-21 | Fujitsu Ltd | Plasma treating device |
JPS5681951A (en) * | 1980-11-10 | 1981-07-04 | Toshiba Corp | Holder of semiconductor substrate |
-
1971
- 1971-09-04 JP JP6831571A patent/JPS549471B2/ja not_active Expired
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51157512U (ja) * | 1975-06-10 | 1976-12-15 | ||
JPS5279861U (ja) * | 1975-12-11 | 1977-06-14 | ||
JPS5285371U (ja) * | 1975-12-20 | 1977-06-25 | ||
JPS5552673Y2 (ja) * | 1975-12-20 | 1980-12-06 | ||
JPS5492534A (en) * | 1977-12-28 | 1979-07-21 | Fujitsu Ltd | Plasma treating device |
JPS5681951A (en) * | 1980-11-10 | 1981-07-04 | Toshiba Corp | Holder of semiconductor substrate |
Also Published As
Publication number | Publication date |
---|---|
JPS549471B2 (ja) | 1979-04-24 |