JPS5483778A - Mos semiconductor device and its manufacture - Google Patents

Mos semiconductor device and its manufacture

Info

Publication number
JPS5483778A
JPS5483778A JP15196877A JP15196877A JPS5483778A JP S5483778 A JPS5483778 A JP S5483778A JP 15196877 A JP15196877 A JP 15196877A JP 15196877 A JP15196877 A JP 15196877A JP S5483778 A JPS5483778 A JP S5483778A
Authority
JP
Japan
Prior art keywords
film
substrate
drain
source
punch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15196877A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6237543B2 (enrdf_load_html_response
Inventor
Kuniyuki Hamano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP15196877A priority Critical patent/JPS5483778A/ja
Publication of JPS5483778A publication Critical patent/JPS5483778A/ja
Publication of JPS6237543B2 publication Critical patent/JPS6237543B2/ja
Granted legal-status Critical Current

Links

JP15196877A 1977-12-16 1977-12-16 Mos semiconductor device and its manufacture Granted JPS5483778A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15196877A JPS5483778A (en) 1977-12-16 1977-12-16 Mos semiconductor device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15196877A JPS5483778A (en) 1977-12-16 1977-12-16 Mos semiconductor device and its manufacture

Publications (2)

Publication Number Publication Date
JPS5483778A true JPS5483778A (en) 1979-07-04
JPS6237543B2 JPS6237543B2 (enrdf_load_html_response) 1987-08-13

Family

ID=15530143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15196877A Granted JPS5483778A (en) 1977-12-16 1977-12-16 Mos semiconductor device and its manufacture

Country Status (1)

Country Link
JP (1) JPS5483778A (enrdf_load_html_response)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713769A (en) * 1980-06-30 1982-01-23 Fujitsu Ltd Semiconductor device and manufacture thereof
JPS57115871A (en) * 1980-11-24 1982-07-19 Western Electric Co Method of producing semiconductor device
JPS57141963A (en) * 1981-02-27 1982-09-02 Toshiba Corp Manufacture of semiconductor device
JPS6042866A (ja) * 1983-08-19 1985-03-07 Toshiba Corp 半導体装置及びその製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5713769A (en) * 1980-06-30 1982-01-23 Fujitsu Ltd Semiconductor device and manufacture thereof
JPS57115871A (en) * 1980-11-24 1982-07-19 Western Electric Co Method of producing semiconductor device
JPS57141963A (en) * 1981-02-27 1982-09-02 Toshiba Corp Manufacture of semiconductor device
JPS6042866A (ja) * 1983-08-19 1985-03-07 Toshiba Corp 半導体装置及びその製造方法

Also Published As

Publication number Publication date
JPS6237543B2 (enrdf_load_html_response) 1987-08-13

Similar Documents

Publication Publication Date Title
JPS56155572A (en) Insulated gate field effect type semiconductor device
JPS5688354A (en) Semiconductor integrated circuit device
JPS5483778A (en) Mos semiconductor device and its manufacture
JPS54161282A (en) Manufacture of mos semiconductor device
JPS5583267A (en) Method of fabricating semiconductor device
JPS5556663A (en) Insulating-gate type field-effect transistor
JPS57149774A (en) Semiconductor device
JPS568849A (en) Manufacture of semiconductor integrated circuit
JPS5533037A (en) Manufacture of semiconductor device
JPS56126957A (en) Manufacture of semiconductor device
JPS57107068A (en) Complementary mis semiconductor device
JPS54154979A (en) Manufacture of insulated gate type semiconductor device
JPS56104470A (en) Semiconductor device and manufacture thereof
JPS5670669A (en) Longitudinal semiconductor device
JPS5372473A (en) Manufacture of mis type semicondctor device
JPS5412566A (en) Production of semiconductor device
JPS5791537A (en) Manufacture of semiconductor device
JPS5492070A (en) Mis field effect transistor and its manufacture
JPS54158878A (en) Manufacture of semiconductor device
JPS5472986A (en) Manufacture of field effect transistor of insulation gate type
JPS5748269A (en) Semiconductor device
JPS54129983A (en) Manufacture of semiconductor device
JPS5469389A (en) Production of semiconductor device
JPS5546570A (en) Method of fabricating mos semiconductor device
JPS6412575A (en) Manufacture of mos semiconductor device