JPS5479497A - Thin film heating resistor - Google Patents
Thin film heating resistorInfo
- Publication number
- JPS5479497A JPS5479497A JP14744877A JP14744877A JPS5479497A JP S5479497 A JPS5479497 A JP S5479497A JP 14744877 A JP14744877 A JP 14744877A JP 14744877 A JP14744877 A JP 14744877A JP S5479497 A JPS5479497 A JP S5479497A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- heating resistor
- alloy
- forming
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 title abstract 5
- 239000010409 thin film Substances 0.000 title abstract 2
- 229910000676 Si alloy Inorganic materials 0.000 abstract 2
- 229910045601 alloy Inorganic materials 0.000 abstract 2
- 239000000956 alloy Substances 0.000 abstract 2
- 239000011362 coarse particle Substances 0.000 abstract 1
- 238000005336 cracking Methods 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
Landscapes
- Electronic Switches (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14744877A JPS5479497A (en) | 1977-12-07 | 1977-12-07 | Thin film heating resistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14744877A JPS5479497A (en) | 1977-12-07 | 1977-12-07 | Thin film heating resistor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5479497A true JPS5479497A (en) | 1979-06-25 |
JPS6118322B2 JPS6118322B2 (enrdf_load_stackoverflow) | 1986-05-12 |
Family
ID=15430569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14744877A Granted JPS5479497A (en) | 1977-12-07 | 1977-12-07 | Thin film heating resistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5479497A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100250073B1 (ko) * | 1994-09-13 | 2000-03-15 | 니시무로 타이죠 | 서멀헤드및그제조방법 |
-
1977
- 1977-12-07 JP JP14744877A patent/JPS5479497A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100250073B1 (ko) * | 1994-09-13 | 2000-03-15 | 니시무로 타이죠 | 서멀헤드및그제조방법 |
Also Published As
Publication number | Publication date |
---|---|
JPS6118322B2 (enrdf_load_stackoverflow) | 1986-05-12 |
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