JPS5478076A - Frozen sample observation device of scanning electron microscope and similar unit - Google Patents

Frozen sample observation device of scanning electron microscope and similar unit

Info

Publication number
JPS5478076A
JPS5478076A JP14499677A JP14499677A JPS5478076A JP S5478076 A JPS5478076 A JP S5478076A JP 14499677 A JP14499677 A JP 14499677A JP 14499677 A JP14499677 A JP 14499677A JP S5478076 A JPS5478076 A JP S5478076A
Authority
JP
Japan
Prior art keywords
sample
room
auxiliary
electron microscope
scanning electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14499677A
Other languages
English (en)
Inventor
Akimitsu Okura
Naotake Saito
Motohide Ukiana
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14499677A priority Critical patent/JPS5478076A/ja
Priority to US05/966,040 priority patent/US4227080A/en
Publication of JPS5478076A publication Critical patent/JPS5478076A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
JP14499677A 1977-12-05 1977-12-05 Frozen sample observation device of scanning electron microscope and similar unit Pending JPS5478076A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP14499677A JPS5478076A (en) 1977-12-05 1977-12-05 Frozen sample observation device of scanning electron microscope and similar unit
US05/966,040 US4227080A (en) 1977-12-05 1978-12-04 Device for shifting frozen specimen, for use in scanning type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14499677A JPS5478076A (en) 1977-12-05 1977-12-05 Frozen sample observation device of scanning electron microscope and similar unit

Publications (1)

Publication Number Publication Date
JPS5478076A true JPS5478076A (en) 1979-06-21

Family

ID=15375036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14499677A Pending JPS5478076A (en) 1977-12-05 1977-12-05 Frozen sample observation device of scanning electron microscope and similar unit

Country Status (2)

Country Link
US (1) US4227080A (ja)
JP (1) JPS5478076A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58117057U (ja) * 1982-02-04 1983-08-10 日本電子株式会社 電子顕微鏡等における冷却器
JPS6284156U (ja) * 1985-11-15 1987-05-29
JP2006113593A (ja) * 2004-10-18 2006-04-27 Leica Microsystems Cms Gmbh 走査顕微鏡

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4447374A (en) * 1979-12-05 1984-05-08 The Tokyo Metropolitan Institute Of Medical Science Preparing replica film of specimen for electron microscopy
US4334844A (en) * 1979-12-05 1982-06-15 Tokyo Metropolitan Government Replica film of specimen for electron microscopy apparatus
FR2578776A1 (fr) * 1985-03-15 1986-09-19 Commissariat Energie Atomique Boite de transfert
JPS6285840A (ja) * 1985-10-11 1987-04-20 Kureha Chem Ind Co Ltd 走査型電子顕微鏡を用いた試料処理方法および装置
FR2602911B1 (fr) * 1986-08-05 1991-06-28 Letyrant Claude Dispositif de deplacement d'echantillons dans une enceinte a atmosphere controlee
US4797261A (en) * 1987-11-03 1989-01-10 Gatan Inc. Multiple specimen cryotransfer holder for electron microscopes
JPH0668962B2 (ja) * 1987-12-21 1994-08-31 株式会社東芝 真空装置及びそれを用いてプロセスを行う方法
US5412180A (en) * 1993-12-02 1995-05-02 The Regents Of The University Of California Ultra high vacuum heating and rotating specimen stage
WO1998028776A2 (en) * 1996-12-23 1998-07-02 Koninklijke Philips Electronics N.V. Particle-optical apparatus including a low-temperature specimen holder
US5753924A (en) * 1997-03-12 1998-05-19 Gatan, Inc. Ultra-high tilt specimen cryotransfer holder for electron microscope

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3679900A (en) * 1968-12-03 1972-07-25 Hitachi Ltd Specimen holder transfer mechanism for an electron microscope
US3761709A (en) * 1971-03-16 1973-09-25 Jeol Ltd Method and apparatus for observing biological specimens using a scanning electron microscope
US4033904A (en) * 1974-03-22 1977-07-05 Varian Associates, Inc. Interchangeable specimen trays and apparatus for a vacuum type testing system
US3886358A (en) * 1974-05-23 1975-05-27 Us Energy Specimen transfer container for ion microprobe mass analyzer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58117057U (ja) * 1982-02-04 1983-08-10 日本電子株式会社 電子顕微鏡等における冷却器
JPS6328521Y2 (ja) * 1982-02-04 1988-08-01
JPS6284156U (ja) * 1985-11-15 1987-05-29
JPH0323650Y2 (ja) * 1985-11-15 1991-05-23
JP2006113593A (ja) * 2004-10-18 2006-04-27 Leica Microsystems Cms Gmbh 走査顕微鏡

Also Published As

Publication number Publication date
US4227080A (en) 1980-10-07

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