JPS54136171A - Frozen sample breaking device for scanning electron microscope - Google Patents

Frozen sample breaking device for scanning electron microscope

Info

Publication number
JPS54136171A
JPS54136171A JP4315278A JP4315278A JPS54136171A JP S54136171 A JPS54136171 A JP S54136171A JP 4315278 A JP4315278 A JP 4315278A JP 4315278 A JP4315278 A JP 4315278A JP S54136171 A JPS54136171 A JP S54136171A
Authority
JP
Japan
Prior art keywords
tank
cooling
knife
holder
breaking device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4315278A
Other languages
Japanese (ja)
Inventor
Akimitsu Okura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4315278A priority Critical patent/JPS54136171A/en
Publication of JPS54136171A publication Critical patent/JPS54136171A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To facilitate an easy handling of the breaking device with enhanced cooling efficiency by linking the cooling knife device directly to the cooling tank to be moved together with the tank.
CONSTITUTION: Holder 9' of cooling knife 8 is screwed into one end of cooling tank 20, and knife 8, holder 9' and tank 20 are cooled down immediately via refrigerant 7. The outside of tank 20 is covered mostly with tank 22, and a vacuum sealing is given to the contact. While the other end of tank 20 slides along the inner surface of holder 24 via O-ring 23 to be vacuum-sealed. Thus, sample 17 on stage 16 can be cut off with tank 20 and knife 8 unified together. The entire part of the cooling means is supported by holder 24 with the vacuum sealing applied via O-ring 26 to be drawn out of room 3 when necessary. In such constitution, the cooling efficiency is enhanced by unification of the knife and the cooling tank, also ensuring an easy handling since no obstacle exists in room 3.
COPYRIGHT: (C)1979,JPO&Japio
JP4315278A 1978-04-14 1978-04-14 Frozen sample breaking device for scanning electron microscope Pending JPS54136171A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4315278A JPS54136171A (en) 1978-04-14 1978-04-14 Frozen sample breaking device for scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4315278A JPS54136171A (en) 1978-04-14 1978-04-14 Frozen sample breaking device for scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS54136171A true JPS54136171A (en) 1979-10-23

Family

ID=12655861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4315278A Pending JPS54136171A (en) 1978-04-14 1978-04-14 Frozen sample breaking device for scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS54136171A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104520964A (en) * 2012-08-20 2015-04-15 株式会社日立高新技术 Electron microscope and sample movement device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104520964A (en) * 2012-08-20 2015-04-15 株式会社日立高新技术 Electron microscope and sample movement device

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