JPS5223256A - Cooling tank for electron microscope and other equipment - Google Patents

Cooling tank for electron microscope and other equipment

Info

Publication number
JPS5223256A
JPS5223256A JP9861375A JP9861375A JPS5223256A JP S5223256 A JPS5223256 A JP S5223256A JP 9861375 A JP9861375 A JP 9861375A JP 9861375 A JP9861375 A JP 9861375A JP S5223256 A JPS5223256 A JP S5223256A
Authority
JP
Japan
Prior art keywords
cooling tank
equipment
electron microscope
operations
eliminating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9861375A
Other languages
Japanese (ja)
Inventor
Yutaka Kashiwakura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9861375A priority Critical patent/JPS5223256A/en
Publication of JPS5223256A publication Critical patent/JPS5223256A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To perform efficient cooling tank operations by using an lock when breaking vacuum and by eliminating the operations such as the draining cooling agents and other minor operations.
COPYRIGHT: (C)1977,JPO&Japio
JP9861375A 1975-08-15 1975-08-15 Cooling tank for electron microscope and other equipment Pending JPS5223256A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9861375A JPS5223256A (en) 1975-08-15 1975-08-15 Cooling tank for electron microscope and other equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9861375A JPS5223256A (en) 1975-08-15 1975-08-15 Cooling tank for electron microscope and other equipment

Publications (1)

Publication Number Publication Date
JPS5223256A true JPS5223256A (en) 1977-02-22

Family

ID=14224425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9861375A Pending JPS5223256A (en) 1975-08-15 1975-08-15 Cooling tank for electron microscope and other equipment

Country Status (1)

Country Link
JP (1) JPS5223256A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5991648A (en) * 1982-11-16 1984-05-26 Akashi Seisakusho Co Ltd Preventive device for sample pollution

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5991648A (en) * 1982-11-16 1984-05-26 Akashi Seisakusho Co Ltd Preventive device for sample pollution

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