JPS5473576A - Spin coating method and spin coater - Google Patents
Spin coating method and spin coaterInfo
- Publication number
- JPS5473576A JPS5473576A JP14136277A JP14136277A JPS5473576A JP S5473576 A JPS5473576 A JP S5473576A JP 14136277 A JP14136277 A JP 14136277A JP 14136277 A JP14136277 A JP 14136277A JP S5473576 A JPS5473576 A JP S5473576A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- resist
- coating
- chamber
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14136277A JPS5473576A (en) | 1977-11-24 | 1977-11-24 | Spin coating method and spin coater |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14136277A JPS5473576A (en) | 1977-11-24 | 1977-11-24 | Spin coating method and spin coater |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5473576A true JPS5473576A (en) | 1979-06-12 |
JPS6214092B2 JPS6214092B2 (el) | 1987-03-31 |
Family
ID=15290206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14136277A Granted JPS5473576A (en) | 1977-11-24 | 1977-11-24 | Spin coating method and spin coater |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5473576A (el) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59208832A (ja) * | 1983-05-13 | 1984-11-27 | Hitachi Tokyo Electronics Co Ltd | 塗布装置 |
JPS60189936A (ja) * | 1984-03-12 | 1985-09-27 | Nippon Kogaku Kk <Nikon> | 半導体製造装置 |
JPS61104623A (ja) * | 1984-10-29 | 1986-05-22 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 回転塗布方法及び回転塗布装置 |
JP2001198513A (ja) * | 2000-01-17 | 2001-07-24 | Dainippon Screen Mfg Co Ltd | 基板塗布装置 |
CN109675744A (zh) * | 2017-09-29 | 2019-04-26 | 临海市劳尔机械有限公司 | 一种镜片镀膜喷涂机 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02123591U (el) * | 1989-03-22 | 1990-10-11 | ||
JPH0393598U (el) * | 1990-01-16 | 1991-09-24 |
-
1977
- 1977-11-24 JP JP14136277A patent/JPS5473576A/ja active Granted
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59208832A (ja) * | 1983-05-13 | 1984-11-27 | Hitachi Tokyo Electronics Co Ltd | 塗布装置 |
JPS60189936A (ja) * | 1984-03-12 | 1985-09-27 | Nippon Kogaku Kk <Nikon> | 半導体製造装置 |
JPS61104623A (ja) * | 1984-10-29 | 1986-05-22 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 回転塗布方法及び回転塗布装置 |
JPH0248136B2 (el) * | 1984-10-29 | 1990-10-24 | Intaanashonaru Bijinesu Mashiinzu Corp | |
JP2001198513A (ja) * | 2000-01-17 | 2001-07-24 | Dainippon Screen Mfg Co Ltd | 基板塗布装置 |
JP4513999B2 (ja) * | 2000-01-17 | 2010-07-28 | 株式会社Sokudo | 基板塗布装置 |
CN109675744A (zh) * | 2017-09-29 | 2019-04-26 | 临海市劳尔机械有限公司 | 一种镜片镀膜喷涂机 |
Also Published As
Publication number | Publication date |
---|---|
JPS6214092B2 (el) | 1987-03-31 |
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