JPS5470764A - Recrystallization method for semiconductor - Google Patents
Recrystallization method for semiconductorInfo
- Publication number
- JPS5470764A JPS5470764A JP13747477A JP13747477A JPS5470764A JP S5470764 A JPS5470764 A JP S5470764A JP 13747477 A JP13747477 A JP 13747477A JP 13747477 A JP13747477 A JP 13747477A JP S5470764 A JPS5470764 A JP S5470764A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- featuring
- bar
- layer
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title abstract 3
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000001953 recrystallisation Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 6
- 239000013078 crystal Substances 0.000 abstract 3
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Recrystallisation Techniques (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13747477A JPS5470764A (en) | 1977-11-16 | 1977-11-16 | Recrystallization method for semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13747477A JPS5470764A (en) | 1977-11-16 | 1977-11-16 | Recrystallization method for semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5470764A true JPS5470764A (en) | 1979-06-06 |
JPS6161250B2 JPS6161250B2 (enrdf_load_stackoverflow) | 1986-12-24 |
Family
ID=15199449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13747477A Granted JPS5470764A (en) | 1977-11-16 | 1977-11-16 | Recrystallization method for semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5470764A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6414436U (enrdf_load_stackoverflow) * | 1987-07-14 | 1989-01-25 |
-
1977
- 1977-11-16 JP JP13747477A patent/JPS5470764A/ja active Granted
Non-Patent Citations (2)
Title |
---|
JOURNAL OF APPLIED PHYSICS=1964 * |
SOLID STATE PHYSICS=1975 * |
Also Published As
Publication number | Publication date |
---|---|
JPS6161250B2 (enrdf_load_stackoverflow) | 1986-12-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5474682A (en) | Semiconductor and its manufacture | |
CA2037795A1 (en) | Process for Preparing High-Temperature Superconducting Thin Films | |
JPS5516464A (en) | Method of forming wafer for semiconductor device | |
JPS5470764A (en) | Recrystallization method for semiconductor | |
JPS53108389A (en) | Manufacture for semiconductor device | |
JPS5459090A (en) | Semiconductor device and its manufacture | |
JPS5336182A (en) | Thin semiconductor single crystal film forming insulation substrate | |
Ahmet et al. | Diffusion induced amorphization in the crystalline SrTiO3 thin films grown on Si (1 0 0) investigated by combinatorial method | |
JPS53104162A (en) | Forming method for epitaxial layer on semiconductor wafer | |
JPS5687339A (en) | Manufacture of semiconductor device | |
JPS6417314A (en) | Thin film superconductor | |
JPS55149195A (en) | Manufacture of silicon carbide substrate | |
JPS52124860A (en) | Electrode formation method for semiconductor devices | |
LAGOWSKI | Crystal growth of device quality GaAs in space[Annual Report, Apr. 1980- 31 Mar. 1981] | |
JPS5524459A (en) | Selective formation of silicon | |
JPS5467765A (en) | Production of semiconductor device of gallium arsenide | |
JPS544565A (en) | Thermal diffusion method of impurities to semiconductor materials | |
FR2284189A1 (fr) | Procede de depot de materiau semi-conducteur polycristallin | |
JPS5478377A (en) | Method and apparatus for growing semiconductor crystal | |
JPS5721815A (en) | Manufacture of semiconductor device | |
JPS646322A (en) | Thin film superconductor | |
JPS5436192A (en) | Manufacture for semiconductor | |
JPS5247370A (en) | Diffusion method | |
JPS5443679A (en) | Thermal oxidation method of semiconductor device | |
JPS5263668A (en) | Production of semiconductor |