JPS5470764A - Recrystallization method for semiconductor - Google Patents
Recrystallization method for semiconductorInfo
- Publication number
- JPS5470764A JPS5470764A JP13747477A JP13747477A JPS5470764A JP S5470764 A JPS5470764 A JP S5470764A JP 13747477 A JP13747477 A JP 13747477A JP 13747477 A JP13747477 A JP 13747477A JP S5470764 A JPS5470764 A JP S5470764A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- featuring
- bar
- layer
- face
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title abstract 3
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000001953 recrystallisation Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 6
- 239000013078 crystal Substances 0.000 abstract 3
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
Landscapes
- Recrystallisation Techniques (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13747477A JPS5470764A (en) | 1977-11-16 | 1977-11-16 | Recrystallization method for semiconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13747477A JPS5470764A (en) | 1977-11-16 | 1977-11-16 | Recrystallization method for semiconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5470764A true JPS5470764A (en) | 1979-06-06 |
| JPS6161250B2 JPS6161250B2 (enrdf_load_stackoverflow) | 1986-12-24 |
Family
ID=15199449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13747477A Granted JPS5470764A (en) | 1977-11-16 | 1977-11-16 | Recrystallization method for semiconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5470764A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6414436U (enrdf_load_stackoverflow) * | 1987-07-14 | 1989-01-25 |
-
1977
- 1977-11-16 JP JP13747477A patent/JPS5470764A/ja active Granted
Non-Patent Citations (2)
| Title |
|---|
| JOURNAL OF APPLIED PHYSICS=1964 * |
| SOLID STATE PHYSICS=1975 * |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6161250B2 (enrdf_load_stackoverflow) | 1986-12-24 |
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