JPS5468668A - Newton ring measuring apparatus - Google Patents

Newton ring measuring apparatus

Info

Publication number
JPS5468668A
JPS5468668A JP13547877A JP13547877A JPS5468668A JP S5468668 A JPS5468668 A JP S5468668A JP 13547877 A JP13547877 A JP 13547877A JP 13547877 A JP13547877 A JP 13547877A JP S5468668 A JPS5468668 A JP S5468668A
Authority
JP
Japan
Prior art keywords
face
inspected
curvature
center
luminous flux
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13547877A
Other languages
Japanese (ja)
Inventor
Tetsuo Sueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP13547877A priority Critical patent/JPS5468668A/en
Publication of JPS5468668A publication Critical patent/JPS5468668A/en
Pending legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To measure the face accuracy of the face to be inspected by having an optical system which condenses the luminous flux emitted from a light source to the center of curvature of the Newton prototype face and the face to be inspected or its vicinity.
CONSTITUTION: The luminous flux out from a lighting point light source 11 passes through a beam splitter 12 and is condensed near the center of curvature of the Newton prototype 14 whose front and back 2 faces are concentrical spherical faces or the point P near the center of curvature of the face 17 to be inspected of the specimen 16 by an auxiliary lens 13. The luminous flux having been perpendicularly reflected by the prototype face 15 and the face 16 to be inspected goes backward in nearly the same optical path as that of the incident light and the portion reflected by the beam splitter 12 is observed with an observation system 3.
COPYRIGHT: (C)1979,JPO&Japio
JP13547877A 1977-11-11 1977-11-11 Newton ring measuring apparatus Pending JPS5468668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13547877A JPS5468668A (en) 1977-11-11 1977-11-11 Newton ring measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13547877A JPS5468668A (en) 1977-11-11 1977-11-11 Newton ring measuring apparatus

Publications (1)

Publication Number Publication Date
JPS5468668A true JPS5468668A (en) 1979-06-01

Family

ID=15152643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13547877A Pending JPS5468668A (en) 1977-11-11 1977-11-11 Newton ring measuring apparatus

Country Status (1)

Country Link
JP (1) JPS5468668A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104154880A (en) * 2014-05-13 2014-11-19 温州大学 Automatic curvature radius measuring instrument and measuring method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104154880A (en) * 2014-05-13 2014-11-19 温州大学 Automatic curvature radius measuring instrument and measuring method thereof

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