CN104154880A - Automatic curvature radius measuring instrument and measuring method thereof - Google Patents

Automatic curvature radius measuring instrument and measuring method thereof Download PDF

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Publication number
CN104154880A
CN104154880A CN201410203827.2A CN201410203827A CN104154880A CN 104154880 A CN104154880 A CN 104154880A CN 201410203827 A CN201410203827 A CN 201410203827A CN 104154880 A CN104154880 A CN 104154880A
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China
Prior art keywords
photoelectric probe
lens
reflective mirror
control device
measuring instrument
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Pending
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CN201410203827.2A
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Chinese (zh)
Inventor
黄运米
尉鹏飞
柯震栋
田其立
朱海永
黄晓虹
周让
黄超越
严林菲
金清理
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Wenzhou University
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Wenzhou University
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Priority to CN201410203827.2A priority Critical patent/CN104154880A/en
Publication of CN104154880A publication Critical patent/CN104154880A/en
Pending legal-status Critical Current

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Abstract

The invention discloses an automatic curvature radius measuring instrument comprising a monochromatic light source, a lens assembly and a signal device. The lens assembly includes a single face reflective mirror and a standard plate lens. The monochromatic light source and the standard plate lens are located respectively on incident and reflection lines in the same group of the single face reflective mirror. A departing side of the standard plate lens from the single face reflective mirror is provided with a sample clamp. A departing side of the single face reflective mirror from the standard plate lens is provided with a convex lens. A departing side of the convex lens from the single face reflective mirror is provided with a photoelectric probe for obtaining light information. A control device and a processing device are disposed on the photoelectric probe. The automatic curvature radius measuring instrument is simple in structure, can improve production inspection efficiency in this field and accelerate the progress of industrial production, and can also reduce labor cost, prompt intelligent and fast industrial production, and thus develop and promote comprehensive utilization of various disciplines in the fields of production and living; and on the other hand, facilitates promotion and use of the instrument on the market as the production cost is very low.

Description

A kind of radius-of-curvature automatic measuring instrument and measuring method thereof
Technical field
The present invention relates to optics processing detection technique field, be specifically related to a kind of radius-of-curvature automatic measuring instrument.
Background technology
Along with laser technology, the fast development of electronic technology and computer technology, there is qualitative leap in technology and the means of optical measurement.As: by introducing photoelectric technology, numeral, show, record, the advanced technology such as measurement and software programming, hardware circuit automatically automatically, greatly improved precision and the efficiency of optical measurement, for optical precision measurement technology has been opened up vast potential for future development.
In optical field, the measurement of sphere curvature radius has important effect.Meanwhile, the method that sphere curvature radius is measured is also many, as: auto-collimating microscope method, the measuring methods such as the front value of autocollimation mirror method, spherometer method are more classic, also conventional.The appearance of laser has brought substantial development to interfere measurement technique, has successively occurred mole interferometric method, Talbot mensuration, the laser interferometry of being combined with laser sphere, sphere compensation self-reference veneer shearing interference method etc.
Yet it is not high at these, to measure the precision having in the method for radius-of-curvature, some design production costs are higher, be unfavorable for producing universal, what also have needs certain technical requirement to people, therefore cost of necessary searching is not high, the higher and comparatively simple contactless measuring system of operation of precision.This radius-of-curvature automatic measuring instrument designs for this type of defect, not only can have higher precision, and operates very that production cost requirement is all not high, is beneficial to universal.
Summary of the invention
The object of the invention is to: for the deficiencies in the prior art, the invention provides that a kind of cost is low, the higher contactless radius-of-curvature automatic measuring instrument simple to operate of precision; Second object of the present invention is: for the deficiencies in the prior art, the invention provides a kind of measuring method of measuring simple radius-of-curvature automatic measuring instrument.
To achieve these goals, the present invention has adopted following technical scheme:
A kind of radius-of-curvature automatic measuring instrument, comprise monochromatic source and lens subassembly, described lens subassembly comprises one side reflective mirror and standard plano lens, described monochromatic source and standard plano lens lay respectively on same group of incident ray and reflected ray of one side reflective mirror, the side that described standard plano lens deviates from one side reflective mirror is provided with sample clamp, the side that described one side reflective mirror deviates from standard plano lens is provided with for converging the convex lens of the interference light of standard plano lens and sample generation, the side that described convex lens deviate from one side reflective mirror is provided with for obtaining the photoelectric probe of optical information, in photoelectric probe, be connected with control device and treating apparatus.
As preferably, described control device comprises motor control assembly and photoelectric probe control device, described motor control assembly is connected with described photoelectric probe by motor photooptical data wire, and described photoelectric probe control device is also connected with described photoelectric probe by photooptical data wire.Adopt after above-mentioned preferred version,
As preferably, described treating apparatus comprises computer processor unit, described motor control assembly is connected with described computer processor unit by the first data conductor, and described photoelectric probe control device is connected with computer processor unit by the second data conductor.Adopt after above-mentioned preferred version,
As preferably, a side of described motor control assembly is connected with respectively translation stepper motor and rotating stepper motor.Adopt after above-mentioned preferred version,
As preferably, described photoelectric probe comprises the first photoelectric probe and the second photoelectric probe, the first described photoelectric probe is connected with described photoelectric probe control device by the first probe control line, and the second described photoelectric probe is connected with described photoelectric probe control device by the second probe control line.Adopt after above-mentioned preferred version,
In order to realize above-mentioned second object, the present invention has adopted following technical scheme:
A measuring method for radius-of-curvature automatic measuring instrument according to claim 1, comprises the following steps: first, sample, with starting control device and treating apparatus after sample clamp clamping, is arranged to computer processor unit corresponding data; Open monochromatic source, monochromatic source is sent parallel monochromatic light, monochromatic light is by one side light-emitting mirror reflection ray, reflection ray is interfered up and down in the air film of standard plano lens and sample clamping, and converge by convex lens, and by photoelectric probe obtaining information, and pass to computer processor and carry out computing, derive result.
The principle of radius-of-curvature automatic measuring instrument of the present invention utilization is the principle of Newton ring instrument, and Newton ring instrument is to be placed on optical flat glass and to be formed by a larger plano-convex lens of radius-of-curvature, forms the clearance of a wedge shape between flat glass surface and convex lens sphere.When irradiating Newton ring instrument with directional light, at sphere and flat glass contact point, just having formed concentric circles interference ring is around Newton ring, utilizes and observes these interference rings with transmitted light, because the border surface of air-gap is crooked, spacing between interference ring is not wait, as shown in this Fig. 1.
In Fig. 2, light beam L impinges upon distance from the left side be the air wedge of d, part light T 1border, the left side at gas wedge reflects back, part light T 2by gas wedge.On the border, the right side of gas wedge, there is part light T 3reflect, owing to being from the large flat glass surface reflection of refractive index herein, so comprise a phase place, change.Part light T 4first from gas wedge right margin, reflect, then from the border, the left side of gas wedge, reflect again, it is half-wave loss that reflection each time all has a phase place to change, and the optical path difference of upper and lower two surface reflections of air film is as shown in Figure 2
Δ = 2 d k + λ 2
From interference condition, when
Δ = 2 d k + λ 2 = kλ Δ = 2 d k + λ 2 = ( 2 k + 1 ) λ 2 (wherein, k=0,1,2,3,4,5 ...) (1)
D=0 when the contact of two glassy phases, in be formed centrally bright rays.For by the formed gas wedge of plano-convex lens peace glass, the thickness of gas wedge depends on from the distance of plano-convex lens and flat glass contact point.In other words, depend on the bending radius of convex lens, formula (2) has illustrated such relation.
R 2=r 2+ (R-d) 2wherein d = r 2 2 R , ( d < < R ) - - - ( 2 )
For little thickness d, interference ring is that the radius of Newton ring can calculate with following formula:
r k 2 = k&lambda;R - - - ( 3 )
Accurate while measuring for considering, can adopt the direct D that measures k level annulus k(k+m) the direct D of level interference circle k+m, known
D k 2 = 4 kR&lambda; D k + m 2 = 4 ( k + m ) R&lambda; - - - ( 4 )
?
R = D k + m 2 - D k 2 4 m&lambda; - - - ( 5 )
Radius-of-curvature automatic measuring instrument of the present invention is simple in structure, be conducive to be widely used in actual production life, not only can improve the production testing efficiency in this field, accelerate commercial production process, also can reduce labour cost, impel industrial intellectuality and rapid, thereby development promotes every subjects knowledge in the comprehensive utilization in productive life field, because production cost is lower, be conducive to popularization and the use of this instrument on market on the other hand.
Accompanying drawing explanation
Fig. 1 is the structural representation that the embodiment of the present invention adopts principle Newton ring instrument;
Fig. 2 is the explanation schematic diagram that the embodiment of the present invention adopts principle Newton ring instrument;
Fig. 3 is the structural representation of embodiment of the present invention radius-of-curvature automatic measuring instrument;
Fig. 4 is embodiment of the present invention computer processor unit and broadcasting and TV probe fit structure schematic diagram;
Fig. 5 is embodiment of the present invention fundamental diagram.
Embodiment
As shown in Figure 3-Figure 5, embodiments of the invention are a kind of radius-of-curvature automatic measuring instrument specifically, comprises monochromatic source 1 and lens subassembly 2.Lens subassembly 2 comprises one side reflective mirror 21 and standard plano lens 22.Monochromatic source 1 and standard plano lens 22 lay respectively on same group of incident ray and reflected ray of one side reflective mirror 21.The side that standard plano lens 22 deviates from one side reflective mirror 21 is provided with sample clamp 23.The side that one side reflective mirror 21 deviates from standard plano lens 22 is provided with for converging the convex lens 24 of the interference light of standard plano lens 22 and sample 3 generations, the side that convex lens 24 deviate from one side reflective mirror 21 is provided with for obtaining the photoelectric probe 4 of optical information, is connected with control device 5 and treating apparatus 6 in photoelectric probe 4.
Control device 5 comprises motor control assembly 51 and photoelectric probe control device 52, and motor control assembly 51 is connected with photoelectric probe 4 by motor photooptical data wire 511, and photoelectric probe control device 52 is also connected with photoelectric probe 4 by photooptical data wire 521.Treating apparatus 6 comprises computer processor unit 61, and motor control assembly 51 is connected with computer processor unit 61 by the first data conductor 512.Photoelectric probe control device 52 is connected with computer processor unit 61 by the second data conductor 522.One side of motor control assembly 51 is connected with respectively translation stepper motor 513 and rotating stepper motor 514.
Photoelectric probe 4 comprises the first photoelectric probe 41 and the second photoelectric probe 42, the first photoelectric probe 41 is connected with photoelectric probe control device 52 by the first probe control line 5211, and the second photoelectric probe 42 is connected with photoelectric probe control device 52 by the second probe control line 5212.
During work, first, by starting control device 5 and treating apparatus 6 after sample 3 use sample clamp 23 clampings, computer processor unit 61 corresponding datas are set; Open monochromatic source 1, monochromatic source 1 is sent parallel monochromatic light, monochromatic light is by one side light-emitting mirror 21 reflection rays, reflection ray is interfered up and down in the air film of standard plano lens 22 and sample 3 clampings, and converge by convex lens 24, and by photoelectric probe 4 obtaining informations, and pass to computer processor unit 61 and carry out computing, derive result.

Claims (6)

1. a radius-of-curvature automatic measuring instrument, comprise monochromatic source and lens subassembly, it is characterized in that: described lens subassembly comprises one side reflective mirror and standard plano lens, described monochromatic source and standard plano lens lay respectively on same group of incident ray and reflected ray of one side reflective mirror, the side that described standard plano lens deviates from one side reflective mirror is provided with sample clamp, the side that described one side reflective mirror deviates from standard plano lens is provided with for converging the convex lens of the interference light of standard plano lens and sample generation, the side that described convex lens deviate from one side reflective mirror is provided with for obtaining the photoelectric probe of optical information, in photoelectric probe, be connected with control device and treating apparatus.
2. radius-of-curvature automatic measuring instrument according to claim 1, it is characterized in that: described control device comprises motor control assembly and photoelectric probe control device, described motor control assembly is connected with described photoelectric probe by motor photooptical data wire, and described photoelectric probe control device is also connected with described photoelectric probe by photooptical data wire.
3. radius-of-curvature automatic measuring instrument according to claim 2, it is characterized in that: described treating apparatus comprises computer processor unit, described motor control assembly is connected with described computer processor unit by the first data conductor, and described photoelectric probe control device is connected with computer processor unit by the second data conductor.
4. according to the radius-of-curvature automatic measuring instrument described in claim 2 or 3, it is characterized in that: a side of described motor control assembly is connected with respectively translation stepper motor and rotating stepper motor.
5. according to the radius-of-curvature automatic measuring instrument described in claim 2 or 3, it is characterized in that: described photoelectric probe comprises the first photoelectric probe and the second photoelectric probe, the first described photoelectric probe is connected with described photoelectric probe control device by the first probe control line, and the second described photoelectric probe is connected with described photoelectric probe control device by the second probe control line.
6. a measuring method for radius-of-curvature automatic measuring instrument according to claim 1, is characterized in that comprising the following steps: first, sample, with starting control device and treating apparatus after sample clamp clamping, is arranged to computer processor unit corresponding data; Open monochromatic source, monochromatic source is sent parallel monochromatic light, monochromatic light is by one side light-emitting mirror reflection ray, reflection ray is interfered up and down in the air film of standard plano lens and sample clamping, and converge by convex lens, and by photoelectric probe obtaining information, and pass to computer processor and carry out computing, derive result.
CN201410203827.2A 2014-05-13 2014-05-13 Automatic curvature radius measuring instrument and measuring method thereof Pending CN104154880A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110375669A (en) * 2019-07-18 2019-10-25 武汉优光科技有限责任公司 A kind of test method and test device of focal length lens curvature
CN110455221A (en) * 2019-09-11 2019-11-15 大连鉴影光学科技有限公司 A kind of light channel structure and equipment of rapid survey optical mirror slip radius of curvature

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JPS5468668A (en) * 1977-11-11 1979-06-01 Canon Inc Newton ring measuring apparatus
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CN102128600A (en) * 2010-12-10 2011-07-20 西安科技大学 Method and device for measuring curvature radius of lens by use of laser
CN102269572A (en) * 2011-04-26 2011-12-07 中国科学院上海光学精密机械研究所 Optical disk warpage testing device and testing method
CN102538716A (en) * 2011-12-21 2012-07-04 西安北方捷瑞光电科技有限公司 Eccentricity detecting method for spherical surface optic element with small caliber and large curvature

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5468668A (en) * 1977-11-11 1979-06-01 Canon Inc Newton ring measuring apparatus
JP2010019685A (en) * 2008-07-10 2010-01-28 Olympus Corp Curvature radius measuring apparatus
CN102128600A (en) * 2010-12-10 2011-07-20 西安科技大学 Method and device for measuring curvature radius of lens by use of laser
CN102269572A (en) * 2011-04-26 2011-12-07 中国科学院上海光学精密机械研究所 Optical disk warpage testing device and testing method
CN102538716A (en) * 2011-12-21 2012-07-04 西安北方捷瑞光电科技有限公司 Eccentricity detecting method for spherical surface optic element with small caliber and large curvature

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110375669A (en) * 2019-07-18 2019-10-25 武汉优光科技有限责任公司 A kind of test method and test device of focal length lens curvature
CN110375669B (en) * 2019-07-18 2020-12-29 武汉优光科技有限责任公司 Method and device for testing curvature of telephoto lens
CN110455221A (en) * 2019-09-11 2019-11-15 大连鉴影光学科技有限公司 A kind of light channel structure and equipment of rapid survey optical mirror slip radius of curvature
CN110455221B (en) * 2019-09-11 2024-04-09 大连鉴影光学科技有限公司 Optical path structure and equipment for rapidly measuring curvature radius of optical lens

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Application publication date: 20141119