CN102269572A - Optical disk warpage testing device and testing method - Google Patents

Optical disk warpage testing device and testing method Download PDF

Info

Publication number
CN102269572A
CN102269572A CN2011101055671A CN201110105567A CN102269572A CN 102269572 A CN102269572 A CN 102269572A CN 2011101055671 A CN2011101055671 A CN 2011101055671A CN 201110105567 A CN201110105567 A CN 201110105567A CN 102269572 A CN102269572 A CN 102269572A
Authority
CN
China
Prior art keywords
radius
measured
signal processing
processing unit
newton ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2011101055671A
Other languages
Chinese (zh)
Inventor
王国华
阮昊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Institute of Optics and Fine Mechanics of CAS
Original Assignee
Shanghai Institute of Optics and Fine Mechanics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Institute of Optics and Fine Mechanics of CAS filed Critical Shanghai Institute of Optics and Fine Mechanics of CAS
Priority to CN2011101055671A priority Critical patent/CN102269572A/en
Publication of CN102269572A publication Critical patent/CN102269572A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Manufacturing Optical Record Carriers (AREA)

Abstract

A device for testing the warping of optical disk is composed of an illumination source, a reflector, a transparent platform, a CCD image sensor and a signal processing unit. The invention has the advantages of simple principle, convenient realization, reliability, practicability, flexible function expansion and high cost performance.

Description

Disc tilt proving installation and method of testing
Technical background
The present invention relates to CD, particularly a kind of disc tilt proving installation and method of testing.
Background technology
The imprinting of CD is the process of a complexity, in this process, there are a lot of technologies all can the shape of disc to be exerted an influence, cause disadvantageous variation, and then reduce the disc quality even produce useless sheet, and warpage is exactly a criterion to the disc integral smoothness.
Reason for the disc tilt generation; industry has a lot of discussion, and mainly thinking at present has following reason: moist gradient, protective paint are shunk, different sheet base humidity in the heat gradient during the injection moulding, the different sheet Ji Wendu in the adhesion process, different original sheet base shape, the adhesion process, the age difference, the injection temperature difference that is subjected to thermal history difference, sheet base of sheet base of sheet base when bonding.And the moist gradient of sheet base is the most tangible reason that causes disc warpage, and be the distortion of unique impermanency by the warpage that this moist gradient causes, other all factors all can cause permanent warpage except that this factor, and this permanent warpage is not to rely on just restraining oneself of disc to recover.
The buckling deformation of CD, the actual light shape of spot that can cause scan light panel surface data-track no longer is desirable circular light spot, and can on the direction that warpage takes place, produce distortion, the hot spot that causes scanning disc tracks expansion upwards all occurs in tangential and footpath, and the birefringence of CD is exerted an influence.
According to different needs, asymmetry has the various definitions mode, and what the most generally use is exactly the angle of testing plane and standard flat.Because this angle is generally very little, just be equal to the warpage of having obtained this point so many times obtain the tangent of this angle, this patent just uses this method to measure the warpage of CD.
At present all price is very expensive to the measurement of disc tilt on the market.
Summary of the invention
The present invention aims to provide a kind of proving installation and method of disc asymmetry, and to realize the measurement to the optical disk warpage, it is simple that this device should have principle, and it is convenient to realize, and is practical reliable, can flexible expansion function and the high advantage of cost performance.
Technical solution of the present invention is as follows:
A kind of disc tilt proving installation is characterized in that this device is made of lighting source, catoptron, transparent platform, ccd image sensor and signal processing unit, and the position relation of above-mentioned component is as follows:
The beam direction that sends at described lighting source is provided with described catoptron, and this catoptron and described light beam are at 45; Folded light beam working direction at described catoptron sets gradually described transparent platform and described ccd image sensor, vertical described transparent platform of described folded light beam and ccd image sensor, the output terminal of this ccd image sensor links to each other with the input end of described signal processing unit, described transparent platform is made of a smooth glass sheet of rectangular parallelepiped, the flatness of this glass sheet is put for CD to be measured far above the order of magnitude of disc tilt to be measured.
Described lighting source is a sodium lamp.
The measuring method of utilizing above-mentioned disc tilt proving installation to carry out disc tilt comprises the steps:
1. select measurement point: divide N equidistantly concentric circles on CD to be measured, all concentrically ringed centers of circle overlap with the described CD to be measured center of circle, and this N concentrically ringed radius is respectively R from inside to outside 1, R 2R N-1, R NDraw the radius of angles such as M bar from the center of circle of described CD to be measured, the angle between per two radiuses is the 1/M*360 degree; Every radius of drawing and all concentric circles have N intersection point, form M*N intersection point altogether, i.e. M*N test point,
Is 1 to M according to clockwise direction with every radius number consecutively, and according to being 1 to N from inside to outside with the concentric circles number consecutively, (i, j), (i, warpage j) is defined as α to this test point to be defined as test point by the intersection point of radius i and concentric circles j (i, j), wherein the span of i is: 1≤i≤M, and the span of j is: 1≤j≤N;
To described signal processing unit input M and the concrete numerical value of N, set the threshold alpha of disc tilt Yu
2. at first CD to be measured is placed on the described transparent platform;
3. open described lighting source, the folded light beam that the light beam that this lighting source sends forms after described mirror reflects is vertically shone described CD to be measured, adjust the position of this CD to be measured, make CD to be measured place described folded light beam, the Newton ring image that described CD to be measured produces is received and imports described signal processing unit by described ccd image sensor;
4. described signal processing unit to selected test point (i, warpage j) is calculated and deposits in the database by following formula:
α (i,j)=Tan?α (i,j)=λ*(T (i,j+1)-T (i,j-1))/(2*(R j+1-R j-1));
Wherein: λ is sodium lamp wavelength 589.3 ± 0.2nm, T (i, j+1)Be measurement point (i, j+1) Dui Ying Newton ring number of rings, T (i, j-1)Be measurement point (i, j-1) Dui Ying Newton ring number of rings, R J+1Be the radius of j+1 Newton ring, R J-1It is the radius of j-1 Newton ring; The circle of j=0 is the through hole in the middle of the CD, and the circle of j=M+1 is CD itself, i.e. T (i, 0)Be radius i and the corresponding Newton ring number of rings in CD through hole intersection point place, R 0Be the radius of CD through hole, T (i, M+1)Be the radius i newton ring change number corresponding with optical disk intersection point place, R M+1It is the radius of CD.
5. the relatively more all α of described signal processing unit (i, j), obtain a maximal value α Max
6. described signal processing unit is with α MaxThreshold alpha with disc tilt YuCompare:
Work as α Max>α Yu, then CD is defective;
Work as α Max≤ α Yu, then CD is qualified.
Described signal processing unit is a computing machine.
Technique effect of the present invention:
Compared with prior art, the present invention can measure the warpage of CD, and the efficient height is lower than on the market commercial device cost, and concrete principle is simple, and it is convenient, reliable and practical to realize, can flexible expansion function and the high advantage of cost performance.
Description of drawings
Fig. 1 is the structural representation of the proving installation of disc tilt of the present invention.
Fig. 2 is the embodiment of the present invention as M=N=4, the figure of test point on the CD to be measured.
Embodiment
The present invention will be further described below in conjunction with example and accompanying drawing, but should not limit protection scope of the present invention with this.
See also Fig. 1 earlier, Fig. 1 is the structural representation of disc tilt proving installation of the present invention, it also is the structural representation of one embodiment of the invention, as seen from the figure, disc tilt proving installation of the present invention is made of lighting source 1, catoptron 2, transparent platform 3, ccd image sensor 4 and signal processing unit 5, and the position relation of above-mentioned component is as follows:
The beam direction that sends at described lighting source 1 is provided with described catoptron 2, and this catoptron 2 is at 45 with described light beam; Folded light beam working direction at described catoptron 2 sets gradually described transparent platform 3 and described ccd image sensor 4, vertical described transparent platform 3 of described folded light beam and ccd image sensor 4, the output terminal of this ccd image sensor 4 links to each other with the input end of described signal processing unit 5, described transparent platform 3 is made of a smooth glass sheet of rectangular parallelepiped, the flatness of this glass sheet is put for CD 6 to be measured far above the order of magnitude of CD 6 warpages to be measured.
Described lighting source 1 is a sodium lamp.
Described catoptron 2 is corner cube mirrors.
Utilize above-mentioned disc tilt proving installation to carry out the measuring method of disc tilt, this method comprises the steps:
1. select measurement point: divide N equidistantly concentric circles on CD to be measured, all concentrically ringed centers of circle overlap with described CD to be measured 6 centers of circle, and this N concentrically ringed radius is respectively R from inside to outside 1, R 2R N-1, R NDraw the radius of angles such as M bar from the center of circle of described CD 6 to be measured, the angle between per two radiuses is the 1/M*360 degree; Every radius of drawing and all concentric circles have N intersection point, form M*N intersection point altogether, i.e. M*N test point,
Is 1 to M according to clockwise direction with every radius number consecutively, and according to being 1 to N from inside to outside with the concentric circles number consecutively, (i, j), (i, warpage j) is defined as α to this test point to be defined as test point by the intersection point of radius i and concentric circles j (i, j), wherein the span of i is: 1≤i≤M, and the span of j is: 1≤j≤N;
To described signal processing unit 5 input M and the concrete numerical value of N, set the threshold alpha of disc tilt Yu
2. at first CD 6 to be measured is placed on the described transparent platform 3;
3. open described lighting source 1, the illuminating bundle that the light beam that this lighting source 1 sends forms after described catoptron 2 reflections vertically shines described CD to be measured 6, adjust the position of this CD 6 to be measured, make CD 6 to be measured place described illuminating bundle, the Newton ring image that described CD 6 to be measured produces is received and imports described signal processing unit 5 by described ccd image sensor 4;
5 pairs of selected test points of 4. described signal processing unit (i, warpage j) is calculated and deposits in the database by following formula:
α (i,j)=Tanα (i,j)=λ*(T (i,j+1)-T (i,j-1))/(2*(R j+1-R j-1));
Wherein: λ is sodium lamp wavelength 589.3 ± 0.2nm, T (i, j+1)Be measurement point (i, j+1) Dui Ying Newton ring number of rings, T (i, j-1)Be measurement point (i, j-1) Dui Ying Newton ring number of rings, R J+1Be the radius of j+1 Newton ring, R J-1It is the radius of j-1 Newton ring; The circle of j=0 is the through hole in the middle of the CD, and the circle of j=M+1 is CD itself, i.e. T (i, 0)Be radius i and the corresponding Newton ring number of rings in CD through hole intersection point place, R 0Be the radius of CD through hole, T (i, M+1)Be the radius i newton ring change number corresponding with optical disk intersection point place, R M+1It is the radius of CD.
5. the relatively more all α of described signal processing unit 5 (i, j)Obtain a maximal value α Max
6. described signal processing unit 5 is with α MaxThreshold alpha with disc tilt YuCompare:
Work as α Max>α Yu, then CD is defective;
Work as α Max≤ α Yu, then CD is qualified.
Described signal processing unit 5 is computing machines.
Can behind described transparent platform, produce Newton ring after the described transparent platform 3 of the light of described corner cube mirror 3 reflections through the described CD 6 to be measured of described placement;
Described Newton ring is received by described ccd image sensor 4;
Described ccd image sensor 4 with the data transfer that produces to described signal processing unit 5.
Described illuminator 1 is made of sodium lamp.
Described transparent platform 3 is made of a smooth glass sheet of rectangular parallelepiped, and the flatness of this glass sheet must be far above the order of magnitude of disc tilt.
Described CD to be measured 6, according to selecting measurement point as Fig. 2 mode:
Divide N equidistantly concentric circles on CD to be measured, all concentrically ringed centers of circle overlap with described CD to be measured (6) center of circle, and this N concentrically ringed radius is respectively R from inside to outside 1, R 2R N-1, R NDraw angle radiuses such as M bar from the center of circle of described CD to be measured, so the angle between per two radiuses is the 1/M*360 degree; Every radius of drawing and concentric circles have N intersection point, have so just divided M*N intersection point, just M*N test point.Wherein M and N are positive integer, and the span of N is from 3 to infinity, and M is an even number, span from 2 to infinity.
Higher if desired measuring accuracy, M and N just get bigger value.
According to clockwise every radius is numbered from 1 to M, according to from inside to outside each concentric circles being numbered from 1 to N, so ((1≤j≤N) crossing test point is defined as that (i j), is α in the warpage of this point to the radius i that draws from the center of circle of described CD to be measured for 1≤i≤M) and described concentric circles j (i, j)
After the selection mode was determined, after promptly M and N determined, the position of these measurement points in CD preestablished described signal processing unit.
The measurement point example of the division on the CD when M=N=4 that for example provides among Fig. 2 is exactly tested point (2,2) as second radius and second concentrically ringed intersection point.
Experiment shows that the present invention is the warpage that can measure CD, and it is simple to have principle, and it is convenient, reliable and practical to realize, can flexible expansion function and the high advantage of cost performance.

Claims (4)

1. a disc tilt proving installation is characterized in that this device is made of lighting source (1), catoptron (2), transparent platform (3), ccd image sensor (4) and signal processing unit (5), and the position relation of above-mentioned component is as follows:
The beam direction that sends at described lighting source (1) is provided with described catoptron (2), and this catoptron (2) is at 45 with described light beam; Folded light beam working direction at described catoptron (2) sets gradually described transparent platform (3) and described ccd image sensor (4), vertical described transparent platform of described folded light beam (3) and ccd image sensor (4), the output terminal of this ccd image sensor (4) links to each other with the input end of described signal processing unit (5), described transparent platform (3) is made of a smooth glass sheet of rectangular parallelepiped, the flatness of this glass sheet is put for CD to be measured (6) far above the order of magnitude of CD to be measured (6) warpage.
2. the proving installation of disc asymmetry according to claim 1 is characterized in that described lighting source (1) is a sodium lamp.
3. utilize the described disc tilt proving installation of claim 1 to carry out the measuring method of disc tilt, it is characterized in that this method comprises the steps:
1. select measurement point: divide N equidistantly concentric circles on CD to be measured, all concentrically ringed centers of circle overlap with described CD to be measured (6) center of circle, and this N concentrically ringed radius is respectively R from inside to outside 1, R 2... R N-1, R NDraw the radius of angles such as M bar from the center of circle of described CD to be measured (6), the angle between per two radiuses is the 1/M*360 degree; Every radius of drawing and all concentric circles have N intersection point, form M*N intersection point altogether, i.e. M*N test point,
Is 1 to M according to clockwise direction with every radius number consecutively, and according to being 1 to N from inside to outside with the concentric circles number consecutively, (i, j), (i, warpage j) is defined as α to this test point to be defined as test point by the intersection point of radius i and concentric circles j (i, j), wherein the span of i is: 1≤i≤M, and the span of j is: 1≤j≤N;
To described signal processing unit (5) input M and the concrete numerical value of N, set the threshold alpha of disc tilt Yu
2. at first CD to be measured (6) is placed on the described transparent platform (3);
3. open described lighting source (1), the folded light beam that the light beam that this lighting source (1) sends forms after described catoptron (2) reflection is vertically shone described CD to be measured (6), adjust the position of this CD to be measured (6), make CD to be measured (6) place described folded light beam, the Newton ring image that described CD to be measured (6) produces is received and imports described signal processing unit (5) by described ccd image sensor (4);
4. described signal processing unit (5) to selected test point (i, warpage j) is calculated and deposits in the database by following formula:
α (i,j)=Tanα (i,j)=λ*(T (i,j+1)-T (i,j-1))/(2*(R j+1-R j-1));
Wherein: λ is sodium lamp wavelength 589.3 ± 0.2nm, T (i, j+1)Be measurement point (i, j+1) Dui Ying Newton ring number of rings, T (i, j-1)Be measurement point (i, j-1) Dui Ying Newton ring number of rings, R J+1Be the radius of j+1 Newton ring, R J-1It is the radius of j-1 Newton ring; The circle of j=0 is the through hole in the middle of the CD, and the circle of j=M+1 is CD itself, i.e. T (i, 0)Be radius i and the corresponding Newton ring number of rings in CD through hole intersection point place, R 0Be the radius of CD through hole, T (i, M+1)Be the radius i newton ring change number corresponding with optical disk intersection point place, R M+1It is the radius of CD.
5. the relatively more all α of described signal processing unit (5) (i, j), obtain a maximal value α Max
6. described signal processing unit (5) is with α MaxThreshold alpha with disc tilt YuCompare:
Work as α Max>α Yu, then CD is defective;
Work as α Max≤ α Yu, then CD is qualified.
4. disc tilt proving installation according to claim 3 carries out the measuring method of disc tilt, it is characterized in that described signal processing unit (5) is a computing machine.
CN2011101055671A 2011-04-26 2011-04-26 Optical disk warpage testing device and testing method Pending CN102269572A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011101055671A CN102269572A (en) 2011-04-26 2011-04-26 Optical disk warpage testing device and testing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011101055671A CN102269572A (en) 2011-04-26 2011-04-26 Optical disk warpage testing device and testing method

Publications (1)

Publication Number Publication Date
CN102269572A true CN102269572A (en) 2011-12-07

Family

ID=45051944

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011101055671A Pending CN102269572A (en) 2011-04-26 2011-04-26 Optical disk warpage testing device and testing method

Country Status (1)

Country Link
CN (1) CN102269572A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104075664A (en) * 2014-07-02 2014-10-01 中国矿业大学 Shaft deformation rapid scanning and obtaining device
CN104154880A (en) * 2014-05-13 2014-11-19 温州大学 Automatic curvature radius measuring instrument and measuring method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4989980A (en) * 1989-03-02 1991-02-05 Honeywell Inc. Method and apparatus for measuring coefficient of thermal expansion
US5479261A (en) * 1991-05-29 1995-12-26 Honeywell Inc. Readout system for dilatometers
DE10164388C1 (en) * 2001-12-28 2003-04-30 Valeo Schalter & Sensoren Gmbh Steering angle sensor for automobile steering wheel using optical scanning of code disc with screening of stray light
US20030210407A1 (en) * 2002-05-13 2003-11-13 3D Media Co., Ltd. Image processing method, image processing system and image processing apparatus
CN1693843A (en) * 2004-05-09 2005-11-09 谢会骅 Space laser Newton's ring collimater and computer intelligent core tracking

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4989980A (en) * 1989-03-02 1991-02-05 Honeywell Inc. Method and apparatus for measuring coefficient of thermal expansion
US5479261A (en) * 1991-05-29 1995-12-26 Honeywell Inc. Readout system for dilatometers
DE10164388C1 (en) * 2001-12-28 2003-04-30 Valeo Schalter & Sensoren Gmbh Steering angle sensor for automobile steering wheel using optical scanning of code disc with screening of stray light
US20030210407A1 (en) * 2002-05-13 2003-11-13 3D Media Co., Ltd. Image processing method, image processing system and image processing apparatus
CN1693843A (en) * 2004-05-09 2005-11-09 谢会骅 Space laser Newton's ring collimater and computer intelligent core tracking

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104154880A (en) * 2014-05-13 2014-11-19 温州大学 Automatic curvature radius measuring instrument and measuring method thereof
CN104075664A (en) * 2014-07-02 2014-10-01 中国矿业大学 Shaft deformation rapid scanning and obtaining device

Similar Documents

Publication Publication Date Title
CN102128600B (en) Method and device for measuring curvature radius of lens by use of laser
CN102538687B (en) Method and device for measuring morphology of moving sample
CN101858736B (en) Multifocal holographic differential confocal super-large curvature radius measuring method and device
CN104613881A (en) Lens center thickness measuring device and method based on double face confocal measurement
CN101650169A (en) Scraper planeness detection system
CN105806531A (en) Measuring instrument for film residual stress of flexible transparent substrate
CN102257352A (en) A 3d scanner
CN104198437B (en) A kind of device and method utilizing laser measurement material thermal expansion coefficient
CN102997857A (en) Aperture measurement device and aperture measurement method
CN102269572A (en) Optical disk warpage testing device and testing method
CN104359411A (en) Displacement measurement system capable of measuring by virtue of grating
CN101614526A (en) Measure the double-confocal method and the measurement mechanism of thickness and refractive index
CN104568247B (en) Measuring method and measuring device for membrane stress
JP2011058872A (en) Method for adjusting and measuring eccentricity of optical element by use of autocollimator, and method for working lens
CN103837091A (en) Glass warping degree testing device and method
CN110440710B (en) Surface shape detection system and detection method of high-reflectivity concave axicon
CN109520443B (en) Roll angle measuring method based on combined surface type reference part
CN202033139U (en) Polarizing stress meter and photoelasticimeter
CN209246953U (en) A kind of full spectrum measured film thickness instrument
CN108759723B (en) Optical angle measuring method
CN102519405A (en) Detector for flatness of reflecting surface of plane mirror and service method of detector
CN114061467B (en) Lens thickness measuring device and method
CN103630090B (en) High resolution double shaft autocollimator system
CN109708591A (en) A kind of detection device of aspherical optical element
CN205619875U (en) Wavelength correction formula multiple beam ladder planar mirror laser interferometer

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20111207