CN103837091A - Glass warping degree testing device and method - Google Patents
Glass warping degree testing device and method Download PDFInfo
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- CN103837091A CN103837091A CN201410072587.7A CN201410072587A CN103837091A CN 103837091 A CN103837091 A CN 103837091A CN 201410072587 A CN201410072587 A CN 201410072587A CN 103837091 A CN103837091 A CN 103837091A
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Abstract
The invention discloses a glass warping degree testing device and method, and relates to the field of glass detection. The device comprises a laser source, a positioning test bench, a plane mirror and a displacement reading device, wherein according to configurations, the laser source is used for generating laser beams, the positioning test bench is used for containing detected glass, enabling the detected glass to reflect the laser beams generated by the laser source at a detection point and enabling the reflected laser beams to be parallel with the plane where one longitudinal section of the detected glass is located, the plane mirror is used for reflecting the laser beams reflected by the detected glass, the displacement reading device comprises a display substrate, and the laser beams reflected by the plane mirror are irradiated onto the display substrate. By the adoption of the device and method, the warping degree of the detected glass can be quickly and precisely tested.
Description
Technical field
The present invention relates to glass detection field, more particularly to a kind of glass warpage test device and method.
Background technology
In recent years, with the high speed development of touch display screen technology, the various cover-plate glass such as mobile phone faceplate glass, IPAD panels are widely used.In cover-plate glass deep processing industry, to ensure that cover-plate glass is fitted with the normal of touch-screen, it is necessary to its angularity is detected before product export, the too high substandard products of angularity are eliminated, to ensure that product quality meets the requirement of follow-up attaching process.Angularity herein refers to product relative to the buckling deformations amount produced by design size shape.Chemical enhanced class glass, chemical enhanced original glass being used the cover-plate glass of usual touch-screen more（Or reprocess chemical enhanced class glass and remove glass surface and the bad glass such as scratch, collapse）Process occurs different degrees of flexural deformation, thus the detection of touch-screen cover-plate glass angularity judges to be particularly important.
In the prior art, the detection method to glass warpage has following two：A kind of is 4 datum marks for being taken by CCD laser displacement sensors measured object, an imaginary plane is set through computer process of measurement, by non-contact testing so as to obtain the angularity measured value of measured object, but the equipment cost the need for this method use costly, testing time per sheet glass needs nearly 8 seconds, test speed is slow, and operation rate of machinery is low.Another method is：Using the method for fixed point bracing wire, i.e., the line two-by-two on the diagonal of product weighs warpage by the distance between two lines of measurement, and the shortcoming of this method is：Line is often thin and soft cotton thread or plastic cord.Measurement both apart from when, it is difficult to it is accurate.And in many people's operations of 4 fetch bit meetings of product, error can also increase.
Therefore, prior art has yet to be improved and developed.
The content of the invention
It is an object of the invention to provide a kind of detection means of glass warpage and method, to solve, glass warpage detection device cost in the prior art is too high, inefficiency technical problem.
To achieve these goals, the invention provides a kind of glass warpage test device, including：Lasing light emitter, is configured to produce laser beam；Assignment test platform, is configured to：Lay and be detected glass so that the laser beam that the detected glass is produced in detection point reflection by the lasing light emitter, and make it that the laser beam reflected is parallel with the plane where a longitudinal cross-section of the detected glass；Level crossing, is configured to reflect the laser beam of the detected glass-reflected；Displacement reading device, including a display base plate, are irradiated on the display base plate by the laser beam that level crossing reflects.
Alternatively, the assignment test platform has the table top installed and be detected glass, and the mirror plane where the minute surface of the level crossing is parallel with the table top.
Alternatively, the distance of lasing light emitter to the table top is equal to mirror plane and the distance of the table top.
Alternatively, the table top is parallel to horizontal plane.
Alternatively, at least one level crossing is additionally provided between lasing light emitter and assignment test platform, the laser beam for lasing light emitter to be launched finally reflexes to the detected glass through continuous reflection；Be additionally provided with least one level crossing between the assignment test platform and displacement reading device, for by laser beam through continuous reflection to the displacement reading device.
To achieve these goals, present invention also offers a kind of glass warpage method of testing, including：Lasing light emitter launches laser to the test point of detected glass；Laser is through being detected glass-reflected to mirror surface；The reflected mirror-reflection of laser is to displacement reading device；Read the deviation post of laser；The angularity for being detected glass is calculated according to the deviation post of laser.
Alternatively, reading the deviation post of laser includes：The first deviation post corresponding with the first test point positioned at the upper surface for being detected glass is recorded, the second deviation post corresponding with the second test point positioned at the lower surface for being detected glass is recorded；The midpoint of first deviation post, the second deviation post is labeled as origin, the angularity of test point corresponding with the origin is 0；First test point and the second test point are located at the same longitudinal tangent plane for being detected glass and are located at the same horizontal tangent plane of the detected glass；The deviation post of the laser is the displacement between irradiation position and origin of the laser beam corresponding with test point on displacement reading device.
Alternatively, methods described includes：According to the relative position of the deviation post of laser and origin, the concave and convex surfaces for being detected glass are distinguished.
Alternatively, methods described includes：According to origin and first, second deviation post, the scale of angularity is indicated；Make the position of test point in longitudinal section alteration where first, second test point, read the scale of angularity corresponding with the test point after change.
Alternatively, methods described includes：Increase the laser of lasing light emitter transmitting and the angle of vertical guide；And/or increase is detected the distance of glass and transmitting minute surface.
Beneficial effects of the present invention：The method of the present invention is by reading position of the laser reflected successively by detected glass, level crossing on displacement reading device, judge to be detected the warpage degree of glass by the deviation post, only need to detect a test point and can reach testing goal, angularity can just be drawn by carrying out coordinate measurement to multiple test points the need for relative to prior art, can quickly and accurately test out the angularity of detected glass.In addition, the glass warpage test device of the present invention is for the glass warpage test device of prior art, cost is extremely low, can largely save industrial cost.Under the conditions of existing price, its cost is at 1000 yuan or so, for the glass warpage test device of the hundreds of thousands easily of prior art, and it has significant progressive.
In addition, using the glass warpage test device of the present invention, also can quickly distinguish the concave and convex surfaces of detected glass.
According to the accompanying drawings to the detailed description of the specific embodiment of the invention, those skilled in the art will become more apparent that the above-mentioned and other purposes of the present invention, advantages and features.
Brief description of the drawings
Some specific embodiments of the present invention are described in detail by way of example, and not by way of limitation with reference to the accompanying drawings hereinafter.Identical reference denotes same or similar part or part in accompanying drawing.It should be appreciated by those skilled in the art that what these accompanying drawings were not necessarily drawn to scale.In accompanying drawing：
Fig. 1 is glass warpage test device structural representation in the present invention；
Fig. 2 is the schematic cross-section in detected glass length direction in the present invention；
Fig. 3 is the schematic diagram of glass warpage test device in the present invention；
Fig. 4 is another schematic diagram of glass warpage test device in the present invention；
Fig. 5 is another schematic diagram of glass warpage test device in the present invention；
Fig. 6 is the flow chart of glass warpage method of testing in the present invention.
Embodiment
To make the objects, technical solutions and advantages of the present invention clearer, clear and definite, the present invention is described in more detail for the embodiment that develops simultaneously referring to the drawings.It is to be appreciated that in the following embodiments be similar to rectangle and with symmetric curvature characteristic small size glass（Such as less than 5 inches）Illustrated as detected glass, but it is not construed as limiting to the detected glass of the present invention, and detected glass of the invention still can be other shapes.For more than 5 inches large-size glass（Such as 6 inches, 15 inches）, then can be averaged and be divided into four small pieces, reuse the method mentioned in following embodiments and determine warp value.In addition, the detected glass described in the present embodiment includes but is not limited to the various cover-plate glass such as mobile phone faceplate glass, IPAD face glass.
Fig. 1 is glass warpage test device structural representation in the present invention.As shown in figure 1, the glass warpage test device that the present invention is provided at least may include lasing light emitter 1, assignment test platform 2, level crossing 3 and displacement reading device 4.
After laser beam 6 is sent through lasing light emitter 1, expose to and be seated on the detected glass 5 of assignment test platform 2, now it is exactly test point with the point that the plane towards lasing light emitter of detected glass 5 is contacted.Assignment test platform 2 plays a part of the position of fixed detected glass 5 into horizontally disposed, all identical to ensure the test point per a piece of detected glass 5, so as to reach the purpose of standardization detection.It is detected a longitudinal cross-section of laser beam 6 and detected glass 5 that glass 5 is reflected（In other words, the section of length direction）The plane at place is parallel.Laser 6 is most reflexed on displacement reading device 4 through level crossing 3 afterwards through being detected on glass-reflected to level crossing 3.Displacement reading device 4 includes a display base plate, is irradiated in by the laser beam 6 that level crossing 3 reflects on the display base plate.When the angularity for setting detected glass 5 is 0, irradiation position of the laser beam 6 on displacement reading device 4 is at 0 graduation mark.
In one embodiment of the invention, lasing light emitter 1 and assignment test platform 2 are all removable and fixable after movement.When the test point of every detected glass 5 needs change, the methods such as the position of running fix testboard 2 or the position for adjusting lasing light emitter 1 can be passed through so that required test point can be exactly impacted by inciding the laser beam of detected glass 5.But the detection of same series of products then needs to fix：The distance between lasing light emitter 1, level crossing 3, assignment test platform 2, and the test point position of detected glass 5 are required to be fixed up, and just can accurately judge such product
In the embodiment shown in fig. 1, assignment test platform 2 has the table top installed and be detected glass, level crossing 3 and table top（Convex surface midpoint with detected glass 5 or the tangent plane at concave surface midpoint in other words）It is arranged in parallel.In other embodiments of the invention, the two can also have angle.As shown in figure 1, the tangent plane can also be parallel to horizontal plane.Now, being detected glass 5 can directly be placed on assignment test platform 2, and it can maintain the stabilization of its relative position by gravity.In some embodiments of the invention, when tangent plane and horizontal plane are not parallel, detected glass can pass through fixing device（Such as fixture）Assignment test platform 2 is fixed on, the technique effect of the present invention can be still realized.
In the embodiment shown in fig. 1, the distance of lasing light emitter 1 to table top is equal to the distance of level crossing 3 and table top.In other embodiments of the invention, the distance of the two can not be waited, and, to improve the measurement accuracy of angularity, this be able to can be described in detail below by way of increasing distance of the level crossing 3 with table top.
In one embodiment of the invention, can be by way of the transmission range for extending laser beam, to improve the measurement accuracy of angularity.At least one level crossing is such as also provided between lasing light emitter 1 and assignment test platform 2, the laser beam for lasing light emitter 1 to be launched finally reflexes to the detected glass 5 through continuous reflection.Similarly, it can also continue to set more than one level crossing between assignment test platform 2 and displacement reading device 4, in addition to an original level crossing 3, so that the laser beam through being detected glass transmitting finally reflexes to displacement reading device 4 by after multiple level crossings continuously transmitting.
In some embodiments of the invention, when the angularity that can set detected glass 5 is 0, irradiation position of the laser 6 on displacement reading device 4 is at 0 graduation mark.
Fig. 2 is the schematic cross-section in detected glass length direction in the present invention.As shown in Fig. 2 applied to mobile phone faceplate, the various cover-plate glass of IPAD panels（Such as chemical enhanced class glass）Curved shape generally there is the characteristic that similar symmetry is bent, therefore the tow sides of glass have concavity and convexity.Small size glass（Less than 5 inches）During as detected glass, the shape that is shaped as symmetry bending of the length direction for section can be approximately thought, and the midpoint angularity in glass length direction is 0, the angularity of fixed position is an output valve on function.
It is further detailed below with the embodiment shown in Fig. 3, Fig. 4, Fig. 5 come the glass warpage test device to the present invention.In the embodiment shown in Fig. 3, Fig. 4, Fig. 5, lasing light emitter is θ with vertical guide angle, is detected glass horizontal and places, level crossing is parallel with the tangent plane of the central point of detected glass, and the distance of lasing light emitter to tangent plane is equal to mirror plane and the distance of tangent plane, is L.
Fig. 3 is the schematic diagram of glass warpage test device in the present invention.Its reflect be detected glass angularity be 0 perfect condition.Now, detected glass does not have the differentiation on concave surface convex surface.As shown in Figure 3, the incident light launched by lasing light emitter is θ 1 with the normal angle of detected glass surface, incident light is θ 2 with the normal angle of detected glass surface after being detected glass-reflected, the angle of the light beam and normal that incide level crossing surface after being detected glass-reflected is θ 3, the light beam reflected through level crossing after with the angle of level crossing normal to a surface be θ 4.Had according to reflection law：θ=θ1=θ2=θ3=θ4.
Setting is detected glass（Because of the product performance of chemical enhanced class glass：Product width point midway, sectional area along its length is a symmetrical function, and the function tangent line of test point can be set to K, and function distal end slope absolute value is maximum）Slope be K：The glass section of ideal glass is a horizontal line（Y values==0, warpage value function y=aX2+ bX+c, function abc is 0）.Incide test platform in lasing fluorescence source（Or tangent plane）Ray in the projected length of the plane be d1, ray of the laser facula after detected glass-reflected is in test platform（Or tangent plane）Projected length be d2, laser facula incides the ray of displacement reading device in test platform after being reflected through level crossing（Or tangent plane）Projected length be d3.Had according to reflective projection principle：d1=d2=d3=L*tanθ.K values herein and hereafter K ', K ' ' selected mainly obtained by the way that detected glass length direction near parabolic is compared：Function curve can be pushed away according to the concrete numerical value of other instruments device measuring is counter, all be certainly approximate per sheet glass function without identical function.
In the embodiment shown in fig. 3, because experimental subjects is ideal glass, its angularity is 0, therefore, the offset distance between the irradiation position of hot spot of the laser beam on displacement reading device and 0 graduation mark of displacement reading device（It is set as △, △ ' hereafter, △ ' ' easily it is same concept）For 0.
Fig. 4 is another schematic diagram of glass warpage test device in the present invention.It reflects that being detected glass has certain warpage and the situation of concave surface upward.As shown in Figure 4, the incident light launched by lasing light emitter is θ 5 with the normal angle of detected glass surface, incident light is θ 6 with the normal angle of detected glass surface after being detected glass-reflected, the angle of the light beam and normal that incide level crossing surface after being detected glass-reflected is θ 7, the light beam reflected through level crossing after with the angle of level crossing normal to a surface be θ 8.Had according to reflection law：θ 5=θ 6, θ 7=θ 8.
When hot spot exposes to the surface of detected glass, the slope of the point（Setting K ' represents the slope of the warping function at this）Place face is " the mirror face " that hot spot irradiates, " the vertical normal plane of light " at this can carry out actan | K ' | the rotation of angle, incident light is θ+actan with the angle of " light vertical normal plane " | K ' |, it can obtain, θ 6=θ 5=θ+actan | K ' |, and then can derive, θ 8=θ 7=θ 6+actan | K ' |=θ+2actan | K ' |.
The slope for being detected glass is set as K '：Concave glass length direction section proximal line is parabola（Warpage value function y=aX2+ bX+c, function c are 0, and slope is 2aX+b）.Incide test platform in lasing fluorescence source（Or tangent plane）Ray in the projected length of the plane be d1 ', ray of the laser facula after detected glass-reflected is in test platform（Or tangent plane）Projected length be d2 ', laser facula incides the ray of displacement reading device in test platform after being reflected through level crossing（Or tangent plane）Projected length be d3 '.D1 '=d1, d2 '=d3 '=L*tan θ 8 are had according to mathematical principle.
In the embodiment shown in fig. 4, offset distance △ '=（d1′+d2′+d3′）-（d1+d2+d3）=2d2′-2d1=2L(tan（θ+2actan|K′|）-tanθ)=2Ltan（2actan|K′|）（Because K absolute value very little, 0 is leveled off to）.
Fig. 5 is another schematic diagram of glass warpage test device in the present invention.It reflects that being detected glass has certain warpage and the situation of convex surface upward.As shown in Figure 5, the incident light launched by lasing light emitter is θ 9 with the normal angle of detected glass surface, incident light is θ 10 with the normal angle of detected glass surface after being detected glass-reflected, the angle of the light beam and normal that incide level crossing surface after being detected glass-reflected is θ 11, the light beam reflected through level crossing after with the angle of level crossing normal to a surface be θ 12.Had according to reflection law：θ 9=θ 10, θ 11=θ 12.
When hot spot exposes to the surface of detected glass, the slope of the point（K ' ' represents the slope of the warping function at this）Place face is " the mirror face " that hot spot irradiates, and " the vertical normal plane of light " at this can carry out actan | K ' ' | the rotation of angle, incident light is θ-actan with the angle of " light vertical normal plane " | and K |.Can obtain, θ 10=θ 9=θ-actan | K |, can be obtained according to principle of reflection, θ 12=θ 11=θ 9-actan | K |=θ -2actan | K |.
The slope for being detected glass is set as K ' '：Convex glass length direction section proximal line is parabola（Warpage value function y=aX2+ bX+c, function c are 0, and slope is 2aX+b）.Incide test platform in lasing fluorescence source（Or tangent plane）Ray in the projected length of the plane be d1 ' ', ray of the laser facula after detected glass-reflected is in test platform（Or tangent plane）Projected length be d2 ' ', laser facula incides the ray of displacement reading device in test platform after being reflected through level crossing（Or tangent plane）Projected length be d3 ' '.Had according to reflective projection principle：D1 ' '=d1, d2 ' '=d3 ' '=L*tan（θ+actan|K′′|）.It can similarly calculate and draw, offset distance △ ' '=2*L*tan (2actan | K ' ' |).
As can be seen from the above-described embodiment, the warpage degree of glass（The slope of tested pilot）There is above-mentioned functional relation between described offset distance, it is known that, in the case where obtaining the specific data of offset distance, it is possible to glass warp degree is judged according to the size of offset distance.
It is to be appreciated that in the embodiment shown in Fig. 3, Fig. 4, Fig. 5, object is unlikely to deform because being detected glass for fragility（It is difficult to be influenceed its script curved shape by self gravitation）, therefore the test of male female face, it can be assumed that equal for slope absolute value, slope is positive and negative opposite.In addition, because its slope value is generally smaller（The sizes values ratio very little very little of the general and actual warpage of glass its length is detected, approximate can be regarded as through the above-mentioned concave surface △ ' of functional transformation and convex surface △ ' ' equal.Embodiment shown in Fig. 3, Fig. 4, Fig. 5 is to be based on a kind of fuzzy mathematics decision theory, the sample that other instruments measurement data can be derived from is calibrated, then the multiple of re-quantization amplification, finds out the offset distance value of judgement, is finally reached the quick purpose for judging whether product is qualified.
Fig. 6 is the flow chart of glass warpage method of testing in the present invention.As shown in fig. 6, the glass warpage method of testing that the present invention is provided is mainly included the following steps that：Start；S1：Lasing light emitter launches laser to the test point of detected glass；S2：Laser is through being detected glass-reflected to mirror surface；S3：The reflected mirror-reflection of laser is to displacement reading device；S4：Read the deviation post of laser；S5:The angularity of tested glass is calculated according to the deviation post of laser；Terminate.
In one embodiment of the invention, reading the deviation post of laser includes：The first deviation post corresponding with the first test point positioned at the upper surface for being detected glass is recorded, the second deviation post corresponding with the second test point positioned at the lower surface for being detected glass is recorded；Included according to the angularity that the deviation post of laser calculates detected glass：The midpoint of first deviation post, the second deviation post is labeled as origin, the angularity of test point corresponding with the origin is 0；Wherein, the first test point and the second test point are located at the same longitudinal tangent plane for being detected glass and are located at the same horizontal tangent plane of the detected glass.Deviation post herein can be understood as being transmitted to the point residing for the hot spot of displacement reading device.
For example, first as shown in Figure 4 by the concave surface of detected glass upward, laser facula can be shown in the X1 positions of displacement reading device after being detected glass and reflective mirror, then as shown in Figure 5 by the convex surface of detected glass upward, laser facula can be shown in the X2 positions of displacement reading device after detected glass and reflective mirror.According to symmetry flexural property, the midpoint O for taking X1, X2 two-point defined line is that the angularity at detected glass length midpoint is 0 position.Thus X1（Or X2）The air line distance for deviateing midpoint O is then the offset distance after the angularity amplification under the reflection unit, the magnification level（The distance that X1 or X2 deviates O points is set to △）The metric for judging product warpage degree can be used as.
It is to be appreciated that by increasing the laser of lasing light emitter transmitting and the angle of vertical guide；And/or increase is detected the distance of glass and transmitting minute surface.θ is bigger, and skew △ is bigger；L is longer, and skew △ then can be bigger, and testing result then can be more clear.
Operator can indicate the scale of angularity according to origin and first, second deviation post；Make the position of test point in longitudinal section alteration where first, second test point, read the scale of angularity corresponding with the test point after change.For example, set graduated scale can be attached into displacement reading device so that origin is located at 0 point of graduated scale, first, second deviation post is located at the two ends of graduated scale.
In another embodiment of the present invention, methods described includes：According to the skew of laser and the relative position of origin, the concave and convex surfaces for being detected glass are distinguished.As shown in figure 3, after origin is determined, being marked as at 0 point, when deviation post is located at 0 point of right side, judge concave upright.As shown in figure 4, when deviation post is located at 0 point of left side, judging that convex surface is upward.When by increasing the laser of lasing light emitter transmitting and the angle of vertical guide；And/or increase be detected glass and transmitting minute surface apart from when, the male and fomale(M＆F) direction of detected glass can be differentiated with degree of precision, it is to avoid the concave and convex direction mistake of silk printing glass to be processed and make it that the glass silk screen printing direction of warpage is reverse and make it that product is unqualified.
The device and method of the present invention can judge the angularity of symmetry glass with higher precision, and equipment is simple, it is also more convenient to operate, and the deviation post that operator only needs to read the hot spot of displacement reading device can just draw angularity, efficiency is so improved, production cost is reduced indirectly.
It should be appreciated that the application of the present invention is not limited to above-mentioned citing, for those of ordinary skills, it can according to the above description be improved or be converted, for example, the position for the device mentioned to the present invention or size change over etc..All these modifications and variations should all belong to the protection domain of appended claims of the present invention.
Claims (10)
1. a kind of glass warpage test device, it is characterised in that including：Lasing light emitter, is configured to produce laser beam；Assignment test platform, is configured to：Lay and be detected glass so that the laser beam that the detected glass is produced in detection point reflection by the lasing light emitter, and make it that the laser beam reflected is parallel with the plane where a longitudinal cross-section of the detected glass；Level crossing, is configured to reflect the laser beam of the detected glass-reflected；Displacement reading device, including a display base plate, are irradiated on the display base plate by the laser beam that level crossing reflects.
2. device according to claim 1, it is characterised in that the assignment test platform has the table top installed and be detected glass, the mirror plane where the minute surface of the level crossing is parallel with the table top.
3. device according to claim 2, it is characterised in that the distance of lasing light emitter to the table top is equal to mirror plane and the distance of the table top.
4. device according to claim 2, it is characterised in that the table top is parallel to horizontal plane.
5. the device according to claim any one of 1-3, it is characterised in that be additionally provided with least one level crossing between lasing light emitter and the assignment test platform, for the laser beam of launching lasing light emitter through continuous reflection to the detected glass；Be additionally provided with least one level crossing between the assignment test platform and displacement reading device, for by laser beam through continuous reflection to the displacement reading device.
6. a kind of glass warpage method of testing, it is characterised in that including：
Lasing light emitter launches laser to the test point of detected glass；Laser is through being detected glass-reflected to mirror surface；The reflected mirror-reflection of laser is to displacement reading device；Read the deviation post of laser；The angularity of tested glass is calculated according to the deviation post of laser.
7. method according to claim 6, it is characterised in that reading the deviation post of laser includes：The first deviation post corresponding with the first test point positioned at the upper surface for being detected glass is recorded, the second deviation post corresponding with the second test point positioned at the lower surface for being detected glass is recorded；The midpoint of first deviation post, the second deviation post is labeled as origin, the angularity of test point corresponding with the origin is 0；First test point and the second test point are located at the same longitudinal tangent plane for being detected glass and are located at the same horizontal tangent plane of the detected glass；The deviation post of the laser is the displacement between irradiation position and origin of the laser beam corresponding with test point on displacement reading device.
8. method according to claim 7, it is characterised in that including：According to the relative position of the deviation post of laser and origin, the concave and convex surfaces for being detected glass are distinguished.
9. method according to claim 7, it is characterised in that including：According to origin and first, second deviation post, the scale of angularity is indicated；Make the position of test point in longitudinal section alteration where first, second test point, read the scale of angularity corresponding with the test point after change.
10. the method according to claim any one of 6-9, it is characterised in that including：Increase the laser of lasing light emitter transmitting and the angle of vertical guide；And/or increase is detected the distance of glass and transmitting minute surface.
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| CN109443223A (en) * | 2018-10-25 | 2019-03-08 | 彩虹（合肥）液晶玻璃有限公司 | A kind of glass substrate wrapping degree measurement base station and device |
| CN113029032A (en) * | 2021-03-26 | 2021-06-25 | 中南大学 | High-precision surface shape measuring method and device based on spectrum confocal |
| CN113155023A (en) * | 2021-04-02 | 2021-07-23 | 甘肃旭盛显示科技有限公司 | Method and system for measuring glass warping degree of liquid crystal substrate |
| CN114509026A (en) * | 2022-04-19 | 2022-05-17 | 中国科学院西安光学精密机械研究所 | Sub-arc second-level angle measurement system and method and relative deformation angle measurement method |
| CN115200497A (en) * | 2022-09-13 | 2022-10-18 | 山西烁科晶体有限公司 | Device and method for detecting box-shaped variable of wafer |
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| CN113029032A (en) * | 2021-03-26 | 2021-06-25 | 中南大学 | High-precision surface shape measuring method and device based on spectrum confocal |
| CN113155023A (en) * | 2021-04-02 | 2021-07-23 | 甘肃旭盛显示科技有限公司 | Method and system for measuring glass warping degree of liquid crystal substrate |
| CN114509026A (en) * | 2022-04-19 | 2022-05-17 | 中国科学院西安光学精密机械研究所 | Sub-arc second-level angle measurement system and method and relative deformation angle measurement method |
| CN114509026B (en) * | 2022-04-19 | 2022-08-19 | 中国科学院西安光学精密机械研究所 | Sub-arc second-level angle measurement system and method and relative deformation angle measurement method |
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