CN204705594U - Calcium fluoride optical flat surface roughness meter - Google Patents
Calcium fluoride optical flat surface roughness meter Download PDFInfo
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- CN204705594U CN204705594U CN201520332053.3U CN201520332053U CN204705594U CN 204705594 U CN204705594 U CN 204705594U CN 201520332053 U CN201520332053 U CN 201520332053U CN 204705594 U CN204705594 U CN 204705594U
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- imaging lens
- imaging
- calcium fluoride
- flat surface
- optical flat
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Abstract
The utility model discloses a kind of calcium fluoride optical flat surface roughness meter, comprise support, three-D displacement platform, collimation laser light source, even radiant, imaging lens, imaging CCD, computer for controlling; Described imaging lens is fixed on support, and the side of imaging lens is provided with collimation laser light source, is provided with six even radiants uniformly in the incidence hole surrounding of imaging lens; Imaging CCD is for receiving imaging lens imaging and exporting to computer for controlling; Computer for controlling is connected with three-D displacement platform with imaging CCD simultaneously, and described three-D displacement platform and imaging lens be arranged in parallel.The utility model foundation calcium fluoride optical flat surface blemish is to the scattering principle of light, the anomalous scattering light on detection calcium fluoride optical flat surface, to realize the quick position to flaw, rely on ccd sensor, carry out image procossing by computing machine, and automatically measure flaw size, and effects on surface smooth finish carries out system evaluation, can not produce artificial measuring error, measurement result is accurately reliable.
Description
Technical field
The utility model relates to calcium fluoride crystal cold working field, specifically a kind of high precision testing device of calcium fluoride optical flat surface smoothness.
Background technology
Calcium fluoride optical flat is excellent ultraviolet, material of infrared window, in use, very high to the smoothness requirements on its surface.The factor affecting calcium fluoride optical flat surface smoothness is mainly produced in polishing process and is produced pit or scratch.The method of current test calcium fluoride optical flat surface smoothness is mainly by artificial visual examination.Adopt desk checking, not only inefficiency, subjective, testing result varies with each individual, and easily leads to divergence; And when produced in large volumes, the demand of workman is larger, and production cost is high.
Summary of the invention
The purpose of this utility model is to provide a kind of calcium fluoride optical flat surface roughness meter, according to calcium fluoride optical flat surface blemish to the scattering principle of light, the anomalous scattering light on detection calcium fluoride optical flat surface, to realize the quick position to flaw, rely on ccd sensor, carry out image procossing by computing machine, automatic measurement flaw size, and effects on surface smooth finish carries out system evaluation, can not produce artificial measuring error, measurement result is accurately reliable.
For solving the problems of the technologies described above, the technical solution adopted in the utility model is: calcium fluoride optical flat surface roughness meter, is characterized in that: comprise support, three-D displacement platform, collimation laser light source, even radiant, imaging lens, imaging CCD, computer for controlling; Described imaging lens is fixed on support, and the side of imaging lens is provided with collimation laser light source, is provided with six even radiants uniformly in the incidence hole surrounding of imaging lens; Imaging CCD is for receiving imaging lens imaging and exporting to computer for controlling; Computer for controlling is connected with three-D displacement platform with imaging CCD simultaneously, and for receiving the image information that imaging CCD collects, and control the sense of displacement of three-D displacement platform, described three-D displacement platform and imaging lens be arranged in parallel.
As preferably, described three-D displacement platform X, Y-axis step distance is adjustable from 0.1 ~ 1mm, and Z axis step distance is 0.01mm.
As preferably, the light beam wavelength that described collimation laser light source exports is 600nm, and beam diameter is 1mm, and beam divergence angle is less than 1mrad.
As preferably, the focal length of described imaging lens is 8.18mm, and object distance is 10mm, and image distance is 45mm, and object-side numerical aperture is 0.2.
Principle of work is as follows: during test, is placed on three-D displacement platform by calcium fluoride optical flat, and opens collimation laser light source, if calcium fluoride optical flat surface does not have flaw, then the optical axis included angle of reflected light and imaging lens is excessive, can not enter the optical system of imaging lens; If calcium fluoride optical flat surface exists flaw, then scattered light will enter imaging lens and make imaging CCD photosensitive imaging, after imaging CCD is photosensitive, image information be exported to computer for controlling, and the information that imaging CCD exports makes a record by computer for controlling.
In checkout procedure, three-D displacement platform can realize 100*100*5mm fast offset, X, 0.1 ~ 1mm is adjustable for Y-axis step distance, Z axis step distance 0.01mm, displacement each time, imaging CCD all can to computer for controlling output detections to light sensation situation, when finding that scattering is abnormal, controlling calculation chance records the position of this point automatically, after rapid scanning completes, close laser instrument, open even radiant to throw light on to tested calcium fluoride optical flat, computer for controlling controls three-D displacement platform and tested calcium fluoride optical flat is moved to scattering abnormity point, by imaging CCD, high precision imaging is carried out to it, and measured surface defect size, measurement result exports to computer for controlling.
Last computer for controlling in conjunction with the algorithm in national standard, provides the Surface finish measurement value of calcium fluoride optical flat according to measurement result.
The beneficial effects of the utility model are: the utility model is according to calcium fluoride optical flat surface blemish to the scattering principle of light, and the anomalous scattering light on detection calcium fluoride optical flat surface, to realize the quick position to flaw.During detection, three-D displacement platform can realize the robotization Quick Measurement of calcium fluoride optical flat surface smoothness within the scope of 100 ' 100mm, and can measure minimum flaw diameter 1mm, Measuring Time is less than 30s.Measuring process is completed by machine completely, and result is objective, accurate, effectively can improve the production efficiency of calcium fluoride optical flat, saves cost of labor.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
Fig. 1 is structural representation of the present utility model.
In figure: 1-support, 2-three-D displacement platform, 3-calcium fluoride optical flat, 4-collimation laser light source, 5-even radiant 6-imaging lens, 7-imaging CCD, 8-computer for controlling.
Embodiment
As shown in Figure 1, calcium fluoride optical flat surface roughness meter, comprises support 1, three-D displacement platform 2, collimation laser light source 4, even radiant 5, imaging lens 6, imaging CCD7, computer for controlling 8; Described imaging lens 6 is fixed on support 1, and the side of imaging lens 6 is provided with collimation laser light source 4, is provided with six even radiants 5 uniformly in the incidence hole surrounding of imaging lens 6; Imaging CCD7 is for receiving imaging lens 6 imaging and exporting to computer for controlling 8; Computer for controlling 8 is connected with three-D displacement platform 2 with imaging CCD7 simultaneously, for receiving the image information that imaging CCD7 collects, and control the sense of displacement of three-D displacement platform 2, described three-D displacement platform 2 be arranged in parallel with imaging lens 6, guarantees that the normal of the tested surface of calcium fluoride optical flat 3 is parallel with the optical axis of 6.
The X of described three-D displacement platform 2, Y-axis step distance is adjustable from 0.1 ~ 1mm, and Z axis step distance is 0.01mm.
The light beam wavelength that described collimation laser light source 4 exports is 600nm, and beam diameter is 1mm, and beam divergence angle is less than 1mrad.
The focal length of described imaging lens 6 is 8.18mm, and object distance is 10mm, and image distance is 45mm, and object-side numerical aperture is 0.2, can collect the light beam be less than with its optical axis included angle in 0.2 arc range that its focus place luminous object sends.
Claims (4)
1. calcium fluoride optical flat surface roughness meter, is characterized in that: comprise support (1), three-D displacement platform (2), collimation laser light source (4), even radiant (5), imaging lens (6), imaging CCD(7), computer for controlling (8); Described imaging lens (6) is fixed on support (1), and the side of imaging lens (6) is provided with collimation laser light source (4), is provided with six even radiants (5) uniformly in imaging lens (6) incidence hole surrounding; Imaging CCD(7) for receiving imaging lens (6) imaging and exporting to computer for controlling (8); With imaging CCD(7 while of computer for controlling (8)) be connected with three-D displacement platform (2), described three-D displacement platform (2) and imaging lens (6) be arranged in parallel.
2. calcium fluoride optical flat surface roughness meter according to claim 1, is characterized in that: described three-D displacement platform (2) X, Y-axis step distance is adjustable from 0.1 ~ 1mm, and Z axis step distance is 0.01mm.
3. calcium fluoride optical flat surface roughness meter according to claim 1, is characterized in that: the light beam wavelength that described collimation laser light source (4) exports is 600nm, and beam diameter is 1mm, and beam divergence angle is less than 1mrad.
4. calcium fluoride optical flat surface roughness meter according to claim 1, is characterized in that: the focal length of described imaging lens (6) is 8.18mm, and object distance is 10mm, and image distance is 45mm, and object-side numerical aperture is 0.2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520332053.3U CN204705594U (en) | 2015-05-21 | 2015-05-21 | Calcium fluoride optical flat surface roughness meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520332053.3U CN204705594U (en) | 2015-05-21 | 2015-05-21 | Calcium fluoride optical flat surface roughness meter |
Publications (1)
| Publication Number | Publication Date |
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| CN204705594U true CN204705594U (en) | 2015-10-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201520332053.3U Active CN204705594U (en) | 2015-05-21 | 2015-05-21 | Calcium fluoride optical flat surface roughness meter |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107305119A (en) * | 2016-04-25 | 2017-10-31 | 南京英特飞光电技术有限公司 | The scaling method and test platform of a kind of inclining test for the long optical flat of standard |
| CN113049491A (en) * | 2021-03-10 | 2021-06-29 | 深圳鹏瑞智能科技有限公司 | Combined Micro LED epitaxial wafer flaw measuring device with macro lens |
-
2015
- 2015-05-21 CN CN201520332053.3U patent/CN204705594U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107305119A (en) * | 2016-04-25 | 2017-10-31 | 南京英特飞光电技术有限公司 | The scaling method and test platform of a kind of inclining test for the long optical flat of standard |
| CN107305119B (en) * | 2016-04-25 | 2019-06-21 | 南京英特飞光电技术有限公司 | A kind of test platform and its scaling method of the inclining test for the long optical flat of standard |
| CN113049491A (en) * | 2021-03-10 | 2021-06-29 | 深圳鹏瑞智能科技有限公司 | Combined Micro LED epitaxial wafer flaw measuring device with macro lens |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |