CN113049491A - Combined Micro LED epitaxial wafer flaw measuring device with macro lens - Google Patents
Combined Micro LED epitaxial wafer flaw measuring device with macro lens Download PDFInfo
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- CN113049491A CN113049491A CN202110262034.8A CN202110262034A CN113049491A CN 113049491 A CN113049491 A CN 113049491A CN 202110262034 A CN202110262034 A CN 202110262034A CN 113049491 A CN113049491 A CN 113049491A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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Abstract
The invention discloses a combined Micro LED epitaxial wafer flaw measuring device with a macro lens, which comprises a computing component bearing box, wherein a stable supporting footing is fixedly arranged at the corner position of the bottom of the computing component bearing box, a touch display screen is fixedly arranged at one side position of the front surface of the exterior of the computing component bearing box, a macro measuring lens is movably arranged at the bottom of a threaded connecting seat, a data transmission lead is movably connected between a data output port and a data access port, and an image transmission lead is movably connected between an image output port and an image access port. This be equipped with combination formula Micro LED epitaxial wafer flaw measuring device of macro lens through having add the calculation mechanism who has the touch-control display screen in the measurement mechanism outside, can the auxiliary measurement, ensures measuring result's accurate nature to combine the macro lens of adding, can make holistic flaw measurement more refine accurately, promoted holistic work result of use.
Description
Technical Field
The invention relates to the technical field of epitaxial wafer defect measurement, in particular to a combined Micro LED epitaxial wafer defect measuring device with a macro lens.
Background
Epitaxy is one of semiconductor processes, and defect detection is an extremely important quality detection and improvement means in the production process.
To LED epitaxial wafer flaw measuring device, measuring result's accuracy is its most important work purpose, and the conventional camera lens that current measuring device collocated is difficult to realize high accurate flaw measurement operation with artifical measuring means, the holistic use work efficiency has been reduced and the influence to holistic result of use has produced great degree, and inconvenient accomodating of carrying out under the idle state after the camera lens uses is deposited, be not convenient for subsequent long-term use work, simultaneously under the condition of not being furnished with external equipment, only can't measure comparatively tiny flaw through artifical naked eye, holistic comprehensive performance has been restricted.
Disclosure of Invention
The invention aims to provide a combined Micro LED epitaxial wafer flaw measuring device with a macro lens, and the device is used for solving the problems that the measurement result is not accurate enough and the used lens cannot be stored and stored stably in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: a combined Micro LED epitaxial wafer flaw measuring device with a macro lens comprises a computing component bearing box, wherein a stable supporting footing is fixedly arranged at the corner position of the bottom of the computing component bearing box, a touch display screen is fixedly arranged at one side position of the front outer side of the computing component bearing box, a heat dissipation groove is formed in the side position of the outer side of the computing component bearing box, a ventilation net cover is movably arranged at the upper outer end of the computing component bearing box, a bearing cavity is preset in the computing component bearing box, a data access port is preset at the other side position of the front outer side of the computing component bearing box, a measuring supporting base is preset at the outer side of the computing component bearing box, an electrified connecting wire is fixedly connected to the side position of the back of the computing component bearing box, and a starting switch is fixedly arranged at the outer side of the touch display screen, the device comprises a bearing cavity, a ventilation net cover, a power supply, an image processing assembly, a function adjusting assembly, a data analysis assembly, an image access port, an epitaxial wafer carrying platform, a reinforcing support rod, a directional adjusting groove and a positioning adjusting groove, wherein the corner position at the upper end inside the bearing cavity is fixedly provided with the corner position at the upper end outside the reinforcing support rod, the corner position at the upper end outside the bearing cavity and the outer upper end of the alignment assembling angle piece are respectively provided with an alignment assembling hole, one side position at the inner side inside the bearing cavity is fixedly provided with the power supply, the other side position at the inner side inside the bearing cavity is fixedly provided with the image processing assembly, the other side position at the inner side inside the bearing cavity is fixedly provided with the image access port, the middle position at the upper end outside the measuring support base is fixedly provided with the epitaxial, the upper end position of the outer inner side of the reinforcing support rod is preset with a clamping assembly groove, the outer part of the alignment assembly hole is movably provided with a positioning assembly bolt, the inner side of the clamping assembly groove is movably provided with a clamping assembly block, the outer lateral side of the clamping assembly block is fixedly provided with a positioning adjusting screw rod, the outer lateral side of the clamping assembly block is fixedly provided with a measuring mechanism, the positioning adjusting screw rod passes through the positioning adjustment groove and is movably provided with a fastening screw sleeve, the lateral side position of the outer part of the measuring mechanism is fixedly provided with a lens containing box, one lateral position of the inner side of the outer upper end of the measuring mechanism is preset with a data output port, the other lateral position of the inner side of the outer upper end of the measuring mechanism is preset with an image output port, the middle position of the outer upper end of the measuring, the inside fixed mounting of camera lens containing box has accomodates and connects the screwed pipe, the outside movable mounting of camera lens containing box has the chamber door, the bottom movable mounting of threaded connection seat has the macro-metering lens, swing joint has the data transmission wire between data output port and the data access port, swing joint has the image transmission wire between image output port and the image access port.
Preferably, the whole hollow box structure that is of calculation component bearing box, and the bottom that stabilizes the support footing all adopts the rubber material to there are four that the specification is the same at four corner position symmetry fixed mounting of calculation component bearing box bottom, the radiating groove is seted up at the equidistant of calculation component bearing box's outside avris symmetry, and the specification is the same, the radiating groove communicates each other with the bearing cavity inside that the calculation component bearing box established.
Preferably, the alignment assembly angle piece is symmetrically and fixedly provided with four same-specification angles at four corner positions at the upper end of the inner part of the bearing cavity, the internal specification at the upper end of the inner part of the bearing cavity is matched with the external specification of the ventilation net cover correspondingly, and the alignment assembly holes are respectively and correspondingly formed at the corner positions at the upper end of the outer part of the ventilation net cover and the upper ends of the four alignment assembly angle pieces and have the same specification.
Preferably, the internal specification of the alignment assembly hole corresponds to the external specification of the positioning assembly bolt, and the fixed mounting position of the power supply in the computing component bearing box corresponds to the fixed mounting position of the power-on connecting wire in the back outside the computing component bearing box.
Preferably, the reinforcing support rod is integrally and fixedly provided with two reinforcing support rods with the same specification at two symmetrical positions on the back of the measuring support base, the width dimension of the inner groove of the directional adjusting groove is matched with the outer diameter dimension of the positioning adjusting screw rod correspondingly, and the external specification of the positioning adjusting screw rod is matched with the internal specification of the fastening screw sleeve correspondingly.
Preferably, the external specifications of the two external sides of the clamping assembly block and the in-groove specifications of the clamping assembly groove are matched with each other correspondingly, and the whole measuring mechanism is fixedly connected with the external front of the clamping assembly block in a seamless mode.
Preferably, the fixed mounting position of the threaded connection seat at the bottom of the measuring mechanism and the fixed mounting position of the epitaxial wafer carrying platform at the upper end outside the measuring support base are on the same vertical horizontal line.
Preferably, the external thread specification of the threaded connection seat and the internal thread specification of the macro-measuring lens are matched with each other correspondingly, and the storage connection screw pipes are longitudinally, symmetrically and fixedly installed in the lens storage box at equal intervals and are identical to the external thread specification of the threaded connection seat.
Compared with the prior art, the invention has the beneficial effects that: the combined Micro LED epitaxial wafer flaw measuring device with the macro lens can assist in measurement by additionally arranging the calculating mechanism with the touch display screen outside the measuring mechanism, ensure the accuracy of a measuring result, and can enable the overall flaw measuring work to be more refined and accurate by combining the additionally arranged macro measuring lens, thereby improving the overall work using effect, and the measuring mechanism is arranged on the bearing piece with adjustable height, so that the overall measuring mechanism can properly adjust the height position of the overall measuring mechanism on the inner side of the reinforcing support rod according to the use requirements and conditions in the normal use work, thereby being beneficial to improving the overall work efficiency, meanwhile, the lens containing box is additionally arranged, and a plurality of groups of containing connecting screw pipes are additionally arranged inside the lens containing box, so that the overall measuring mechanism can select different measuring lenses under different use conditions, the lens storage rack is more favorable for idle storage work after the lens is used, and the overall comprehensive use performance is improved to a greater degree by enriching the overall use function.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic view of a detailed split structure according to the present invention;
FIG. 3 is a schematic view of the disassembled structure of the assembly of the present invention;
FIG. 4 is a schematic diagram of the internal structure of the result display device according to the present invention;
FIG. 5 is a schematic view of the overall structure of the measuring mechanism of the present invention;
fig. 6 is a schematic view of a partially enlarged structure of the lens storage box according to the present invention.
In the figure: 1. a computing component carrying case; 2. stabilizing the supporting bottom feet; 3. a touch display screen; 4. a heat sink; 5. a ventilation net cover; 6. a load bearing cavity; 7. a data access port; 8. a measurement support base; 9. starting a switch; 10. aligning and assembling corner fittings; 11. a power source; 12. aligning and assembling holes; 13. an image processing component; 14. a function adjusting assembly; 15. a data analysis component; 16. an image access port; 17. an epitaxial wafer carrying platform; 18. reinforcing the supporting rod; 19. a directional adjustment tank; 20. clamping the assembly groove; 21. positioning and assembling the bolt; 22. a power-on connection lead; 23. clamping the assembly block; 24. positioning an adjusting screw rod; 25. a measuring mechanism; 26. fastening a threaded sleeve; 27. a lens storage box; 28. a data output port; 29. an image output port; 30. an observation lens; 31. a threaded connection base; 32. receiving the connecting screw pipe; 33. a box door; 34. a macro measurement lens; 35. a data transmission wire; 36. image transmission conductors.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-6, the present invention provides a technical solution: a combined Micro LED epitaxial wafer flaw measuring device with a macro lens comprises a computing component bearing box 1, a stable supporting footing 2, a touch display screen 3, a heat dissipation groove 4, a ventilation net cover 5, a bearing cavity 6, a data access port 7, a measuring supporting base 8, a starting switch 9, an alignment assembly corner fitting 10, a power supply 11, an alignment assembly hole 12, an image processing component 13, a function adjusting component 14, a data analysis component 15, an image access port 16, an epitaxial wafer bearing platform 17, a reinforcing support rod 18, a directional adjusting groove 19, a clamping assembly groove 20, a positioning assembly bolt 21, an electrified connecting lead 22, a clamping assembly block 23, a positioning adjusting screw 24, a measuring mechanism 25, a fastening screw sleeve 26, a lens containing box 27, a data output port 28, an image output port 29, an observation lens 30, a threaded connection base 31, a containing connection screw 32, a box door 33, a Micro LED epitaxial wafer flaw measuring device, A microspur measuring lens 34, a data transmission wire 35 and an image transmission wire 36, wherein a stable supporting footing 2 is fixedly arranged at the corner position of the bottom of the computing component bearing box 1, a touch display screen 3 is fixedly arranged at one side position of the front outside of the computing component bearing box 1, a heat dissipation groove 4 is arranged at the side position of the outside of the computing component bearing box 1, a ventilation net cover 5 is movably arranged at the upper end of the outside of the computing component bearing box 1, a bearing cavity 6 is preset inside the computing component bearing box 1, a data access port 7 is preset at the other side position of the front outside of the computing component bearing box 1, a measuring supporting base 8 is preset at the outer side of the computing component bearing box 1, an electrified connecting wire 22 is fixedly connected at the side position of the back of the computing component bearing box 1, a starting switch 9 is fixedly arranged at the outer side of the touch display screen 3, and an alignment assembly angle component 10 is, the corner position of the upper outer end of the ventilation net cover 5 and the upper outer end of the alignment assembly corner fitting 10 are both provided with alignment assembly holes 12, one side of the inner side of the bearing cavity 6 is fixedly provided with a power supply 11, the other side of the inner side of the bearing cavity 6 is fixedly provided with an image processing assembly 13, one side of the inner side of the bearing cavity 6 is fixedly provided with a function adjusting assembly 14, the other side of the inner side of the bearing cavity 6 is fixedly provided with a data analysis assembly 15, the outer side of the data access port 7 is preset with an image access port 16, the middle position of the upper outer end of the measurement support base 8 is fixedly provided with an epitaxial wafer carrier 17, the side of the outer back of the measurement support base 8 is fixedly provided with a reinforcing support rod 18, the upper end position of the outer side of the reinforcing support rod 18 is longitudinally provided with a directional adjusting groove, a positioning assembly bolt 21 is movably mounted on the outside of the alignment assembly hole 12, a clamping assembly block 23 is movably mounted on the inner side of the clamping assembly groove 20, a positioning adjusting screw 24 is fixedly mounted on the outer side of the clamping assembly block 23, a measuring mechanism 25 is fixedly mounted on the outer side of the clamping assembly block 23, a fastening screw sleeve 26 is movably mounted on the positioning adjusting screw 24 through a positioning adjusting groove 19, a lens containing box 27 is fixedly mounted on the outer side of the measuring mechanism 25, a data output port 28 is preset on one side of the inner side of the outer upper end of the measuring mechanism 25, an image output port 29 is preset on the other side of the inner side of the outer upper end of the measuring mechanism 25, an observation lens 30 is fixedly mounted on the middle position of the outer upper end of the measuring mechanism 25, a threaded connection seat 31 is fixedly mounted on the middle position of the bottom of the measuring, a box door 33 is movably mounted outside the lens containing box 27, a macro measuring lens 34 is movably mounted at the bottom of the threaded connecting seat 31, a data transmission lead 35 is movably connected between the data output port 28 and the data access port 7, and an image transmission lead 36 is movably connected between the image output port 29 and the image access port 16;
furthermore, the whole computing component bearing box 1 is of a hollow box structure, the bottom of each stable supporting bottom foot 2 is made of rubber, four radiating grooves 4 with the same specification are symmetrically and fixedly arranged at four corner positions of the bottom of the computing component bearing box 1, the radiating grooves 4 are symmetrically arranged at equal intervals on the outer edge side of the computing component bearing box 1 and have the same specification, and the radiating grooves 4 are communicated with the inside of a bearing cavity 6 arranged in the computing component bearing box 1, so that the internal radiating performance of the whole is effectively improved on the basis of ensuring the basic stability of the whole structure;
furthermore, four alignment assembly corner fittings 10 with the same specification are symmetrically and fixedly arranged at four corner positions at the upper end inside the bearing cavity 6, the internal specification at the upper end inside the bearing cavity 6 is matched with the external specification of the ventilation net cover 5 correspondingly, alignment assembly holes 12 are formed at the corner positions at the upper end outside the ventilation net cover 5 and the upper ends of the four alignment assembly corner fittings 10 correspondingly and have the same specification, and the ventilation net cover 5 effectively ensures the internal ventilation of the calculation assembly bearing box 1 on the basis of realizing better top protection work on the calculation assembly bearing box 1; the service life of the whole body can be prolonged correspondingly;
furthermore, the internal specification of the alignment assembly hole 12 and the external specification of the positioning assembly bolt 21 are matched with each other correspondingly, and the fixed mounting position of the power supply 11 in the calculation component bearing box 1 corresponds to the fixed mounting position of the power-on connecting wire 22 at the back of the outside of the calculation component bearing box 1, so that the ventilation net cover 5 can be detached periodically, and the internal overhaul work of the calculation component bearing box 1 in the using process is facilitated;
furthermore, two reinforcing support rods 18 with the same specification are symmetrically and fixedly arranged at two sides of the back of the measurement support base 8 on the whole, the width dimension in the directional adjusting groove 19 and the outer diameter dimension of the positioning adjusting screw 24 are correspondingly matched with each other, the external specification of the positioning adjusting screw 24 and the internal specification of the fastening screw sleeve 26 are correspondingly matched with each other, and the positioning and fastening of the height adjusted by the measurement mechanism 25 by the whole body are facilitated;
furthermore, the external specifications of the two external sides of the clamping assembly block 23 are matched with the in-groove specifications of the clamping assembly groove 20 correspondingly, and the whole measuring mechanism 25 is fixedly connected with the external front side of the clamping assembly block 23 in a seamless manner, so that the height of the whole measuring mechanism 25 between the reinforcing support rods 18 can be properly adjusted according to specific use requirements;
further, the fixed mounting position of the threaded connection seat 31 at the bottom of the measuring mechanism 25 and the fixed mounting position of the epitaxial wafer carrying platform 17 at the outer upper end of the measuring support base 8 are on the same vertical horizontal line, so that the accuracy of the whole body in normal use work on the defect measurement of the LED epitaxial wafer is ensured;
further, the external thread specification of the threaded connection seat 31 and the internal thread specification of the macro measurement lens 34 are matched with each other in a corresponding mode, the storage connection screw tube 32 is longitudinally and equidistantly symmetrically and fixedly mounted inside the lens storage box 27 and is identical to the external thread specification of the threaded connection seat 31, different lenses can be conveniently selected according to specific use conditions to carry out measurement work, the lenses can be stably stored and stored in an idle state, and subsequent use work is facilitated.
The working principle is as follows: firstly, the data output port 28 and the image output port 29 arranged at the upper end of the measuring mechanism 25 can realize contraposition connection with the data access port 7 and the image access port 16 arranged at the outer side of the computing component bearing box 1 by using the data transmission wire 35 and the image transmission wire 36 so as to ensure normal transmission work of data and images, the LED epitaxial wafer to be measured is stably placed at the upper end of the epitaxial wafer bearing platform 17 by using the stable connection between the electrified connecting wire 22 and the external adaptive socket so as to ensure that the whole has the basic conditions of normal use work, the position of the whole measuring mechanism 25 at the inner side of the reinforcing support rod 18 is properly adjusted by using the contraposition relation between the positioning adjusting screw 24 arranged at the side of the clamping assembly block 23 and the orientation adjusting groove 19 according to the specific use requirements, and the longitudinal equidistant symmetrical fixed mounting structure of the receiving and connecting screw 32 in the lens receiving box 27, the convenience is selected different camera lenses according to concrete in service behavior and is measured the work, and can carry out stable the depositing with the camera lens under idle state and accomodate, be favorable to subsequent use work, the macro measuring lens 34 that screw thread connection seat 31 bottom was assembled can utilize self structural feature, treat to carry out the LED epitaxial wafer that measures and carry out careful macro-metering, and show image and data transmission to touch-control display screen 3 on, can promote holistic accurate nature of measurement greatly, make holistic comprehensive performance obtain effective the promotion.
Finally, it should be noted that the above-mentioned contents are only used for illustrating the technical solutions of the present invention, and not for limiting the protection scope of the present invention, and that the simple modifications or equivalent substitutions of the technical solutions of the present invention by those of ordinary skill in the art can be made without departing from the spirit and scope of the technical solutions of the present invention.
Claims (8)
1. The utility model provides a be equipped with combination formula Micro LED epitaxial wafer flaw measuring device of macro lens, includes calculation component bearing box (1), its characterized in that: the corner position fixed mounting of computing component carrier case (1) bottom has firm support footing (2), computing component carrier case (1) outside positive one side position fixed mounting has touch-control display screen (3), radiating groove (4) have been seted up to computing component carrier case (1) outside avris position, computing component carrier case (1) outside upper end movable mounting has ventilation net lid (5), computing component carrier case (1) inside has preset bearing chamber (6), computing component carrier case (1) outside positive opposite side position has preset data access port (7), computing component carrier case (1) outside avris has preset measurement support base (8), the avris position fixed connection of computing component carrier case (1) back has circular telegram connecting wire (22), touch-control display screen (3) outside avris fixed mounting has starting switch (9), the device is characterized in that a contraposition assembly angle piece (10) is fixedly installed at the corner position of the upper end inside the bearing cavity (6), contraposition assembly holes (12) are respectively formed in the corner position of the upper end outside the ventilation net cover (5) and the upper end outside the contraposition assembly angle piece (10), a power supply (11) is fixedly installed at one side position of the inner side inside the bearing cavity (6), an image processing component (13) is fixedly installed at the other side position of the inner side inside the bearing cavity (6), a function adjusting component (14) is fixedly installed at one side position of the inner side outside the bearing cavity (6), a data analysis component (15) is fixedly installed at the other side position of the inner side outside the bearing cavity (6), an image access port (16) is preset at the outer side of the data access port (7), and an epitaxial wafer carrier (17) is fixedly installed at the middle position of the, the utility model discloses a measuring device, including measurement support base (8) outside back's avris fixed position install consolidate branch (18), the upper end position in the outside of consolidating branch (18) has vertically seted up directional adjustment groove (19), the upper end position of consolidating branch (18) outside inboard has preset joint assembly groove (20), the outside movable mounting of counterpointing pilot hole (12) has positioning assembly bolt (21), the inboard movable mounting of joint assembly groove (20) has joint assembly piece (23), the outside avris fixed mounting of joint assembly piece (23) has positioning adjusting screw (24), the outside fixed mounting of joint assembly piece (23) has measuring mechanism (25), positioning adjusting screw (24) pass directional adjustment groove (19) movable mounting and have fastening swivel nut (26), the outside avris fixed position of measuring mechanism (25) installs camera lens containing box (27), a data output port (28) is preset at one side position of the inner side of the outer upper end of the measuring mechanism (25), an image output port (29) is preset at the other side position of the inner side of the outer upper end of the measuring mechanism (25), an observation lens (30) is fixedly arranged in the middle of the upper end of the outer part of the measuring mechanism (25), a threaded connecting seat (31) is fixedly arranged in the middle of the bottom of the measuring mechanism (25), a receiving connection solenoid (32) is fixedly arranged in the lens receiving box (27), a box door (33) is movably arranged outside the lens containing box (27), a macro measuring lens (34) is movably arranged at the bottom of the threaded connecting seat (31), a data transmission wire (35) is movably connected between the data output port (28) and the data access port (7), an image transmission wire (36) is movably connected between the image output port (29) and the image access port (16).
2. The apparatus of claim 1, wherein the apparatus comprises: the utility model discloses a calculation subassembly bearing box (1) is whole to be hollow box structure, and the bottom of firm support footing (2) all adopts the rubber material to four corner position symmetry fixed mounting in calculation subassembly bearing box (1) bottom have four that the specification is the same, radiating groove (4) are seted up at the equidistant of outside avris symmetry of calculation subassembly bearing box (1) to the specification is the same, radiating groove (4) and calculation subassembly bearing box (1) establish and bear chamber (6) intercommunication each other between inside.
3. The apparatus of claim 1, wherein the apparatus comprises: counterpoint assembly angle spare (10) bear four corner position symmetry fixed mounting of chamber (6) inside upper end have four that the specification is the same, and bear and correspond each other between the inside specification of chamber (6) inside upper end and the outside specification of ventilation wire netting lid (5) coincide, counterpoint pilot hole (12) correspond respectively in the corner position of ventilation wire netting lid (5) outside upper end and the upper end of four counterpoint assembly angle spares (10) and set up to the specification is the same.
4. The apparatus of claim 1, wherein the apparatus comprises: the internal specification of the alignment assembly hole (12) is matched with the external specification of the positioning assembly bolt (21) correspondingly, and the fixed mounting position of the power supply (11) in the computing component bearing box (1) corresponds to the fixed mounting position of the power-on connecting lead (22) on the back outside the computing component bearing box (1).
5. The apparatus of claim 1, wherein the apparatus comprises: the reinforcing support rod (18) is integrally and fixedly provided with two same-specification devices symmetrically at two sides of the back of the measuring support base (8), the width dimension of the inner groove of the directional adjusting groove (19) and the outer diameter dimension of the positioning adjusting screw rod (24) are matched with each other correspondingly, and the external specification of the positioning adjusting screw rod (24) and the internal specification of the fastening screw sleeve (26) are matched with each other correspondingly.
6. The apparatus of claim 1, wherein the apparatus comprises: the outside specification of joint assembly piece (23) outside both sides corresponds the matching each other with the inslot specification of joint assembly groove (20) between, and measuring mechanism (25) whole in joint assembly piece (23) outside positive rather than seamless fixed connection each other.
7. The apparatus of claim 1, wherein the apparatus comprises: the fixed mounting position of the threaded connecting seat (31) at the bottom of the measuring mechanism (25) and the fixed mounting position of the epitaxial wafer carrying platform (17) at the upper end of the outer part of the measuring support base (8) are on the same vertical horizontal line.
8. The apparatus of claim 1, wherein the apparatus comprises: the external thread specification of the threaded connection seat (31) and the internal thread specification of the macro measurement lens (34) are matched with each other correspondingly, and the storage connection screw pipes (32) are longitudinally and symmetrically and fixedly installed in the lens storage box (27) at equal intervals and are the same as the external thread specification of the threaded connection seat (31).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110262034.8A CN113049491A (en) | 2021-03-10 | 2021-03-10 | Combined Micro LED epitaxial wafer flaw measuring device with macro lens |
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| CN202110262034.8A CN113049491A (en) | 2021-03-10 | 2021-03-10 | Combined Micro LED epitaxial wafer flaw measuring device with macro lens |
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| CN113049491A true CN113049491A (en) | 2021-06-29 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113680710A (en) * | 2021-10-26 | 2021-11-23 | 江苏华兴激光科技有限公司 | Epitaxial wafer detection method and device |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006208857A (en) * | 2005-01-28 | 2006-08-10 | Scalar Corp | Attachment for cellular phone with camera or digital camera |
| CN204705594U (en) * | 2015-05-21 | 2015-10-14 | 秦皇岛本征晶体科技有限公司 | Calcium fluoride optical flat surface roughness meter |
| US20160255255A1 (en) * | 2015-02-26 | 2016-09-01 | Panasonic Intellectual Property Management Co., Ltd. | Imaging apparatus |
| CN206164617U (en) * | 2016-09-20 | 2017-05-10 | 陈庆元 | Mobile phone shell |
| CN206164645U (en) * | 2016-09-20 | 2017-05-10 | 陈庆元 | Cell -phone shell with adjustable camera lens |
| JP2018054575A (en) * | 2016-09-30 | 2018-04-05 | 東海光学株式会社 | Lens appearance inspection device |
| WO2018121269A1 (en) * | 2016-12-27 | 2018-07-05 | 张家港康得新光电材料有限公司 | Film detection system, detection method, and device |
| CN109085181A (en) * | 2018-09-14 | 2018-12-25 | 河北工业大学 | A kind of surface defect detection apparatus and detection method for pipeline connecting parts |
| CN112383668A (en) * | 2020-11-04 | 2021-02-19 | 重庆数宜信信用管理有限公司 | Wall-mounted high-speed shooting instrument based on OCR technology |
| CN112468739A (en) * | 2020-10-13 | 2021-03-09 | 清远市奇盛科技有限公司 | Multifunctional camera assembly |
-
2021
- 2021-03-10 CN CN202110262034.8A patent/CN113049491A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006208857A (en) * | 2005-01-28 | 2006-08-10 | Scalar Corp | Attachment for cellular phone with camera or digital camera |
| US20160255255A1 (en) * | 2015-02-26 | 2016-09-01 | Panasonic Intellectual Property Management Co., Ltd. | Imaging apparatus |
| CN204705594U (en) * | 2015-05-21 | 2015-10-14 | 秦皇岛本征晶体科技有限公司 | Calcium fluoride optical flat surface roughness meter |
| CN206164617U (en) * | 2016-09-20 | 2017-05-10 | 陈庆元 | Mobile phone shell |
| CN206164645U (en) * | 2016-09-20 | 2017-05-10 | 陈庆元 | Cell -phone shell with adjustable camera lens |
| JP2018054575A (en) * | 2016-09-30 | 2018-04-05 | 東海光学株式会社 | Lens appearance inspection device |
| WO2018121269A1 (en) * | 2016-12-27 | 2018-07-05 | 张家港康得新光电材料有限公司 | Film detection system, detection method, and device |
| CN109085181A (en) * | 2018-09-14 | 2018-12-25 | 河北工业大学 | A kind of surface defect detection apparatus and detection method for pipeline connecting parts |
| CN112468739A (en) * | 2020-10-13 | 2021-03-09 | 清远市奇盛科技有限公司 | Multifunctional camera assembly |
| CN112383668A (en) * | 2020-11-04 | 2021-02-19 | 重庆数宜信信用管理有限公司 | Wall-mounted high-speed shooting instrument based on OCR technology |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113680710A (en) * | 2021-10-26 | 2021-11-23 | 江苏华兴激光科技有限公司 | Epitaxial wafer detection method and device |
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Application publication date: 20210629 |