CN110425987A - A kind of penetrability laser thickness gauge - Google Patents
A kind of penetrability laser thickness gauge Download PDFInfo
- Publication number
- CN110425987A CN110425987A CN201910757974.7A CN201910757974A CN110425987A CN 110425987 A CN110425987 A CN 110425987A CN 201910757974 A CN201910757974 A CN 201910757974A CN 110425987 A CN110425987 A CN 110425987A
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- China
- Prior art keywords
- laser
- penetrability
- thickness gauge
- measured
- fresnel lenses
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- 238000001514 detection method Methods 0.000 claims abstract description 18
- 238000006073 displacement reaction Methods 0.000 claims abstract description 9
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000003205 fragrance Substances 0.000 claims description 3
- 238000012806 monitoring device Methods 0.000 claims 1
- 238000009738 saturating Methods 0.000 claims 1
- 230000035515 penetration Effects 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 229910052934 alunite Inorganic materials 0.000 description 1
- 239000010424 alunite Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- KPZTWMNLAFDTGF-UHFFFAOYSA-D trialuminum;potassium;hexahydroxide;disulfate Chemical compound [OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[Al+3].[Al+3].[Al+3].[K+].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O KPZTWMNLAFDTGF-UHFFFAOYSA-D 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
Abstract
The present invention relates to for a kind of penetrability laser thickness gauge, including workbench and laser beam emitting device, laser beam emitting device is for issuing laser；Workbench is equipped with notch for placing transparent part to be measured, workbench；Penetrability laser thickness gauge further includes CCD detection device, laser beam emitting device and CCD detection device are separately positioned on the two sides of notch, laser deviates the normal of transparent part to be measured, and CCD detection device is used to detect pixel displacement value in the plane of the laser after transparent part to be measured.Laser penetration calibrator of the invention has the advantages that efficiently accurate.
Description
Technical field
The present invention relates to field of optical measuring technologies, and in particular to a kind of penetrability laser thickness gauge.
Background technique
Currently, the thickness of the transparent glass material in mobile phone, wrist-watch and tablet computer usually require manually to use slide calliper rule or
Person amesdial detects, and then manages precision.But mainly by measurer using gimmick, the dynamics uniformity, measurement position etc. because
Element influences, and the data that different people detects often differ bigger, cause large error, while manual measurement takes time and effort,
Production efficiency is low, high production cost.
Summary of the invention
In view of the deficiencies of the prior art, the object of the present invention is to provide a kind of accurately efficient penetrability thickness measurements with laser
Instrument.
To achieve the purpose of the present invention, the present invention provides a kind of penetrability laser thickness gauge, including workbench and swash
Light emitting devices, laser beam emitting device is for issuing laser；For placing transparent part to be measured, workbench is equipped with to be lacked workbench
Mouthful；Penetrability laser thickness gauge further includes CCD detection device, and laser beam emitting device and CCD detection device are separately positioned on notch
Two sides, laser deviates the normal of transparent part to be measured, CCD detection device be used to detect laser after transparent part to be measured flat
Pixel displacement value on face.
Further technical solution is that workbench is horizontally disposed, and laser beam emitting device is arranged above notch, CCD detection
Device is arranged in bottom of the gap.
Further technical solution is that workbench further includes the supporting element being arranged in around notch, and transparent part to be measured is placed
On supporting element.
Further technical solution is that the number of supporting element is two, and two supporting elements are symmetrically disposed in notch both sides.
Further technical solution is, supporting element includes bracket and the roller bearing that is arranged on bracket, and bracket is fixed on work
Make on platform, transparent part to be measured is placed on roller bearing.
Further technical solution is that penetrability laser thickness gauge further includes processing unit, and processing unit is according to deviation angle
The refractive index of degree, pixel displacement value in the plane and transparent part to be measured, calculates the thickness of transparent part to be measured.
Further technical solution is that processing unit calculates the thickness of transparent part to be measured by triangulation.
Further technical solution is that CCD detection device is fixed on the lower section of workbench by support frame.
Further technical solution is that laser is parallel laser beam；Laser beam emitting device includes light source, the first luxuriant and rich with fragrance alunite
That lens and the second Fresnel Lenses, light source direction the first Fresnel Lenses and the second Fresnel Lenses, the first Fresnel Lenses
It is coaxial with the second Fresnel Lenses.The first Fresnel Lenses is passed through by the divergent beams that light source issues, the first Fresnel Lenses will
Divergent beams homogenize, even light beam；Even light beam passes through the second Fresnel Lenses, and the second Fresnel Lenses is quasi- by even light beam
Directly, it is formed in parallel with the collimated light beam of the second Fresnel Lenses primary optical axis.
Further technical solution is that the thickness of the first Fresnel Lenses and second Fresnel Lenses is 3mm, ring
Number is 40, and refractive index is 1.4936 at wavelength 550nm.
Compared with prior art, the present invention can obtain following the utility model has the advantages that laser penetration thickness measuring method energy of the invention
Enough actual (real) thickness values that is more efficient, accurate, scientifically obtaining transparent part to be measured.Due to laser from air enter transparent part to be measured with
And media variations twice can occur when from transparent part to be measured entering air, cause the slight change of incidence angle.The present invention uses CCD
Detection device captures the deviation angle of laser and the pixel displacement value in plane, can inversely be calculated by triangulation transparent
The thickness of part to be measured.
Detailed description of the invention
Fig. 1 is the schematic perspective view of penetrability laser thickness gauge embodiment of the present invention.
Fig. 2 is the structural schematic diagram of the laser beam emitting device of penetrability laser thickness gauge embodiment of the present invention.
Specific embodiment
As shown in Figure 1, the penetrability laser thickness gauge of the present embodiment includes workbench 10, laser beam emitting device 20 and CCD
Detection device 30.
Workbench 10 is for placing transparent part to be measured 40.Specifically in the present embodiment, workbench 10 is horizontally disposed, workbench
10 supporting elements 12 for being equipped with notch 11 and being arranged in around notch 11, the number of supporting element 12 are two, two supporting elements
12 are symmetrically disposed in 11 both sides of notch.Supporting element 12 includes bracket 13 and the roller bearing 14 being arranged on bracket 13, bracket 13
The both ends of roll shaft 14 are set, and bracket 13 is fixed on workbench 11, and transparent part 40 to be measured is placed on roller bearing 14.Supporting element 12
It is used to support transparent part to be measured 40, the setting of roller bearing 14 helps to avoid scratching transparent part to be measured when transparent part to be measured 40 is mobile
40。
Laser beam emitting device 20 and CCD detection device 30 are separately positioned on the two sides of notch 11, in the present embodiment, laser
The top of notch 11 is arranged in emitter 20, and the lower section of notch 11 is arranged in CCD detection device 30.
For laser beam emitting device 20 for emitting parallel laser beam, laser beam deviates the normal of transparent part to be measured 40,
I.e. laser beam is not orthogonal to transparent part to be measured 40, and laser beam is formed with transparent part 40 to be measured is greater than 0 ° and entering less than 90 °
Firing angle degree enables laser beam to reflect at the interface of transparent part 40 to be measured.By adjusting laser beam emitting device 20
Position and angle, the position of adjustable laser beam and incident angle.In the present embodiment, as shown in Fig. 2, Laser emission
Device 20 includes light source 21, the first Fresnel Lenses 22 and the second Fresnel Lenses 23, and light source 21 is towards the first Fresnel Lenses
22 and second Fresnel Lenses 23, light source 21 issue the light of diversity.First Fresnel Lenses 22 and the second Fresnel Lenses 23
Coaxial, the thickness of the first Fresnel Lenses 22 and the second Fresnel Lenses 23 is 3mm, and number of rings is 40, at wavelength 550nm
Refractive index is 1.4936, and material is PMMA, and the operating distance of laser beam emitting device 20 is 40mm to 160mm.Wherein, first
Fresnel Lenses 22 plays even light action, and the second Fresnel Lenses 23 plays collimating effect, obtains parallel optical path.In the present invention
Other embodiments in, laser beam emitting device 20 can be the existing laser emitter that can emit parallel laser light beam.
CCD detection device 30 is fixed on the lower section of workbench 10 by support frame 31, and CCD is charge-coupled device, CCD inspection
It surveys device 30 and is used to detect deviation angle of the laser after transparent part 40 to be measured and pixel displacement value in the plane.CCD inspection
Survey the pixel displacement value by deviation angle and in the plane of device 30 and be transmitted to processing unit, processing unit according to deviation angle,
The refractive index of pixel displacement value and transparent part to be measured 40 in the plane, is inversely calculated transparent by triangulation
The thickness of part 40 to be measured.The triangulation passes through trigonometric function calculated thickness according to shift value and deviation angle.
Therefore penetrability laser thickness gauge of the invention is suitable for transparent part to be measured such as mobile phone, wrist-watch and plate
Transparent glass material in computer is particularly suitable for the transparent material of sheet or plate.Laser penetration calibrator tool of the invention
Have the advantages that efficiently accurate.
Finally it is emphasized that the above description is only a preferred embodiment of the present invention, it is not intended to restrict the invention.It is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in guarantor of the invention
Within the scope of shield.
Claims (10)
1. a kind of penetrability laser thickness gauge, including workbench and laser beam emitting device, the laser beam emitting device is for sending out
Laser out；It is characterized by:
The workbench is equipped with notch for placing transparent part to be measured, the workbench；The penetrability laser thickness gauge is also
Including CCD detection device, the laser beam emitting device and the CCD detection device are separately positioned on the two sides of the notch, institute
State the normal that laser deviates the transparent part to be measured, the CCD detection device for detect the laser pass through it is described it is transparent to
Survey pixel displacement value in the plane after part.
2. a kind of penetrability laser thickness gauge according to claim 1, it is characterised in that:
The workbench is horizontally disposed, and the laser beam emitting device is arranged above the notch, the CCD detection device setting
In the bottom of the gap.
3. a kind of penetrability laser thickness gauge according to claim 1, it is characterised in that:
The workbench further includes the supporting element being arranged in around the notch, and the transparent part to be measured is placed on the supporting element
On.
4. a kind of penetrability laser thickness gauge according to claim 3, it is characterised in that:
The number of the supporting element is two, and two supporting elements are symmetrically disposed in the notch both sides.
5. a kind of penetrability laser thickness gauge according to claim 4, it is characterised in that:
The supporting element includes bracket and the roller bearing that is arranged on the bracket, and the bracket is fixed on the workbench,
The transparent part to be measured is placed on the roller bearing.
6. a kind of penetrability laser thickness gauge according to any one of claims 1 to 5, it is characterised in that:
The CCD monitoring device is also used to detect the deviation angle of the laser, and the penetrability laser thickness gauge further includes place
Manage device, the processing unit is according to the deviation angle, the pixel displacement value in the plane and described transparent to be measured
The refractive index of part calculates the thickness of the transparent part to be measured.
7. a kind of penetrability laser thickness gauge according to claim 6, it is characterised in that:
The processing unit calculates the thickness of the transparent part to be measured by triangulation.
8. a kind of penetrability laser thickness gauge according to any one of claims 1 to 5, it is characterised in that:
The CCD detection device is fixed on the lower section of the workbench by support frame.
9. a kind of penetrability laser thickness gauge according to any one of claims 1 to 5, it is characterised in that:
The laser is parallel laser beam；The laser beam emitting device includes that light source, the first Fresnel Lenses and second are luxuriant and rich with fragrance
Nie Er lens, for the light source towards first Fresnel Lenses and second Fresnel Lenses, first Fresnel is saturating
Mirror and second Fresnel Lenses are coaxial；First Fresnel Lenses is passed through by the divergent beams that the LED light source issues,
First Fresnel Lenses homogenizes the divergent beams, forms even light beam；It is luxuriant and rich with fragrance that the even light beam passes through described second
The even smooth beam collimation is formed in parallel with the second Fresnel Lenses master by Nie Er lens, second Fresnel Lenses
The collimated light beam of optical axis.
10. a kind of penetrability laser thickness gauge according to claim 9, it is characterised in that:
The thickness of first Fresnel Lenses and second Fresnel Lenses is 3mm, and number of rings is 40, in wavelength
Refractive index is 1.4936 under 550nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910757974.7A CN110425987A (en) | 2019-08-16 | 2019-08-16 | A kind of penetrability laser thickness gauge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910757974.7A CN110425987A (en) | 2019-08-16 | 2019-08-16 | A kind of penetrability laser thickness gauge |
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| Publication Number | Publication Date |
|---|---|
| CN110425987A true CN110425987A (en) | 2019-11-08 |
Family
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910757974.7A Pending CN110425987A (en) | 2019-08-16 | 2019-08-16 | A kind of penetrability laser thickness gauge |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111272085A (en) * | 2020-03-13 | 2020-06-12 | 南京理工大学 | Automatic detection device and method for center thickness of optical part |
| CN111811418A (en) * | 2020-08-21 | 2020-10-23 | 南通斯康泰智能装备有限公司 | Thickness gauge for measuring thickness of thinned wafer and thickness measuring method thereof |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05289020A (en) * | 1992-04-13 | 1993-11-05 | Nippon Arefu:Kk | Optical system for laser collimator |
| US5517312A (en) * | 1993-11-09 | 1996-05-14 | Nova Measuring Instruments, Ltd. | Device for measuring the thickness of thin films |
| JP2007155418A (en) * | 2005-12-02 | 2007-06-21 | Tohoku Univ | Film thickness gage of interference fringe type and film thickness measuring method |
| US20080158572A1 (en) * | 2006-12-27 | 2008-07-03 | Honeywell, Inc. | System and method for measurement of thickness of thin films |
| CN101603817A (en) * | 2009-07-15 | 2009-12-16 | 中国科学院上海光学精密机械研究所 | The checkout equipment of thickness of glass and detection method |
| JP2013072860A (en) * | 2011-09-29 | 2013-04-22 | Toppan Printing Co Ltd | Thickness measuring method and measuring apparatus |
| JP2015127661A (en) * | 2013-12-27 | 2015-07-09 | 大成建設株式会社 | Displacement measuring apparatus |
| CN205642302U (en) * | 2016-05-24 | 2016-10-12 | 周冀馨 | Optical element thickness measurement device |
| CN208269956U (en) * | 2018-03-21 | 2018-12-21 | 宾努克斯科技（佛山）有限公司 | A kind of horizontal key instrument for quick measuring |
| CN210513029U (en) * | 2019-08-16 | 2020-05-12 | 宾努克斯科技（佛山）有限公司 | Penetrating laser thickness gauge |
-
2019
- 2019-08-16 CN CN201910757974.7A patent/CN110425987A/en active Pending
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05289020A (en) * | 1992-04-13 | 1993-11-05 | Nippon Arefu:Kk | Optical system for laser collimator |
| US5517312A (en) * | 1993-11-09 | 1996-05-14 | Nova Measuring Instruments, Ltd. | Device for measuring the thickness of thin films |
| JP2007155418A (en) * | 2005-12-02 | 2007-06-21 | Tohoku Univ | Film thickness gage of interference fringe type and film thickness measuring method |
| US20080158572A1 (en) * | 2006-12-27 | 2008-07-03 | Honeywell, Inc. | System and method for measurement of thickness of thin films |
| CN101603817A (en) * | 2009-07-15 | 2009-12-16 | 中国科学院上海光学精密机械研究所 | The checkout equipment of thickness of glass and detection method |
| JP2013072860A (en) * | 2011-09-29 | 2013-04-22 | Toppan Printing Co Ltd | Thickness measuring method and measuring apparatus |
| JP2015127661A (en) * | 2013-12-27 | 2015-07-09 | 大成建設株式会社 | Displacement measuring apparatus |
| CN205642302U (en) * | 2016-05-24 | 2016-10-12 | 周冀馨 | Optical element thickness measurement device |
| CN208269956U (en) * | 2018-03-21 | 2018-12-21 | 宾努克斯科技（佛山）有限公司 | A kind of horizontal key instrument for quick measuring |
| CN210513029U (en) * | 2019-08-16 | 2020-05-12 | 宾努克斯科技（佛山）有限公司 | Penetrating laser thickness gauge |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111272085A (en) * | 2020-03-13 | 2020-06-12 | 南京理工大学 | Automatic detection device and method for center thickness of optical part |
| CN111811418A (en) * | 2020-08-21 | 2020-10-23 | 南通斯康泰智能装备有限公司 | Thickness gauge for measuring thickness of thinned wafer and thickness measuring method thereof |
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