CN110375669A - A kind of test method and test device of focal length lens curvature - Google Patents
A kind of test method and test device of focal length lens curvature Download PDFInfo
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- CN110375669A CN110375669A CN201910651151.6A CN201910651151A CN110375669A CN 110375669 A CN110375669 A CN 110375669A CN 201910651151 A CN201910651151 A CN 201910651151A CN 110375669 A CN110375669 A CN 110375669A
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- standard
- focal length
- reflection mirror
- grating scale
- curvature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
Abstract
The present invention discloses the test method and test device of a kind of focal length lens curvature, and this method measures the curvature of practical lens to be measured by the difference of measurement lens to be measured and the reflection focal length of standard spherical surface template.Invention additionally discloses a kind of focal length lens curvature test device, including laser interferometer, standard spherical surface template, reflecting mirror, standard reflection mirror, grating scale, reflecting mirror pedestal, objective tables.The present invention measures curvature by the method for relative measurement reflection focal length, reduces the requirement to the length of grating scale, and in short distance, precision is greatly improved, while the test space is also greatly saved.
Description
Technical field
The invention belongs to field of optical measurements, the specially a kind of test method and test device of focal length lens curvature.
Background technique
Surveying curvature all for lens at present is to find surface picture and center of curvature picture using interference technique, by measure this two
The distance between a picture measures the curvature of lens, and the method measurement needs to use high-precision grating scale to measure, for one
As the lesser test of curvature there is no problem, but product biggish for curvature needs the length of its grating scale very long, together
When, in order to reach more accurate measurement, device be must necessarily be placed on Isolating Platform, this also has higher want to the size of Isolating Platform
It asks.Traditional method substantially increases testing requirements and cost.
Summary of the invention
In response to the problems existing in the prior art, the purpose of the present invention is to provide a kind of test method of focal length lens curvature and
Test device measures curvature by the method for relative measurement reflection focal length, reduces the requirement to the length of grating scale, short distance
Interior, precision is greatly improved, while the test space is also greatly saved.
To achieve the above object, the technical solution adopted by the present invention is that:
A kind of test method of focal length lens curvature, the method utilize a kind of focal length lens curvature test device, knot
Structure are as follows: including laser interferometer, grating scale, reflecting mirror, standard reflection mirror, standard reflection mirror pedestal, objective table and be placed on load
Standard spherical surface template or lens to be measured on object platform, the laser interferometer, grating scale and standard reflection mirror pedestal are in same
The directional light of horizontal plane, the laser interferometer outgoing is parallel with the measurement direction of grating scale, and the size of the reflecting mirror is less than
The bore of standard spherical surface template or lens to be measured, the objective table are installed on above standard reflection mirror pedestal；
Include: using the method that described device tests focal length lens curvature
S1, the directional light that the laser interferometer generates are incident on standard reflection mirror, and 90 degree of optical path-deflecting are incident on mark
On director sphere template, it is then reflected back standard reflection mirror, converged light is formed and is incident on reflecting mirror；
S2, it is dry that the converged light returns to laser after reflecting mirror, standard reflection mirror, the reflection of standard spherical surface template with directional light
Interferometer；
S3 changes the position of reflecting mirror or changes the position of standard reflection mirror by mobile standard reflection mirror pedestal, sees
The interference fringe in laser interferometer is examined, determines that the convergent point of the converged light is just fallen in by the bending degree of interference fringe
On reflecting mirror, the corresponding reflector position 1 of record Current standards spherical surface template；
Standard spherical surface template is replaced with lens to be measured by S4, repeats S1-S3, the record currently corresponding reflection of lens to be measured
Mirror position 2；
S5 obtains lens curvature to be measured=(position standard spherical surface template curvature+2* according to formula curvature R=2* reflection focal length
Set the position 1- 2) or lens curvature to be measured=standard spherical surface template curvature -2* (the position position 1- 2).
Preferably, S5 further comprises: calculated according to formula R=(H^2+ (D/2) ^2)/(2H) standard spherical surface template with
The rise of the spherical surface of lens to be measured is poor, updates lens curvature to be measured using the rise difference.
Preferably, the reflecting mirror is mounted on grating scale and moves along grating scale, and the standard reflection mirror pedestal is solid
It is fixed and irremovable.
Preferably, the standard reflection mirror pedestal is installed on grating scale and moves along grating scale, and the reflecting mirror is solid
It is scheduled in the optical path between laser interferometer and grating scale and irremovable.
Preferably, there are three jewel beads, three jewel beads to be circularly and evenly distributed for setting on the objective table.
Preferably, the objective table is detachably connected with standard reflection mirror pedestal, the standard reflection mirror pedestal from it is different
The objective table of circumferential size matches, and the different circumferential size of the objective table corresponds to different measurement bores.
A kind of focal length lens curvature test device, including laser interferometer, grating scale, reflecting mirror, standard reflection mirror, standard
Reflecting mirror pedestal, objective table and the standard spherical surface template or lens to be measured being placed on objective table, the laser interferometer, grating
Ruler and standard reflection mirror pedestal are in same level, the directional light of the laser interferometer outgoing and the measurement direction of grating scale
In parallel, the size of the reflecting mirror is less than the bore of standard spherical surface template or lens to be measured, and it is anti-that the objective table is installed on standard
It penetrates above mirror pedestal.
Preferably, there are three jewel beads, three jewel beads to be circularly and evenly distributed for setting on the objective table.
Preferably, the objective table is detachably connected with standard reflection mirror pedestal, the standard reflection mirror pedestal from it is different
The objective table of circumferential size matches, and the different circumferential size of the objective table corresponds to different measurement bores.
Preferably, the reflecting mirror is mounted on grating scale and moves along grating scale, and the standard reflection mirror pedestal is solid
It is fixed and irremovable；Alternatively, the standard reflection mirror pedestal is installed on grating scale and, the reflecting mirror removable along grating scale
It is fixed in the optical path between laser interferometer and grating scale and irremovable.
Compared with prior art, the beneficial effects of the present invention are: the present invention by the method for relative measurement reflection focal length come
It measures curvature, reduces the requirement to the length of grating scale, in short distance, precision is greatly improved, while survey is also greatly saved
Try space.
Detailed description of the invention
Fig. 1 is the structural schematic diagram according to the test device of the present invention of embodiment；
Fig. 2 is the schematic diagram according to the standard spherical surface template or lens to be measured and jewel bead of the present invention of embodiment；
Fig. 3 is the arrangement schematic diagram according to the jewel bead of the present invention of embodiment；
Fig. 4 is the schematic illustration according to the test method of the present invention of embodiment.
Specific embodiment
Below in conjunction with the attached drawing in the present invention, technical solution of the present invention is clearly and completely described, it is clear that
Described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on the implementation in the present invention
Example, those of ordinary skill in the art's all other embodiment obtained under the conditions of not making creative work belong to
The scope of protection of the invention.
The present invention provides a kind of test method of focal length lens curvature, and the method is tested using a kind of focal length lens curvature
Device, structure are as follows: including laser interferometer, grating scale, reflecting mirror, standard reflection mirror, standard reflection mirror pedestal, objective table and
The standard spherical surface template or lens to be measured being placed on objective table, the laser interferometer, grating scale and standard reflection mirror pedestal
In same level, the directional light of the laser interferometer outgoing is parallel with the measurement direction of grating scale, the reflecting mirror
Size is less than the bore of standard spherical surface template or lens to be measured, and the objective table is installed on above standard reflection mirror pedestal；
Include: using the method that described device tests focal length lens curvature
S1, the directional light that the laser interferometer generates are incident on standard reflection mirror, and 90 degree of optical path-deflecting are incident on mark
On director sphere template, it is then reflected back standard reflection mirror, converged light is formed and is incident on reflecting mirror；
S2, it is dry that the converged light returns to laser after reflecting mirror, standard reflection mirror, the reflection of standard spherical surface template with directional light
Interferometer；
S3 changes the position of reflecting mirror or changes the position of standard reflection mirror by mobile standard reflection mirror pedestal, sees
The interference fringe in laser interferometer is examined, determines that the convergent point of the converged light is just fallen in by the bending degree of interference fringe
On reflecting mirror, the corresponding reflector position 1 of record Current standards spherical surface template；
Standard spherical surface template is replaced with lens to be measured by S4, repeats S1-S3, the record currently corresponding reflection of lens to be measured
Mirror position 2；
S5 obtains lens curvature to be measured=(position standard spherical surface template curvature+2* according to formula curvature R=2* reflection focal length
Set the position 1- 2) or lens curvature to be measured=standard spherical surface template curvature -2* (the position position 1- 2).
The present invention measures the reflection of lens to be measured Yu standard spherical surface template according to formula, lens curvature R=2* reflection focal length
The difference of focal length measures the curvature of practical lens to be measured.
Embodiment 1
As shown in Figures 1 to 4, a kind of test method and test device of focal length lens curvature, test the recessed of long focus lens
Face curvature, the method utilize focal length lens curvature test device, and described device includes laser interferometer 1, standard spherical surface template
2, reflecting mirror 6, standard reflection mirror 4, grating scale 7, reflecting mirror pedestal 5, objective table 3, jewel bead 8.The reflecting mirror 6 is installed on
It on grating scale 7, and is moved on grating scale 7, the standard reflection mirror pedestal 5 is fixed and irremovable.Wherein, the standard
Reflecting mirror 4 is 45 scale quasi-reflection mirrors.There are three the jewel beads 8, is circularly and evenly distributed on objective table 3, circumference
It is sized to be slightly smaller than the bore of standard spherical surface template 2 or lens to be measured.
To meet the needs of different measurement bores, the objective table 3 can be the objective table 3 of different circumferential sizes.Specifically,
The objective table 3 is detachably connected with standard reflection mirror pedestal 5, the standard reflection mirror pedestal 5 and the load of different circumferential sizes
Object platform 3 matches, and the different circumferential size of the objective table 3 corresponds to different measurement bores.
Specifically, the converged light that the standard spherical surface template 2 or lens to be measured generate is reflected by 45 scale quasi-reflection mirrors 4
It is coaxial with incident light afterwards.The directional light that the laser interferometer 1 is emitted is parallel with the measurement direction of grating scale 7.
Specifically, the size of the reflecting mirror 6 is less than the bore of standard spherical surface template 2 or lens to be measured.It is arranged in this way
Purpose is in order to guarantee to have luminous energy to be incident on standard spherical surface template 2 or lens to be measured, without by reflection fixed on grating scale 7
Mirror 6 is all-trans.
Include: using the step of the present embodiment test device test lens curvature
1) laser interferometer 1 is used, the directional light of a branch of standard is generated, the standard lens of interferometer uses standard flat
Mirror.
2) light is turn 90 degrees by directional light partially by standard reflection mirror 4.
3) three jewel beads 8 are fixed on objective table 3, even circumferential distribution.
4) standard spherical surface template 2 is placed in above jewel bead 8, connects three jewel beads 8 with standard spherical surface template 2
Touching；Three jewel beads 8 make the centre of sphere and light path coaxial of standard spherical surface template 2 and lens to be measured, to reduce measurement error, simultaneously
Three jewel beads 8 are also used to fix testing beam diameter.
5) light of the reflection of light passing standard reflection mirror 4 up is reflected by standard spherical surface template 2, forms converged light；
6) converged light is reflected by standard reflection mirror 4, with incident light axis horizontal.
7) in the optical path between place a reflecting mirror 6, reflecting mirror 6 is fixed on above grating scale 7.
8) 7 measurement direction of grating scale is parallel with the directional light that interferometer 1 is emitted.
9) position of mobile mirror 6, so that standard spherical surface template 2 reflects the surface that convergent point just falls in reflecting mirror 6；
10) it can be got to again on standard spherical surface template 2 by the light that reflecting mirror 6 reflects, according to the invertibity and optical path of light
Symmetry, light finally returns to the inside of interferometer 1 with directional light.
11) light for being reflected into 1 the inside of interferometer is interfered with standard flat reflecting mirror, passes through the bending journey of interference fringe
Degree determines that the light converged after the reflection of standard spherical surface template 2 is just fallen in above reflecting mirror 6, is write down instead with grating scale 7 at this time
Penetrate 6 position 1 of mirror.
12) standard spherical surface template 2 is replaced with lens to be measured, repeated the above steps, at this time where available reflecting mirror 6
Position 2；Here bending degree can test its value by interferometer, such as λ/10, λ 632.8nm, the method and test mirrors
Unilateral shape (aperture) is consistent.
13) according to curvature R=2* reflection focal length, it is known that lens curvature to be measured=(the position position 1- spherical surface template curvature+2*
2) or lens curvature to be measured=spherical surface template curvature -2* (the position position 1- 2), both of these case depend on lens curvature to be measured
It is bigger or small than standard spherical surface 2 curvature of template；Wherein, the difference between position 1 and position 2 is as shown in the L in Fig. 4.
14) since different lens curvatures are different, rise is also different, there is standard spherical surface template 2 in above process
The inconsistent situation with lens curvature vertex to be measured can calculate to obtain two spherical surfaces according to formula R=(H^2+ (D/2) ^2)/(2H)
Rise it is poor, wherein D is testing beam diameter, and H is spherical surface rise, and survey can be greatly reduced by bringing this gap into the above-mentioned result measured
Measure error.
The present invention measures curvature by the method for relative measurement reflection focal length, reduces and wants to the length of grating scale
It asks, in short distance, precision is greatly improved, while the test space is also greatly saved.
Embodiment 2
The present embodiment provides the test method and test device of a kind of focal length lens curvature, the concave surface for testing long focus lens is bent
Rate, the method utilize focal length lens curvature test device, and described device includes laser interferometer 1, standard spherical surface template 2, instead
Penetrate mirror 6, standard reflection mirror 4, grating scale 7, reflecting mirror pedestal 5, objective table 3, jewel bead 8.Wherein, the standard reflection mirror 4
For 45 scale quasi-reflection mirrors.There are three the jewel beads 8, is circularly and evenly distributed on objective table 3, circumferential size is smaller
In standard spherical surface template 2 or the bore of lens to be measured.The test side of directional light and grating scale 7 that the laser interferometer 1 is emitted
To parallel.The size of the reflecting mirror 6 is less than the bore of standard spherical surface template 2 or lens to be measured.
Unlike the first embodiment, in the present embodiment, the standard reflection mirror pedestal 5 is installed on grating scale 7 and along light
Grid ruler 7 is removable, and the reflecting mirror 6 is fixed in the optical path between laser interferometer 1 and grating scale 7 and irremovable.In this way
Setting there is a situation where grating scale 7 when can be avoided the mobile mirror 6 being likely to occur in embodiment 1 apart from inadequate, that is, move
When dynamic reflecting mirror 6, moving on to contact with interferometer 1 still cannot allow converged light to converge on reflecting mirror 6.
Using the device of the present embodiment in test lens curvature, the 9 of required testing procedure), 11) and 12) with embodiment 1
It is different.In step 9), the present embodiment changes the position of standard reflection mirror 4 by moving standard reflection mirror pedestal 5 along grating scale 7
It sets, so that standard spherical surface template 2 reflects the surface that convergent point just falls in reflecting mirror 6.Similarly, in step 11), it is reflected into interference
The light of 1 the inside of instrument is interfered with standard flat reflecting mirror, is determined by the bending degree of interference fringe and is passed through standard spherical surface sample
The light that plate 2 converges after reflecting just is fallen in above reflecting mirror 6, writes down 5 position of standard reflection mirror pedestal with grating scale 7 at this time
1 (i.e. 4 position 1 of standard reflection mirror).In step 12), standard spherical surface template 2 is replaced with lens to be measured, is repeated aforementioned
Step obtains the position 2 where standard reflection mirror 4.Finally, passing through lens curvature to be measured=spherical surface template curvature+2* (position 1-
Position 2) or lens curvature to be measured=spherical surface template curvature -2* (the position position 1- 2) obtain lens curvature to be measured, both feelings
It is bigger or small than standard spherical surface 2 curvature of template that condition depends on lens curvature to be measured；Wherein, the difference between position 1 and position 2 is such as
Shown in L in Fig. 4.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (10)
1. a kind of test method of focal length lens curvature, which is characterized in that the method is tested using a kind of focal length lens curvature
Device, structure are as follows: including laser interferometer, grating scale, reflecting mirror, standard reflection mirror, standard reflection mirror pedestal, objective table and
The standard spherical surface template or lens to be measured being placed on objective table, the laser interferometer, grating scale and standard reflection mirror pedestal
In same level, the directional light of the laser interferometer outgoing is parallel with the measurement direction of grating scale, the reflecting mirror
Size is less than the bore of standard spherical surface template or lens to be measured, and the objective table is installed on above standard reflection mirror pedestal；
Include: using the method that described device tests focal length lens curvature
S1, the directional light that the laser interferometer generates are incident on standard reflection mirror, and 90 degree of optical path-deflecting are incident on standard ball
On the template of face, it is then reflected back standard reflection mirror, converged light is formed and is incident on reflecting mirror；
S2, the converged light return to laser interference after reflecting mirror, standard reflection mirror, the reflection of standard spherical surface template with directional light
Instrument；
S3 changes the position of reflecting mirror or changes the position of standard reflection mirror by mobile standard reflection mirror pedestal, and observation swashs
Interference fringe in optical interferometer determines that the convergent point of the converged light just falls in reflection by the bending degree of interference fringe
On mirror, the corresponding reflector position 1 of record Current standards spherical surface template；
Standard spherical surface template is replaced with lens to be measured, repeats S1-S3 by S4, records the corresponding reflecting mirror position of current lens to be measured
Set 2；
S5 obtains lens curvature to be measured=standard spherical surface template curvature+2* (position 1- according to formula curvature R=2* reflection focal length
Position 2) or lens curvature to be measured=standard spherical surface template curvature -2* (the position position 1- 2).
2. the test method of focal length lens curvature according to claim 1, which is characterized in that S5 further comprises: according to
Formula R=(H^2+ (D/2) ^2)/(2H) come calculate standard spherical surface template and the rise of the spherical surface of lens to be measured it is poor, using described
Rise difference updates lens curvature to be measured.
3. the test method of focal length lens curvature according to claim 1, which is characterized in that the reflecting mirror is mounted on light
On grid ruler and removable along grating scale, the standard reflection mirror pedestal is fixed and irremovable.
4. the test method of focal length lens curvature according to claim 1, which is characterized in that the standard reflection mirror pedestal
It is installed on grating scale and removable along grating scale, the reflecting mirror is fixed in the optical path between laser interferometer and grating scale
And it is irremovable.
5. the test method of focal length lens curvature according to claim 1, which is characterized in that be provided on the objective table
Three jewel beads, three jewel beads are circularly and evenly distributed.
6. the test method of focal length lens curvature according to claim 1, which is characterized in that the objective table and standard are anti-
It penetrates mirror pedestal to be detachably connected, the standard reflection mirror pedestal matches from the objective table of different circumferential sizes, the objective table
Different circumferential sizes corresponds to different measurement bores.
7. a kind of focal length lens curvature test device, which is characterized in that anti-including laser interferometer, grating scale, reflecting mirror, standard
Mirror, standard reflection mirror pedestal, objective table and the standard spherical surface template or lens to be measured being placed on objective table are penetrated, the laser is dry
Interferometer, grating scale and standard reflection mirror pedestal are in same level, the directional light and grating scale of the laser interferometer outgoing
Measurement direction it is parallel, the size of the reflecting mirror is less than the bore of standard spherical surface template or lens to be measured, the objective table peace
Above standard reflection mirror pedestal.
8. focal length lens curvature test device according to claim 7, which is characterized in that be provided with three on the objective table
A jewel bead, three jewel beads are circularly and evenly distributed.
9. focal length lens curvature test device according to claim 7, which is characterized in that the objective table and standard reflection
Mirror pedestal is detachably connected, and the standard reflection mirror pedestal matches from the objective table of different circumferential sizes, and the objective table is not
Same circumferential size corresponds to different measurement bores.
10. focal length lens curvature test device according to claim 7, which is characterized in that the reflecting mirror is mounted on light
On grid ruler and removable along grating scale, the standard reflection mirror pedestal is fixed and irremovable；Alternatively, standard reflection mirror bottom
Seat is installed on grating scale and moves along grating scale, and the reflecting mirror is fixed on the optical path between laser interferometer and grating scale
It is upper and irremovable.
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| CN201910651151.6A CN110375669B (en) | 2019-07-18 | 2019-07-18 | Method and device for testing curvature of telephoto lens |
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| CN201910651151.6A CN110375669B (en) | 2019-07-18 | 2019-07-18 | Method and device for testing curvature of telephoto lens |
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| DE69509039T2 (en) * | 1994-05-28 | 1999-08-05 | Roke Manor Research | IMPROVEMENT ON A SURFACE MEASURING DEVICE |
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