CN106018432A - Large-size optical lens surface quality detection method and system - Google Patents
Large-size optical lens surface quality detection method and system Download PDFInfo
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- CN106018432A CN106018432A CN201610304685.8A CN201610304685A CN106018432A CN 106018432 A CN106018432 A CN 106018432A CN 201610304685 A CN201610304685 A CN 201610304685A CN 106018432 A CN106018432 A CN 106018432A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
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Abstract
The invention discloses a large-size optical lens surface quality detection method. The method comprises the steps that surface precision measurement is carried out on the center part of a large-size optical lens, and the surface precision value of the center part is obtained; whether the surface precision value of the center part is within a preset threshold value range or not; if the surface precision value of the center part is within the preset threshold value range, the image information of the edge part of the large-size optical lens is obtained; according to the image information of the edge part of the large-size optical lens, a surface quality detection result of the large-size optical lens is obtained. When the large-size optical lens surface quality detection method is applied, the step of detecting the quality of the edge part of the large-size optical lens is added after the surface precision value of the center part of the large-size optical lens is obtained, comprehensive quality detection is carried out on the whole surface of the large-size optical lens, the surface quality detection result of the large-size optical lens is more accurate, and detection accuracy is improved.
Description
Technical field
The present invention relates to technical field of optical detection, more particularly, it relates to a kind of large scale optical glass
Surface quality detection method, further relates to a kind of large scale optical lens surface quality detecting system.
Background technology
In the field of optical lens surface quality testing, often through the face type essence to optical lens surface
The detection of degree and fineness judges that optical glass is the most qualified.
Along with the change of optical glass demand, large-sized optical glass demand gets more and more, existing skill
Time in art generally to large scale optical lens surface quality testing, generally utilize laser interferometer to detect it
Surface precision, detection range is about 101.6mm*101.6mm, and the area of large scale optical glass wants remote
More than 101.6mm*101.6mm, to the edge of large scale optical glass and the table that connects antermarginal part
Face quality cannot detect, therefore, when large scale optical glass edge and connect antermarginal part occur
During scratch point, detection method of the prior art causes the surface precision of large-sized optical glass to be measured
Now certain percentage is overproof, and the detection causing large scale optical lens surface quality is inaccurate.
Therefore, how large scale optical lens surface quality being carried out accurate and effective detection is art technology
Personnel's urgency technical issues that need to address.
Summary of the invention
For solving above-mentioned technical problem, the present invention provides a kind of large scale optical lens surface quality testing side
Method, it is possible to carry out accurate and effective detection to large scale optical lens surface quality.
For achieving the above object, the present invention provides following technical scheme:
A kind of large scale optical lens surface quality determining method, including:
Large scale optical glass core is carried out surface precision measurement, obtains core surface precision
Value;
Judge that described core surface precision value is whether in preset threshold range;
If described core surface precision value is in preset threshold range, then obtain described large scale optics
The image information of lens edge part;
Described large scale optical glass is obtained according to the image information of described large scale optical glass marginal portion
Surface quality detection result.
Preferably, in above-mentioned large scale optical lens surface quality determining method, described large scale is obtained
The image information of optical glass marginal portion, specifically includes:
Generation standard spherical wave;
Described standard spherical wave is converted to cover the standard flat of described large scale flat lens area
Ripple, and described standard flat ripple is sent to described large scale optical lens surface;
Obtain the described large scale that described standard flat ripple is formed after described large scale optical glass transmission
The image information of optical glass marginal portion.
Preferably, in above-mentioned large scale optical lens surface quality determining method, according to described large scale
The image information of the marginal portion of optical glass obtains large scale optical lens surface quality measurements, tool
Body includes:
Described large scale optical glass is judged according to the image information of described large scale optical glass marginal portion
Whether marginal portion has surface defect;
If it is not, the most described large scale optical lens surface quality measurements is described large scale optical glass
Surface quality is qualified;
The most described large scale optical lens surface quality measurements is described large scale optical glass
Surface quality is defective.
Preferably, in above-mentioned large scale optical lens surface quality determining method, according to described large scale
The image information of optical glass marginal portion judges whether described large scale optical glass marginal portion has table
Planar defect, specifically includes:
If the image information of described large scale optical glass marginal portion is to have the hot spot figure of light and shade striped
Picture, then judge that described large scale optical glass marginal portion has surface defect;
If the light spot image that image information is brightness uniformity of described large scale optical glass marginal portion, then
Judge that described large scale optical glass marginal portion does not has surface defect.
Present invention also offers a kind of large scale optical lens surface quality detecting system, including:
Laser interferometer, for the core of large scale optical glass is carried out surface precision measurement, obtains
Take core surface precision value;
Judge module, is used for judging that described core surface precision value is whether in preset threshold range;
Auxiliary measuring instrument, for obtaining the image information of described large scale optical glass marginal portion.
Data processing module, for obtaining according to the image information of described large scale optical glass marginal portion
Described large scale optical lens surface quality measurements.
Preferably, in above-mentioned a kind of large scale optical lens surface quality detecting system, described auxiliary is surveyed
Amount instrument includes:
Knife, is used for generating standard spherical wave;
It is arranged at the collimating lens between described knife and described large scale flat lens, for by described
Standard spherical wave is converted to cover the standard flat ripple of described large scale flat lens area, and by institute
Stating standard flat ripple to send to described large scale optical lens surface, the diameter of described collimating lens is with described
The diameter of large scale optical glass is identical;
Image acquisition device, is used for obtaining described standard flat ripple after described large scale optical glass transmission
The image information of the described large scale optical glass marginal portion formed.
Preferably, in above-mentioned large scale optical lens surface quality detecting system, described collimating lens is
Cemented doublet.
Preferably, in above-mentioned large scale optical lens surface quality detecting system, described image acquisition device
For CMOS camera or CCD camera.
Preferably, in above-mentioned large scale optical lens surface quality detecting system, described laser interference is surveyed
Amount instrument is double-frequency laser interferometry instrument.
From technique scheme it can be seen that a kind of large scale optical lens surface matter provided by the present invention
Quantity measuring method, including: large scale optical glass core is carried out surface precision measurement, in acquisition
Heart part surface precision value;Judge that described core surface precision value is whether in preset threshold range;
If described core surface precision value is in preset threshold range, then obtain described large scale optical glass
The image information of marginal portion;Institute is obtained according to the image information of described large scale optical glass marginal portion
State large scale optical lens surface quality measurements.
During a kind of large scale optical lens surface quality determining method that the application present invention provides, owing to obtaining
Add large scale optical glass edge part after taking large scale optical glass core surface precision value
Divide the step carrying out quality testing, the whole surface of large scale optical glass has been carried out the inspection of comprehensive quality
Survey so that large scale optical lens surface quality measurements is more accurate, improves Detection accuracy.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to reality
Execute the required accompanying drawing used in example or description of the prior art to be briefly described, it should be apparent that below,
Accompanying drawing in description is only embodiments of the invention, for those of ordinary skill in the art, not
On the premise of paying creative work, it is also possible to obtain other accompanying drawing according to the accompanying drawing provided.
A kind of large scale optical lens surface quality determining method signal that Fig. 1 provides for the embodiment of the present invention
Figure;
The auxiliary measuring instrument that Fig. 2 provides for the embodiment of the present invention instrumentation plan to large scale optical glass.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out
Clearly and completely describe, it is clear that described embodiment is only a part of embodiment of the present invention, and
It is not all, of embodiment.Based on the embodiment in the present invention, those of ordinary skill in the art are not doing
Go out the every other embodiment obtained under creative work premise, broadly fall into the scope of protection of the invention.
Refer to a kind of large scale optical lens surface quality inspection that Fig. 1, Fig. 1 provide for the embodiment of the present invention
Survey method schematic diagram.
In a kind of specific embodiment, the invention provides a kind of large scale optical lens surface quality
Detection method, comprises the following steps:
Step S10: large scale optical glass core carries out surface precision measurement, obtains core
Surface precision value;
The scope that can detect in view of the instrument of surface precision measurement is less, in order to accurately obtain surface precision
Value, selects the core of large scale optical glass is carried out surface precision measurement, and the center portion thereof is divided specifically
Refer to the scope that the measuring instrument centered by the optical axis of optical glass can be measured.Carry out surface precision survey
The concrete grammar of amount refer to prior art, does not repeats them here.
Step S20: judge that described core surface precision value is whether in preset threshold range;
Different types of large scale optical glass is different to the requirement of its surface precision, predetermined threshold value root
Requiring to be determined according to difference, the surface precision value scope of optical glass is 0.3nm-10nm under normal circumstances,
Therefore, predetermined threshold value can carry out value in above-mentioned scope.
Step S30: if described core surface precision value is in preset threshold range, then obtain described greatly
The image information of size optical glass marginal portion;
If described core surface precision value is in preset threshold range, large scale optical glass is described
Surface precision substantially conforms to requirement, but large scale optical glass is the most qualified, in addition it is also necessary to its edge part
The quality divided detects.Large scale optical glass marginal portion is specially and removes in large scale optical glass
The other parts of heart part.Deng the image information purpose obtaining described large scale optical glass marginal portion it is
The observation measurements assisting marginal portion, the low cost of observation measurements, speed is fast, it is possible to quickly examine
Survey cut or rat that marginal portion has.
Step S40: obtain described large scale according to the image information of described large scale optical glass marginal portion
Optical lens surface quality measurements.
During a kind of large scale optical lens surface quality determining method that the application present invention provides, owing to obtaining
Add large scale optical glass edge part after taking large scale optical glass core surface precision value
Divide the step carrying out quality testing, the whole surface of large scale optical glass has been carried out the inspection of comprehensive quality
Survey so that large scale optical lens surface quality measurements is more accurate, improves Detection accuracy.
Concrete, in above-mentioned steps S30, obtain the image letter of described large scale optical glass marginal portion
Breath, specifically includes:
Step S31: generate standard spherical wave;
The instrument that can generate standard spherical wave is set in large scale optical glass incident direction side, to greatly
Size optical glass carries out observation measurements.
Step S32: be converted to described standard spherical wave to cover described large scale flat lens area
Standard flat ripple, and described standard flat ripple is sent to described large scale optical lens surface;
Owing to standard spherical wave is by the light source of spherical wave and big chi to the range of exposures of large scale flat lens
The distance of very little flat lens determines, during in order to avoid irradiating various sizes of large scale flat lens all
Want the distance between adjustment criteria spherical wave light source and large scale flat lens, be first converted into greatly
The standard flat ripple that dimension plane lens area is identical so that it is be not only irradiated to large scale flat lens
Core, is also irradiated to marginal portion, measures for marginal portion and prepares, and saves the measurement time,
Improve and measure efficiency.
Step S33: obtain the institute that described standard flat ripple is formed after described large scale optical glass transmission
State the image information of large scale optical glass marginal portion.
Concrete, in above-mentioned steps S40, according to the image of described large scale optical glass marginal portion
Information obtains described large scale optical lens surface quality measurements, specifically includes:
Described large scale optical glass is judged according to the image information of described large scale optical glass marginal portion
Whether marginal portion has surface defect;
If it is not, the most described large scale optical lens surface quality measurements is described large scale optical glass
Surface quality is qualified;
The most described large scale optical lens surface quality measurements is described large scale optical glass
Surface quality is defective.
Further, described big chi is judged according to the image information of described large scale optical glass marginal portion
Whether very little optical glass marginal portion has surface defect, specifically includes:
If the image information of described large scale optical glass marginal portion is to have the hot spot figure of light and shade striped
Picture, then judge that described large scale optical glass marginal portion has surface defect;
If the light spot image that image information is brightness uniformity of described large scale optical glass marginal portion, then
Judge that described large scale optical glass marginal portion does not has surface defect.
The auxiliary measuring instrument that Fig. 2 provides for the embodiment of the present invention instrumentation plan to large scale optical glass.
In another kind of detailed description of the invention, present invention also offers a kind of large scale optical lens surface matter
Amount detection systems, including:
Laser interferometer, for the core of large scale optical glass is carried out surface precision measurement, obtains
Take core surface precision value;
Judge module, is used for judging that described core surface precision value is whether in preset threshold range;
Auxiliary measuring instrument, for obtaining the image information of described large scale optical glass marginal portion.
Data processing module, for obtaining according to the image information of described large scale optical glass marginal portion
Described large scale optical lens surface quality measurements.
Further, in above-mentioned a kind of large scale optical lens surface quality detecting system, described auxiliary
Measuring instrument includes:
Knife 101, is used for generating standard spherical wave.
Knife 101 is made up of point source, condenser lens, reflecting mirror and pinhole plate, point source send
Light pool plane light wave through the first condenser lens, then converge and through too small through second condenser lens
Plane mirror turns to, and by source imaging near the edge of a knife, places pin hole, plane wave on the picture of light source
Standard spherical wave is formed by pin hole.
It is arranged at the collimating lens 102 between described knife 101 and described large scale flat lens 103,
For described standard spherical wave is converted to cover the standard flat of described large scale flat lens area
Ripple, and described standard flat ripple is sent to described large scale optical lens surface, described collimating lens
Diameter is identical with the diameter of described large scale optical glass.
The effect of collimating lens 102 is that on the one hand standard spherical wave is converted to plane wave, on the other hand will
The incident area of plane wave is converted to the area that large scale optical glass area is identical, it is simple to be irradiated to big chi
The marginal portion of very little optical glass.
Image acquisition device 104, is used for obtaining described standard flat ripple through described large scale optical glass 103
The image information of the described large scale optical glass marginal portion formed after transmission.
Preferably, in above-mentioned large scale optical glass 103 Surface Quality Inspection System, described collimation is saturating
Mirror 102 is cemented doublet.
Cemented doublet is formed by a plus lens and a minus lens gluing, positive and negative lens cemented surface two
Spherical radius is equal, simple in construction, and optical energy loss is little, effectively standard spherical wave is converted to standard and puts down
Face ripple.Certainly, collimating lens can also be other type of collimating lens, such as biconvex lens, concave-concave
Lens etc., all within protection domain.
Preferably, in above-mentioned large scale optical lens surface quality detecting system, described image acquisition device
104 is CMOS camera or CCD camera.Image information is obtained the most accurate with camera, if image letter
Breath is the image of light and shade striped, then collected by camera to image in light and shade striped become apparent from, easily
Identification.
Preferably, in above-mentioned large scale optical lens surface quality detecting system, described laser interference is surveyed
Amount instrument is double-frequency laser interferometry instrument.Tested length is entered as standard by two-frequency laser interferometer using wavelength
The instrument of row tolerance, certainty of measurement is high, and to measuring, environmental requirement is low.Certainly, laser interferometer is all right
For other type of laser interferometer, such as single-frequency laser interference measuring instrument, all in protection domain.
When the large scale optical lens surface quality determining method applying the present invention to provide and system, not only
Make large scale optical lens surface quality measurements more accurate, improve Detection accuracy, also may be used
It is suitable for outward appearance with detection and reprocesses eyeglass, rate of reducing the number of rejects and seconds.When scratch point wound is the most less and is in margin location
When putting, can only scrap process, in order to reduce scrappage, this kind of eyeglass can use polishing powder to carry out local
Reprocess, whether meet the requirements for confirming face type fast and accurately after reprocessing, qualified after carry out receiving case and wait
Shipment.
In this specification, each embodiment uses the mode gone forward one by one to describe, and each embodiment stresses
Being the difference with other embodiments, between each embodiment, identical similar portion sees mutually.
Described above to the disclosed embodiments, makes professional and technical personnel in the field be capable of or uses
The present invention.Multiple amendment to these embodiments will be aobvious and easy for those skilled in the art
See, generic principles defined herein can without departing from the spirit or scope of the present invention,
Realize in other embodiments.Therefore, the present invention is not intended to be limited to the embodiments shown herein,
And it is to fit to the widest scope consistent with principles disclosed herein and features of novelty.
Claims (9)
1. a large scale optical lens surface quality determining method, it is characterised in that including:
Large scale optical glass core is carried out surface precision measurement, obtains core surface precision
Value;
Judge that described core surface precision value is whether in preset threshold range;
If described core surface precision value is in preset threshold range, then obtain described large scale optics
The image information of lens edge part;
Described large scale optical glass is obtained according to the image information of described large scale optical glass marginal portion
Surface quality detection result.
2. large scale optical lens surface quality determining method as claimed in claim 1, it is characterised in that
Obtain the image information of described large scale optical glass marginal portion, specifically include:
Generation standard spherical wave;
Described standard spherical wave is converted to cover the standard flat of described large scale flat lens area
Ripple, and described standard flat ripple is sent to described large scale optical lens surface;
Obtain the described large scale that described standard flat ripple is formed after described large scale optical glass transmission
The image information of optical glass marginal portion.
3. large scale optical lens surface quality determining method as claimed in claim 2, it is characterised in that
Large scale optical lens surface matter is obtained according to the image information of the marginal portion of described large scale optical glass
Amount testing result, specifically includes:
Described large scale optical glass is judged according to the image information of described large scale optical glass marginal portion
Whether marginal portion has surface defect;
If it is not, the most described large scale optical lens surface quality measurements is described large scale optical glass
Surface quality is qualified;
The most described large scale optical lens surface quality measurements is described large scale optical glass
Surface quality is defective.
4. large scale optical lens surface quality determining method as claimed in claim 3, it is characterised in that
Described large scale optical glass edge is judged according to the image information of described large scale optical glass marginal portion
Whether part has surface defect, specifically includes:
If the image information of described large scale optical glass marginal portion is to have the hot spot figure of light and shade striped
Picture, then judge that described large scale optical glass marginal portion has surface defect;
If the light spot image that image information is brightness uniformity of described large scale optical glass marginal portion, then
Judge that described large scale optical glass marginal portion does not has surface defect.
5. a large scale optical lens surface quality detecting system, it is characterised in that including:
Laser interferometer, for the core of large scale optical glass is carried out surface precision measurement, obtains
Take core surface precision value;
Judge module, is used for judging that described core surface precision value is whether in preset threshold range;
Auxiliary measuring instrument, for obtaining the image information of described large scale optical glass marginal portion.
Data processing module, for obtaining according to the image information of described large scale optical glass marginal portion
Described large scale optical lens surface quality measurements.
6. a large scale optical lens surface quality detecting system, it is characterised in that described subsidiary
Instrument includes:
Knife, is used for generating standard spherical wave;
It is arranged at the collimating lens between described knife and described large scale flat lens, for by described
Standard spherical wave is converted to cover the standard flat ripple of described large scale flat lens area, and by institute
Stating standard flat ripple to send to described large scale optical lens surface, the diameter of described collimating lens is with described
The diameter of large scale optical glass is identical;
Image acquisition device, is used for obtaining described standard flat ripple after described large scale optical glass transmission
The image information of the described large scale optical glass marginal portion formed.
7. large scale optical lens surface quality detecting system as claimed in claim 6, it is characterised in that
Described collimating lens is cemented doublet.
8. large scale optical lens surface quality detecting system as claimed in claim 7, it is characterised in that
Described image acquisition device is CMOS camera or CCD camera.
9. large scale optical lens surface quality detecting system as claimed in claim 8, it is characterised in that
Described laser interferometry instrument is double-frequency laser interferometry instrument.
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107024483A (en) * | 2015-10-13 | 2017-08-08 | 弗兰克公司 | The three-dimensional inspection of optical communications link |
CN110375669A (en) * | 2019-07-18 | 2019-10-25 | 武汉优光科技有限责任公司 | A kind of test method and test device of focal length lens curvature |
CN110779461A (en) * | 2019-10-16 | 2020-02-11 | 中国航空工业集团公司洛阳电光设备研究所 | Testing device and method for plane reflector surface type in refraction and reflection convergence light path |
CN113834462A (en) * | 2021-08-05 | 2021-12-24 | 山西光兴光电科技有限公司 | Method and device for detecting warping of glass substrate |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4561333A (en) * | 1982-05-20 | 1985-12-31 | Agency Of Industrial Science & Technology | Diamond turning method for high-precision metal mirror |
CN1609547A (en) * | 2003-10-24 | 2005-04-27 | 富士能株式会社 | Detected lens holding table for interferometer apparatus |
CN1995943A (en) * | 2007-01-04 | 2007-07-11 | 四川大学 | Omnibearing detection method for large-diameter aspherical mirror |
CN101650157A (en) * | 2009-09-18 | 2010-02-17 | 中国科学院长春光学精密机械与物理研究所 | Detecting method and detecting device of surface-shape error of double curved surface convex reflecting mirror |
CN101688767A (en) * | 2006-12-21 | 2010-03-31 | 庄臣及庄臣视力保护公司 | The interferometry test of eyeglass and system and the device that is used for this method |
CN102997864A (en) * | 2012-12-17 | 2013-03-27 | 北京理工大学 | Detection system of large-aperture optical aspherical mirror |
-
2016
- 2016-05-10 CN CN201610304685.8A patent/CN106018432A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4561333A (en) * | 1982-05-20 | 1985-12-31 | Agency Of Industrial Science & Technology | Diamond turning method for high-precision metal mirror |
CN1609547A (en) * | 2003-10-24 | 2005-04-27 | 富士能株式会社 | Detected lens holding table for interferometer apparatus |
CN101688767A (en) * | 2006-12-21 | 2010-03-31 | 庄臣及庄臣视力保护公司 | The interferometry test of eyeglass and system and the device that is used for this method |
CN1995943A (en) * | 2007-01-04 | 2007-07-11 | 四川大学 | Omnibearing detection method for large-diameter aspherical mirror |
CN101650157A (en) * | 2009-09-18 | 2010-02-17 | 中国科学院长春光学精密机械与物理研究所 | Detecting method and detecting device of surface-shape error of double curved surface convex reflecting mirror |
CN102997864A (en) * | 2012-12-17 | 2013-03-27 | 北京理工大学 | Detection system of large-aperture optical aspherical mirror |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107024483A (en) * | 2015-10-13 | 2017-08-08 | 弗兰克公司 | The three-dimensional inspection of optical communications link |
CN110375669A (en) * | 2019-07-18 | 2019-10-25 | 武汉优光科技有限责任公司 | A kind of test method and test device of focal length lens curvature |
CN110375669B (en) * | 2019-07-18 | 2020-12-29 | 武汉优光科技有限责任公司 | Method and device for testing curvature of telephoto lens |
CN110779461A (en) * | 2019-10-16 | 2020-02-11 | 中国航空工业集团公司洛阳电光设备研究所 | Testing device and method for plane reflector surface type in refraction and reflection convergence light path |
CN110779461B (en) * | 2019-10-16 | 2021-09-21 | 中国航空工业集团公司洛阳电光设备研究所 | Testing device and method for plane reflector surface type in refraction and reflection convergence light path |
CN113834462A (en) * | 2021-08-05 | 2021-12-24 | 山西光兴光电科技有限公司 | Method and device for detecting warping of glass substrate |
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Application publication date: 20161012 |