CN206362310U - Optical interval measurement system in a kind of Aspherical-surface testing light path - Google Patents
Optical interval measurement system in a kind of Aspherical-surface testing light path Download PDFInfo
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- CN206362310U CN206362310U CN201621409783.XU CN201621409783U CN206362310U CN 206362310 U CN206362310 U CN 206362310U CN 201621409783 U CN201621409783 U CN 201621409783U CN 206362310 U CN206362310 U CN 206362310U
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- mirror
- light path
- aspherical
- cross
- offner
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
Abstract
The utility model is related to optical interval measurement system in a kind of Aspherical-surface testing light path, belong to Aspherical-surface testing field, the system ties up the dimension adjustment frames five of adjustment frames four and five including the mirror surface position finder set gradually along light path, cross differentiation plate, Offner compensators, tested aspherical mirror, the five dimension dimension adjustment frames three, five of adjustment frames two, five；The mirror surface position finder is placed in five dimension adjustment frames five, and the cross differentiation plate is placed in five dimension adjustment frames four, and the Offner compensators are placed in five dimension adjustment frames two, and the tested aspherical mirror is placed in five dimension adjustment frames three；Light path and the optimal surface testing light path common optical axis of tested aspherical mirror that the mirror surface position finder, cross differentiation plate, Offner compensators and tested aspherical mirror are constituted；The mirror surface position finder breaks up the working distance that the distance between plate is more than mirror surface position finder with cross；Mirror surface position finder and the PC connection.The utility model measurement accuracy is about 0.05mm, and accuracy of detection is high, non-contact measurement.
Description
Technical field
The utility model belongs to field of optical detection, more particularly to a kind of Aspherical-surface testing light with Offner compensators
The system of optical interval non-touch precision measurement in road.
Background technology
In aspherical mirror processing detection process, often interference detection is realized by compensator.Compensator by type may be used
It is divided into refractive optical compensator, reflective optic compensator and diffractive optical compensator.Offner compensators belong to refraction
The most frequently used one kind in formula compensator, is typically made up of two panels lens, plane wave or the spherical wave conversion that can send interferometer
Into aspherical wavefront, compensated device returns to interferometer again after being detected aspherical reflection, with reference beam formation interference fringe.Adopt
The sphere standard lens for being equipped with suitable F numbers with laser interferometer is that the interference that aspheric surface can be achieved is detected.
In the manufacturing and designing of optical aspherical surface, the geometric parameter such as vertex curvature radius R, secondry constants K is statement aspheric
The important parameter in face, but the two geometric parameters are unable to direct measurement, only by measure laser interferometer standard lens,
Optical interval between Offner compensators and tested aspherical mirror, and be taken to optical design software and retried
Vertex curvature radius R, secondry constants K, the public affairs for thus only designing the optical interval control in these detection light paths at it
It in poor scope, and can accurately measure, can so meet aspherical processing and manufacturing detection and use requirement.
At present, steel tape or fixation are generally used for the Aspherical-surface testing path optics interval with Offner compensators
The instruments such as the interval measurement bar of length are measured.This measuring method is by the way of reading is artificially estimated, it is difficult to be accurately positioned in
The vertex position on each surface, measurement accuracy is relatively low, about 0.5mm；This method is a kind of contact measurement method, there is minute surface
The risk being scratched, and there is also can not use asking that steel tape or measurement bar are measured because optical interval distance is shorter
Topic.
Utility model content
Technical problem to be solved in the utility model be to provide it is a kind of contactless and can accurate measurement carry
The system and detection method of optical interval in the Aspherical-surface testing light path of Offner compensators.
Technical solution of the present utility model is to provide a kind of optical interval precision measurement system, and its special feature exists
In：Including the mirror surface position finder set gradually along light path, cross differentiation plate, Offner compensators and tested aspherical mirror；
The light path that above-mentioned mirror surface position finder, cross differentiation plate, Offner compensators and tested aspherical mirror are constituted is with being tested
The optimal surface testing light path common optical axis of aspherical mirror；
Mirror surface position finder and cross break up the working distance that the distance between plate is more than mirror surface position finder, cross differentiation plate and
The distance between lens one of Offner compensators are L1, the distance between the lens one and lens two of Offner compensators are L2,
The distance between lens two and tested aspherical mirror of Offner compensators are L3, different tested aspherical mirrors calculate gained
L1、L2、L3It is different.
Above-mentioned mirror surface position finder and PC connection.
In order to adjust above-mentioned Optical devices, optical interval precision measurement system of the present utility model also includes five dimensions and adjusted
The whole dimension of frame two, five adjustment frame three, the five dimension dimension adjustment frame five of adjustment frame four and five, above-mentioned mirror surface position finder is placed on five dimension adjustment frames
On five, above-mentioned cross differentiation plate is placed in five dimension adjustment frames four, and above-mentioned Offner compensators are placed in five dimension adjustment frames two,
Above-mentioned tested aspherical mirror is placed in five dimension adjustment frames three.
In order to realize more accurate measurement, the optical interval measurement precision of above-mentioned mirror surface position finder is 1 μm.
Above-mentioned cross differentiation plate includes central circular, and a diameter of 0.5mm of the central circular, central circular is broken up with cross
The cylindrical concentricity of plate is φ 0.05mm.
The utility model additionally provides a kind of optical interval precision measurement method, comprises the following steps：
Step one：According to tested aspherical mirror, detection index path is calculated, optimal surface testing is built according to the index path
Light path；
1.1：Laser interferometer, Offner compensators and tested aspherical mirror are set gradually along light path, laser interferometer
The focus O of standard lens1It is L with the distance between lens one of Offner compensators1, the lens one of Offner compensators and thoroughly
The distance between mirror two is L2, the distance between the lens two and tested aspherical mirror of Offner compensators are L3；
1.2：The laser interferometer, Offner compensators and tested aspherical mirror are individually positioned in five dimension adjustment frames
First, in the five dimension dimension adjustment frames three of adjustment frame two and five, tie up adjustment frame two, five by five dimension adjustment frames one, five and tie up three points of adjustment frame
Tiao Zheng laser interferometer, Offner compensators and tested aspherical mirror so that laser interferometer, Offner compensators and tested
Aspherical mirror is coaxial, forms optimal surface testing light path, the axle is optimal surface testing light path light axis；
Step 2：The cross-graduation plate being fixed in five dimension adjustment frames four is placed on to Jiao of laser interferometer standard lens
Point O1Near, cross-graduation plate is adjusted by five dimension adjustment frames four, the central circular of cross-graduation plate is examined positioned at optimal face shape
Survey on light path light axis；
Step 3：Laser interferometer and five dimension adjustment frames one are removed, the minute surface being fixed in five dimension adjustment frames five is positioned
Instrument is placed on the front end of cross-graduation plate, and the distance between mirror surface position finder and cross-graduation plate are more than the work of mirror surface position finder
Away from；
Tieing up adjustment frame five by adjustment five makes the laser beam of mirror surface position finder outgoing impinge perpendicularly on cross-graduation plate
Central circular, observation PC on interval measurement interface, when interference signal and signal peak highest occurs in each optical surface
When start measure optical interval；
Step 4：Measurement draws the thickness O of cross-graduation plate1O3=d1, cross-graduation plate and lens one air between both
It is spaced O3O4=d2, lens one center thickness O4O5=d3, lens one and lens two airspace O between the two5O6=d4, thoroughly
The center thickness O of mirror two6O7=d5, lens two and tested aspherical mirror airspace O between the two7O2=d6, it can thus be concluded that：
L1'=d1+d2、L2'=d3+d4+d5、L3'=d6；Wherein L1’、L2' and L3' it is L1、L2And L3Actual measured value；
Step 5：By L1’、L2' and L3' etc. measured value substitute into optical design software carry out double calculation can obtain vertex curvature radius
R, secondry constants K geometric parameter values.
The beneficial effects of the utility model are：The utility model is realized with Offner compensators using mirror surface position finder
Aspherical-surface testing light path in optical interval contactless high-precision accurate measurement, solve existing method error of measuring it is complicated,
Measurement accuracy is low, easy scuffing minute surface the problem of, there is step clear principle, easy to operate, for Offner compensators
Aspherical-surface testing, processing and manufacturing provide and ensure, measurement accuracy of the present utility model is about 0.05mm, and accuracy of detection is high, and
For non-contact measurement, the risk of minute surface is scratched during in the absence of measurement.
Brief description of the drawings
Fig. 1 is the aspheric surface detection light path schematic diagram with Offner compensators；
Fig. 2 is to place the detection light path schematic diagram after cross-graduation plate；
Fig. 3 is aspherical detection light road interval non-cpntact measurement structural representation；
Fig. 4 is aspherical detection light road interval schematic diagram；
Fig. 5 is the outline drawing of cross-graduation plate.
Reference is in figure：1- laser interferometer, 1-1- standard lens, the dimension adjustment frames one of 1-2- five, 2-Offner is mended
Device is repaid, the dimension adjustment frames two of 2-1- five, 2-2- lens one, 2-3- lens two, 3- is tested aspherical mirror, and 3-1- five ties up adjustment frame three,
4-PC machines, 5- cross-graduation plates, the dimension adjustment frames four of 5-1- five, 5-2- central circulars, 6- mirror surface position finders, the dimension adjustment frames of 6-1- five
The optimal surface testing light path light axis of five, 7-.
Embodiment
The utility model is further described below in conjunction with accompanying drawing.
As shown in Figure 1, Figure 2 and Figure 3, light in a kind of Aspherical-surface testing light path with Offner compensators of the utility model
Learning the system of interval non-touch precision measurement has three auto-collimation detection light paths, respectively laser interferometer 1, Offner compensators
The 2 aspheric surface auto-collimation detection light paths constituted with tested aspherical mirror 3；Laser interferometer 1 is constituted with cross-graduation plate 5
Perpendicular positioning autocollimatic straight light path；And by mirror surface position finder 6, cross-graduation plate 5, Offner compensators 2 and tested aspherical mirror 3
The optical interval auto-collimation detection light path of composition.Perpendicular positioning autocollimatic straight light path, optical interval auto-collimation detection light path and aspheric
Face face shape auto-collimation detection light path is same common optical axis light path, i.e., optimal aspheric surface detection light path light axis 7.In aspherical face
Shape auto-collimation detects that laser interferometer 1 is connected with PC 4 in light path and perpendicular positioning autocollimatic straight light path, in optical interval auto-collimation
Mirror surface position finder 6 is connected with PC 4 in detection light path, laser interferometer 1 is provided with PC 4 corresponding with mirror surface position finder 6
Survey Software.
5 points of laser interferometer 1, mirror surface position finder 6, Offner compensators 2, tested aspherical mirror 3 and cross-graduation plate
The 1-2 of five dimension adjustment frame one, five dimension adjustment frame two 2-1, five dimension adjustment frame three 3-1, the five dimension 5-1 of adjustment frame four and five dimensions are not placed on
On the 6-1 of adjustment frame five, realize it is separate around, upper and lower translation and left and right, up and down beat.
The utility model is followed the steps below when specifically used：
Step one：Actually detected light path is built according to pre-designed aspheric surface detection index path, laser is done
Interferometer 1, Offner compensators 2, tested aspherical mirror 3 are individually positioned in the 1-2 of five dimension adjustment frame one, five dimension adjustment frame two 2-1, five
Tie up on adjustment frame three 3-1, realize three it is separate around, upper and lower translation and left and right, up and down beat, built
Light path is detected into aspheric surface；By five dimension adjustment frame one 1-2, five dimension adjustment frame two 2-1, five dimension adjustment frame three 3-1 simultaneously
Coarse adjustment, fine setting are carried out to laser interferometer 1, Offner compensators 2, tested aspherical mirror 3, and observes dynamic in real time on PC 4
State measurement figure makes the face shape figure measured be optimum state, and the inclination, defocus and coma amount in obtained interference pattern (reach for minimum
To tested aspherical mirror setting technical indicator when) to can be achieved three coaxial, forms optimal surface testing light path light axis 7.
Step 2：The cross-graduation plate 5 being fixed on the 5-1 of five dimension adjustment frame four is placed on to standard lens 1-1 focus
O1Near, i.e. " opal " position, tieing up the 5-1 of adjustment frame four by coarse adjustment five makes central circular 5-2 and standard lens 1-1 focus O1
Substantially overlap, remove standard lens 1-1, now the outgoing directional light of laser interferometer 1, fine setting five ties up the 5-1 of adjustment frame four and causes ten
The normal of word graticle 5 is parallel with the outgoing beam optical axis of laser interferometer 1, then along with the dimension of standard lens 1-1 fine settings five is adjusted
The whole 5-1 of frame four makes central circular 5-2 and standard lens 1-1 focus O1Overlap, and the surface shape measurement interface of Real Time Observation PC 4 is treated
Fine setting terminates when there is interference fringe, so not only ensure that cross-graduation plate 5 is vertical with optimum detection light path light axis 7, center
Annulus 5-2 is located on optimum detection light path light axis 7, and cross-graduation plate 5 is placed exactly in " opal " position, i.e. center circle
Ring 5-2 and focus O1Precision is overlapped.
Step 3：The dimension 1-2 of adjustment frame one of laser interferometer 1 and five is removed, the mirror on the 6-1 of five dimension adjustment frame five will be fixed on
Face position indicator 6 is placed on the front end of cross-graduation plate 5, and mirror surface position finder 6 is gone out by coarse adjustment, the dimension of fine setting five 6-1 of adjustment frame five
The central circular 5-2 that the laser beam penetrated is impinged perpendicularly on cross-graduation plate 5, i.e., with the accurate weight of optimum detection light path light axis 7
Close, the interval measurement interface on observation PC 4 is opened when each optical surface interference signal and peak value optimal (highest) is occurred
Begin measurement optical interval.
Step 4：The optical interval measured according to step 3 is respectively：The thickness O of cross-graduation plate 51O3=d1, cross point
Draw the 2-2 of lens one of plate 5 and offner compensators airspace O between the two3O4=d2, the 2-2 of lens one center thickness O4O5
=d3, the airspace O of the 2-2 of lens one and the 2-3 of lens two between the two5O6=d4, the 2-3 of lens two center thickness O6O7=
d5, the 2-3 of lens two and tested aspherical mirror 3 airspace O between the two7O2=d6, it can thus be concluded that：L1'=d1+d2、L2'=d3+
d4+d5、L3'=d6。
Step 5：By L1’、L2’、L3' measured value substitute into optical design software carry out double calculation can obtain vertex curvature radius R, two
The geometric parameter values such as secondary constant K.
Above content is to combine specific preferred embodiment further detailed description of the utility model, it is impossible to
Assert that embodiment of the present utility model is only limitted to this, for the utility model person of an ordinary skill in the technical field
For, without departing from the concept of the premise utility, some simple deduction or replace can also be made, should be all considered as
Belong to the utility model and determine scope of patent protection by the claims submitted.
Claims (3)
1. optical interval measurement system in a kind of Aspherical-surface testing light path, it is characterised in that：Including the mirror set gradually along light path
Face position indicator, cross differentiation plate, Offner compensators, tested aspherical mirror, the five dimension dimension adjustment frames three, five of adjustment frame two, five are tieed up
Adjustment frame four and five ties up adjustment frame five；
The mirror surface position finder is placed in five dimension adjustment frames five, and the cross differentiation plate is placed in five dimension adjustment frames four, institute
State Offner compensators to be placed in five dimension adjustment frames two, the tested aspherical mirror is placed in five dimension adjustment frames three；
Light path and tested aspheric that the mirror surface position finder, cross differentiation plate, Offner compensators and tested aspherical mirror are constituted
The optimal surface testing light path common optical axis of face mirror；
The mirror surface position finder breaks up the working distance that the distance between plate is more than mirror surface position finder with cross；
Mirror surface position finder and the PC connection.
2. optical interval measurement system in Aspherical-surface testing light path according to claim 1, it is characterised in that：The minute surface
The optical interval measurement precision of position indicator is 1 μm.
3. optical interval measurement system in Aspherical-surface testing light path according to claim 1, it is characterised in that：The cross
Breaking up plate includes central circular, and a diameter of 0.5mm of the central circular, central circular breaks up the cylindrical concentricity of plate with cross
For φ 0.05mm.
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| CN201611192915.2A Active CN106767471B (en) | 2016-09-28 | 2016-12-21 | Optical interval measuring system and method in aspheric surface detection light path |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106767471A (en) * | 2016-09-28 | 2017-05-31 | 中国科学院西安光学精密机械研究所 | Optical interval measurement system and method in a kind of Aspherical-surface testing light path |
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| CN112033302B (en) * | 2020-08-25 | 2021-11-23 | 长春长光智欧科技有限公司 | Optical system installation and adjustment equipment capable of compensating in real time and installation and adjustment method thereof |
| CN116026255B (en) * | 2023-02-15 | 2023-06-20 | 中国科学院长春光学精密机械与物理研究所 | Coarse adjustment device and coarse adjustment method for aberration-free point detection light path |
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| CN206362310U (en) * | 2016-09-28 | 2017-07-28 | 中国科学院西安光学精密机械研究所 | Optical interval measurement system in a kind of Aspherical-surface testing light path |
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2016
- 2016-12-21 CN CN201621409783.XU patent/CN206362310U/en active Active
- 2016-12-21 CN CN201611192915.2A patent/CN106767471B/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106767471A (en) * | 2016-09-28 | 2017-05-31 | 中国科学院西安光学精密机械研究所 | Optical interval measurement system and method in a kind of Aspherical-surface testing light path |
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| CN106767471A (en) | 2017-05-31 |
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