CN206193312U - Micron order photoelectricity centring means based on surface reflection like - Google Patents
Micron order photoelectricity centring means based on surface reflection like Download PDFInfo
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- CN206193312U CN206193312U CN201621155416.1U CN201621155416U CN206193312U CN 206193312 U CN206193312 U CN 206193312U CN 201621155416 U CN201621155416 U CN 201621155416U CN 206193312 U CN206193312 U CN 206193312U
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- mirror
- centering
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- beam splitter
- surface reflection
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Abstract
The utility model provides a micron order photoelectricity centring means based on surface reflection like, the method is including at first divideing into folded light beam and transmitted light beam with a branch of laser through the beam splitter prism, wherein the folded light beam is reflected behind the collimation again, forms images behind the returned along an original path, transmitted light beam collimation post -concentration returns and forms images behind beam splitting prismatic reflection in determinand mirror surface's centre of curvature, the former light path of mirror surface reflection back -porch that is awaited measuring, obtain the barycenter of image planes facula with inferior pixel technique, just can draw the offset on element under test surface according to the coordinate of barycenter point. The requirement of high accuracy optics centering not only can be satisfied, but also a thinking can be provided for following centring means's development.
Description
Technical field
The utility model is related to optical centering field, and in particular to a kind of micron order photoelectric Centering based on surface reflection image
Device.It is sphere or the centering work of quadratic surface optical element to be mainly used in the circular optical elements surface without centre bore
Make.
Background technology
The production and processing of optical element will be so-called by corase grind, fine grinding, polishing, centering and the such a process of edging
The centering of optical element is exactly to make the normal and reference axis of the optical surface apex of circular optical elements by certain method
The process of coincidence, reference axis here be exactly for mark, check and correction center error a straight line for determination, Ke Yishi
The gyroaxis of lathe or the optical axis of system.Traditional optical element spotting device can be divided mainly into Mechanical Method, light according to principle
Method and photoelectricity combined techniques.
The principle of mechanical centering method is：Using a pair of alignments are very high and centring chuck of cross section perpendicular axis, by
The spring force being applied on chuck steps up part to be measured.One of chuck can only be rotated, and another can rotate and can edge
Axis movement；In centering process, if part to be measured is in non-centering state, because the thick difference in side causes to be measured to see stress not
Equilibrium, chuck can cause that part to be measured is being moved on axis to the centering power of part to be measured；When part to be measured is no longer moved, say
Bright lens axis reaches certain weight and precision with chuck axis, so as to realize centering.The advantage of Mechanical Method centering is operation letter
Single, high in machining efficiency, suitable high-volume is processed and with medium accuracy, is disadvantageous in that precision is not high, and precision is felt relieved
The influence at angle.
Optical centering method mainly includes surface reflection image centering method, centre of sphere auto-collimation picture centering method and transmission as centering method.
Surface reflection image centering method principle is：Part to be measured is adhered on centering joint, and centering joint can be around machine tool rotary
Axle is rotated, and places light source in mirror opposite side to be measured, and observe the position of reflection image in the same side of lamp.Centering connects in centering process
Head is rotated around gyroaxis, if observed light source as it is motionless or when adjusting bounce in tolerance if complete it is fixed
The heart.The advantage of surface reflection image centering method is：Equipment is simple, observation directly, suitable for single-piece and small lot batch manufacture；Deficiency
Place is：Need operating personnel by visual observation to judge centering precision, cause precision not high, and the scope of application is not wide.
The centre of sphere auto-collimation reflection image centering method principle be：Part to be measured is bonded on centering head, and centering head can be around lathe
Gyroaxis is rotated, and mirror opposite side to be measured is sequentially placed collective lens, collimation camera lens and graticle.The picture of graticle in centering process
Still can be imaged on graticle after being reflected by part to be measured, when joint of feeling relieved is rotated around gyroaxis, if the picture of graticle
When motionless or transfer is in tolerance, then centering is completed.The advantage that centre of sphere auto-collimation is reflected towards centering method is：Using
Optical amplification system and graticle cause that the centering precision of whole system is high；It is disadvantageous in that：It is normally only used for that diameter is small, song
The small lens of rate radius, because visual field is small so that look for as difficult, equipment is complex and moving guide rail requirement for centrescope
It is high.
Transmission beam method centering method principle be：The light that light source is produced is collimated after converging in cross-graduation plate and enters to be measured
Part, another graticle is converged to by the light of part to be measured by image-forming objective lens, afterwards again will be as being imaged onto sight by imaging eyepiece
In the person's of examining eye.The method is mainly used in lenses centering, in centering, lens to be measured is rotated, if the cross-graduation on graticle
It is motionless or bounce in tolerance, through completing centering.The scope of application of transmission-type centering method is only limitted to transmit camera lens, and
And there is a deficiency for maximum：When bias of the lens rear focus to reference axis is zero, even if optical axis is with reference axis still
When having the angle of cut, the centering error of lens physical presence cannot show.
Photoelectricity combined techniques mainly includes optical television centering method and laser centering method.
Optical television centering method developed on the basis of centre of sphere auto-collimation centering method.The improvement is that and increased
Incline 45 ° placement beam-splitting boards, by part to be measured reflect graticle picture by being direct imaging at video camera after beam-splitting board,
The picture of graticle is provided by display screen and centering error is shown.The advantage is that：High precision, detection are directly perceived, efficiency high；No
It is in place of foot：Ordinary light source typically is used, light source spectral coverage is wider, in order to obtain preferable image quality, to optical system
It is required that uprising so that system is complex, cost is also higher.
Laser centering method is mainly made up of three parts：The laser of adjustable focus, two-dimensional position sensor, electron process and aobvious
Show part.Its measuring principle is：The light sent from laser passes through centering lens, lens to be measured by the optical system of adjustable focus
Clamped with a fixture for center light-permeable, receive picture with the photoelectric crystal with adjustable micrometer after the lens, and luminous point is shown
Show over the display.Laser centering method advantage be：Simple to operate, speed is fast, centering precision is high；It is disadvantageous in that：Should
With being limited in scope, lens are simply possible to use in, and can not effectively solve for transmission-type centering method problem encountered.
Utility model content
Technical problem to be solved in the utility model is to propose a kind of micron order photoelectric Centering based on surface reflection image
Device, can not only meet the requirement of high-precision optical centering, but also can provide one kind for the development of following centring means
Thinking.The device have simple structure, operation easily, have a wide range of application, the characteristics of centering precision is high, be mainly used in surface for ball
Face or the centering work of quadratic surface optical element.
Technical solution of the present utility model is to provide a kind of micron order photoelectric Centering method based on surface reflection image,
Comprise the following steps：
1) beam of laser is divided into the reflected beams and transmitted light beam through beam splitter prism；
2) wherein the reflected beams are collimated is reflected again, is imaged after backtracking；Transmitted light beam collimates post-concentration in treating
The center of curvature of objective lens surface is surveyed, is returned along original optical path after being reflected by mirror surface to be measured and is imaged after beam splitter prism reflection；
3) barycenter of image planes hot spot is obtained with Sub-pixel Technique, the coordinate according to center of mass point can draw element under test surface
Offset.
The utility model additionally provides a kind of micron order photoelectric Centering device based on surface reflection image, and its special feature exists
In：Including laser, beam splitter prism, it is arranged on the to-be-measured cell of beam splitter prism transmitted light path, is arranged on beam splitter prism reflected light
Reference unit, CCD/CMOS cameras on road；Above-mentioned beam splitter prism is formed by two pieces of right-angle prism gluings, and cemented surface is coated with semi-transparent
Half anti-film；
Above-mentioned to-be-measured cell includes the collimating mirror for setting gradually, assembles object lens and mirror to be measured；
Above-mentioned reference light unit includes the reference light unit collimating mirror and reference light unit reflecting mirror that set gradually；
Above-mentioned CCD/CMOS cameras are used for the imaging of test cell and reference unit.
In order to be applied to different curvature ranges, above-mentioned convergence object lens are multigroup.
Above-mentioned beam splitter prism, collimating mirror and the material for assembling object lens are optical glass material K9, greatly simplify optics
System.
Operation principle of the present utility model is as follows：
The light sent by laser 1 is divided into two beams after beam splitter prism 2 is transmitted, wherein a branch of be reflected into reference light
Unit collimating mirror 6 is collimated into directional light, is reflected after inciding reference light unit reflecting mirror 7, and backtracking enters beam splitting rib
Mirror 2, through imaging in CCD/CMOS cameras 8 after beam splitter prism 2；It is directional light that other light beam is transmitted into the collimation of collimating mirror 3,
Parallel light focusing is in the center of curvature on the surface of mirror to be measured 5 after being transferred to convergence object lens 4, by the table of mirror to be measured 5 when traveling to mirror 5 to be measured
Face reflection is returned along original optical path, by imaging in CCD/CMOS cameras 8 after beam splitter prism 2, after the picture collection that camera will be obtained
The barycenter of image planes hot spot is obtained using Sub-pixel Technique, the coordinate according to center of mass point can draw the offset on original paper surface.
The beneficial effects of the utility model are：
(1) present apparatus structure is very simple, very easy to use, it is easy to integrated, can not only be conveniently used for optical element
Centering task, also may be mounted on lathe for edging feel relieved；
(2) the reference light unit in the present apparatus by being constituted with reference to light unit collimating mirror and reference light unit reflecting mirror is centering
Device reference point, still can quickly provide mirror bias situation to be measured under conditions of rotation lathe is independent of；
(3) the centering scope of the present apparatus is very wide, and the table of any curvature can be detected by changing specific object lens of assembling
Face；
(4) present apparatus is because use laser (wavelength is 632.8nm) as light source, and light source spectral coverage is very narrow, aberration influence
Smaller, lens used by system and beam dividing lens use same conventional optical glass material K9, greatly simplify optics
System；
(5) the sub-pixed mapping algorithm in high speed readout circuit combination image procossing can be with the inclined of the acquisition surface of real-time high-precision
Mood condition.
Brief description of the drawings
Fig. 1 (a) is the utility model overall structure diagram one；
Fig. 1 (b) is the utility model overall structure diagram two；
Fig. 2 (a) is that the utility model refers to light unit design drawing；
Fig. 2 (b) is the utility model in mirror ideal situation optical system diagram to be measured；
Fig. 3 (a) is for the utility model in mirror to be measured in X-direction bias 2mm situation optical system diagrams；
Fig. 3 (b) is the utility model in mirror to be measured bias 2mm situation optical system diagrams in the Y direction；
Fig. 3 (c) is that the utility model inclines 2mm situation optical system diagrams in mirror to be measured in X-direction；
Fig. 3 (d) inclines -2mm situation optical system diagrams in the Y direction for the utility model in mirror to be measured；
Fig. 4 is the utility model overall optical system figure.
Fig. 5 is that the utility model inclines image planes when 2mm, Y-direction incline -2mm, X/Y bias 2mm in ideal situation, X-direction
Disc of confusion synthesis schematic diagram；
Reference is in figure：1- lasers, 2- beam splitter prisms, 3- collimating mirrors, 4- assembles object lens, 5- mirrors to be measured, 6- ginsengs
Examine unit collimating mirror, 7- reference unit speculums, 8-CCD/CMOS cameras.
Specific embodiment
The utility model is further described below in conjunction with accompanying drawing.
As shown in Figure 1a, it is a kind of structural representation of the utility model optical system, laser has been sequentially placed along axis
Device 1, beam splitter prism 2, collimating mirror 3, convergence object lens 4 and mirror to be measured 5, reference has been sequentially placed on the transmitted light path of beam splitter prism
Unit collimating mirror 6 and reference unit speculum 7, the axis of CCD/CMOS cameras 8, reference path collimating mirror 6 reflect with reference path
The optical axis of mirror 7 is in the center overlapping of axles of beam splitter prism, and the central shaft is vertical with above-mentioned axis, and the light of mirror reflection to be measured passes through
The image planes that optical system is assembled overlap with the image planes of the light collection reflected by reference path speculum；CCD/CMOS cameras 8
Present position is near the image planes assembled by optical system of light of mirror to be measured reflection；The convergence of the utility model optical system
Object lens can be divided into multigroup, be the utility model optical system as shown in Figure 1 b to be applied to the measured piece of different curvature
Suitable for the schematic diagram of the measured piece of another different curvature.
The parameter of optical system is as follows in the present embodiment：It is the He-Ne lasers of 632.8nm that laser uses wavelength；Point
Beam prism is formed by two pieces of K9 right-angle prism gluings, and cemented surface is coated with semi-transparent semi-reflecting film；Collimating mirror is identical with meeting polymers mirror, adopts
K9 glass is used, focal length is 100mm, and rear cut-off distance is 100mm, can be used to measure surface of the curvature less than 100mm when actually used
The degree of eccentricity.The bigger nonreentrant surface of measurement radius of curvature, then can be designed that focal length is bigger and rear cut-off distance is longer if necessary
Object lens are assembled, existing convergence object lens are changed afterwards.
Claims (3)
1. a kind of micron order photoelectric Centering device based on surface reflection image, it is characterised in that：Including laser, beam splitter prism,
It is arranged on the to-be-measured cell of beam splitter prism transmitted light path, reference unit, the CCD/CMOS being arranged on beam splitter prism reflected light path
Camera；The beam splitter prism is formed by two pieces of right-angle prism gluings, and cemented surface is coated with semi-transparent semi-reflecting film；
The to-be-measured cell includes the collimating mirror for setting gradually, assembles object lens and mirror to be measured；
The reference light unit includes the reference light unit collimating mirror and reference light unit reflecting mirror that set gradually；
The CCD/CMOS cameras are used for the imaging of test cell and reference unit.
2. the micron order photoelectric Centering device based on surface reflection image according to claim 1, it is characterised in that：The meeting
Polymers mirror is multigroup.
3. the micron order photoelectric Centering device based on surface reflection image according to claim 1, it is characterised in that：Described point
Beam prism, collimating mirror and the material for assembling object lens are optical glass material K9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621155416.1U CN206193312U (en) | 2016-10-31 | 2016-10-31 | Micron order photoelectricity centring means based on surface reflection like |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621155416.1U CN206193312U (en) | 2016-10-31 | 2016-10-31 | Micron order photoelectricity centring means based on surface reflection like |
Publications (1)
| Publication Number | Publication Date |
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| CN206193312U true CN206193312U (en) | 2017-05-24 |
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ID=58732625
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| CN201621155416.1U Active CN206193312U (en) | 2016-10-31 | 2016-10-31 | Micron order photoelectricity centring means based on surface reflection like |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106383396A (en) * | 2016-10-31 | 2017-02-08 | 中国科学院西安光学精密机械研究所 | Micrometer-grade photoelectric centering method and micrometer-grade photoelectric centering device based on surface reflection image |
| CN114415317A (en) * | 2022-01-22 | 2022-04-29 | 西安工业大学 | Method and device for positioning free-form surface optical element |
-
2016
- 2016-10-31 CN CN201621155416.1U patent/CN206193312U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106383396A (en) * | 2016-10-31 | 2017-02-08 | 中国科学院西安光学精密机械研究所 | Micrometer-grade photoelectric centering method and micrometer-grade photoelectric centering device based on surface reflection image |
| CN114415317A (en) * | 2022-01-22 | 2022-04-29 | 西安工业大学 | Method and device for positioning free-form surface optical element |
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