CN108662993A - A kind of Surface roughness measurement system based on optical scattering principle - Google Patents
A kind of Surface roughness measurement system based on optical scattering principle Download PDFInfo
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- CN108662993A CN108662993A CN201810330036.4A CN201810330036A CN108662993A CN 108662993 A CN108662993 A CN 108662993A CN 201810330036 A CN201810330036 A CN 201810330036A CN 108662993 A CN108662993 A CN 108662993A
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- microscope group
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of Surface roughness measurement systems based on optical scattering principle, including light source, convergence microscope group, pin hole, collimation microscope group, iris diaphgram, sample to be tested, focusing microscope group, photodetector, delustring trap, data processing system.The light wave that light source is sent out is converted into light pencil by assembling microscope group, again after pinhole filter, it is collimated light beam that microscope group, which is collimated, by the optical beam transformation through needle passing hole, the size of sample to be tested surface hot spot is incident on by iris diaphgram control, the light beam for being incident on sample to be tested surface is scattered through sample to be tested to hemispherical space, the segment beam collection of energy of hemispherical space will be scattered in photodetector by focusing microscope group, photodetector is tilted a certain angle placement, delustring trap is for collecting the specular reflectance beam generated by photodetector window surface, the surface roughness of sample to be tested is obtained through data processing system.The present invention have many advantages, such as it is quick, non-contact, not disfiguring workpiece surface, on-line measurement can be carried out.
Description
Technical field
The invention belongs to carry out accurate measurement technical field of high-precision measurement to surface roughness, and in particular to one kind is based on
The Surface roughness measurement system of optical scattering principle.
Background technology
Surface roughness refers to smaller spacing and small peak valley unevenness that finished surface has.Its two wave crest or two waves
The distance between paddy (pitch of waves) very little, is with the naked eye nondescript, therefore it belongs to microcosmos geometric shape error.Rough surface
Spend smaller, then surface is more smooth.The size of surface roughness has a great impact to the performance of part, such as：Stem-winder
Surface roughness influences fatigue strength, corrosion resistance, wearability, contact stiffness and the measurement accuracy of part, optical lens surface
Roughness influences image quality and system transmitance, therefore, must be carried out in process to element surface roughness accurate
It measures.
Turning optical surface is processed using material removing method, and surface quality plays the optical property of optical system
Vital effect.Machined surface quality includes mainly two aspect contents：The geometrical morphology and skin-material of finished surface
Physical property.Geometrical morphology is by cutting the comprehensive of the factors such as revolution mark, cutting plastic deformation and vibration in process
The cooperation surface texture formed on the surface of the workpiece.Mainly include surface roughness, surface waviness, surface texture direction and
Four aspect content of surface defect, traditional contact measurement method have been widely used by development for many years.But due to its tool
Have and easily scratch measured workpiece surface, measurement efficiency is low, limits its application in precision non-contact measurement direction.In reality
In production, the workpiece needs processed are removed from the process equipments such as lathe, are taken on special test platform to its table
Face pattern carries out off-line measurement, if below standard, need that workpiece is loaded on process equipment again and re-starts processing.
The second order errors such as clamping error can be brought in clamping process, and for complex surface such as free curve surface work pieces, surface is set
Timing inherently will be designed and optimize to machining path, and after workpiece secondary clamping, cutter can not be with original processing road
Diameter coincide, certainly will need carry out secondary operation, increase the probability for error occur and to machined surface quality can not anticipation property.
Meanwhile in the industrial production, repeated clamping can influence process velocity, greatly reduce production efficiency, improve production cost.
In summary, it is necessary to explore a kind of new Surface Roughness Detecting Method, establish it is a set of can to surface roughness into
The system that row accurately measures, i.e. the surface roughness precision detecting system based on optical scattering principle, in process in real time
Element surface roughness is accurately measured online, to preferably solve the practical problem in industrial production.
On-line measurement directly can measure workpiece surface on the processing carriers such as lathe, avoid clamping error,
The error that secondary position error of processing stand etc. is brought by secondary clamping improves processing efficiency, realizes that processing is integrated with detection.
In addition, the measuring system can be also used for gemstone surface, cosmetic effect displaying, Automobile paint and vehicle film surface with
And medicine aspect etc., in short, advancing with laser technology and modern industrial technology, product surface roughness
Ask higher and higher, establishing the detecting system of a set of lossless, accurate measurement surface roughness of energy becomes very urgent.
Invention content
Present invention solves the technical problem that being：A kind of Surface roughness measurement system is provided, optical manufacturing and machinery are solved
Whether its surface roughness meets index request in process.
The technical solution adopted by the present invention is：A kind of Surface roughness measurement system based on optical scattering principle, including
Light source assembles microscope group, pin hole, collimation microscope group, iris diaphgram, sample to be tested, focuses microscope group, photodetector, delustring trap, number
According to processing system.The concentrated microscope group of light wave that light source is sent out is converted into light pencil, and after pinhole filter, collimation microscope group will be through
The optical beam transformation of needle passing hole is collimated light beam, and the size of sample to be tested surface hot spot is incident on by iris diaphgram control, incident
Light beam to sample to be tested surface scatters after sample to be tested surface modulation to hemispherical space, and hemisphere sky will be scattered to by focusing microscope group
Between segment beam collection of energy in photodetector, photodetector is tilted a certain angle placement, and delustring trap is for collecting
Because of the light beam that photodetector window surface mirror-reflection generates, the light energy into photodetector contains sample to be tested table
The Roughness Information in face obtains the roughness of sample to be tested through data processing system.
Wherein, light source is including but not limited to laser light source, LED light source, halogen light source etc..
Wherein, it is incident on that sample to be tested surface incident angle is adjustable, focuses microscope group and collect sample to be tested surface scattering light
Reachable ± 30 degree of range maximum.
Wherein, sample to be tested includes the samples to be tested such as optical element, mechanical organ surface.
Wherein, photodetector is tilted a certain angle placement, and specular light is by disappearing caused by photodetector window
Light trapping removes.
Wherein, which is based on optical scattering principle, can carry out online, quick, contactless nothing to sample to be tested
Damage detection.
Compared with the prior art, the present invention has the following advantages：
1, the system is non-contact detection system, and compared with traditional contact measurement method, which examines in roughness
Examining system surface can be preferably protected during survey.The Surface roughness measurement system is based on optical scattering principle, has fast
It is fast, non-contact, not disfiguring workpiece surface, the advantages that on-line measurement can be carried out.
2, the system is on-line detecting system, and traditional optical interferometer or contourgraph detect sample to be tested surface roughness
When, need to remove workpiece from the machining equipments such as lathe, take on special test platform to its surface roughness into
Row off-line measurement if below standard needs that processing, repeated clamping mistake will be re-started on clamping workpiece to process equipment again
Journey can influence process velocity, greatly reduce production efficiency, improve production cost.
3, the detecting system high certainty of measurement, traditional surface roughness detection method is off-line measurement, in clamping process
Clamping error can be brought, and for complex surface such as free curve surface work pieces, it inherently will be to processing road when designing surface
Diameter is designed and optimizes, and after workpiece secondary clamping, cutter can not coincide with original machining path, certainly will need carry out two
Secondary processing, increase the probability for error occur and to machined surface quality can not anticipation property.
Description of the drawings
Fig. 1 is Surface roughness measurement system schematic diagram；
Fig. 2 is sample to be tested surface light scattering schematic diagram；
Fig. 3 is scattering and spatial position relationship geometric representation；
Label declaration：1- light sources, 2- assemble microscope group, 3- pin holes, 4- collimations microscope group, 5- iris diaphgrams, 6- samples to be tested, 7-
Focus microscope group, 8- photodetectors, 9- delustrings trap, 10- data processing systems, 11- incident beams, 12- the reflected beams, 13-
Scattered beam.
Specific implementation mode
Objects and advantages in order to better illustrate the present invention, the invention will be further described below in conjunction with the accompanying drawings.
Fig. 1 is Surface roughness measurement system schematic diagram, which is based on optical scattering principle, includes mainly light source
1, convergence microscope group 2, pin hole 3, collimation microscope group 4, iris diaphgram 5, sample to be tested 6, focusing microscope group 7, photodetector 8, delustring are fallen into
Trap 9, data processing system 10.The light wave that light source 1 is sent out is converted into light pencil by assembling microscope group 2, is filtered using pin hole 3
Afterwards, the optical beam transformation through needle passing hole 3 is collimated light beam by collimation microscope group 4, and sample to be tested 6 is incident on by the control of iris diaphgram 5
The size of surface hot spot, the light beam for being incident on sample to be tested surface scatter to hemispherical space after sample to be tested surface modulation, gather
Burnt microscope group 7 will scatter to the segment beam collection of energy of hemispherical space in photodetector 8, and photodetector 8 tilts certain angle
Degree is placed, and delustring trap 9 is for collecting the light beam generated by 8 window surface mirror-reflection of photodetector, into photodetection
The light energy of device 8 contains the Roughness Information on 6 surface of sample to be tested, and sample to be tested is obtained after the processing of data processing system 10
Surface roughness.
Light source 1 can be but be not limited to laser light source, LED light source, halogen light source etc..Assemble the light that microscope group 2 sends out light source 1
Beam is converted into light pencil, and the effect of pin hole 3 is filtered to the light pencil of convergence, and size is 10 μm or 20 μm.It is accurate
Straight microscope group 4 will consider that the influence of different optical source wavelengths, effect are by 3 filtered beam shaping of pin hole into collimated light when designing
Beam.Iris diaphgram 5 is to adjust the hot spot caliber size for being incident on 6 surface of sample to be tested, object-side numerical hole when optically focused microscope group 7 designs
Diameter size is 0.5, and to collect the scattered beam that sample to be tested 6 scatters to hemispherical space as much as possible, photodetector 8 is because there is guarantor
Window glass is protected, 8 slant setting of photodetector is utilized delustring trap 9 by the influence to reduce protecting window specular light
The specular light that protecting window is introduced is eliminated, meanwhile, the scattered beam that photodetector 8 collects optically focused microscope group 7 converts
For electric signal, by data processing system 10, to calculate roughness and its distribution on 6 surface of sample to be tested.
Fig. 2 is sample to be tested surface light scattering schematic diagram, when θ is irradiated to sample to be tested 6 to incident beam 11 at a certain angle
When surface, ignore the light energy that surface is absorbed, will largely be reflected, geometrical ray approximatively represents luminous energy into line direction
The direction of propagation of amount, but since surface is there are roughness non-ideal " minute surface ", then will some energy can be with scattering
Form propagate.Simultaneously because the conservation of energy, the energy of reflection will be cut in.Therefore 13 energy of scattered beam and the reflected beams 12
The strength distribution of energy is determined by 6 surface roughness of sample to be tested.When light beam with-determine angle and be incident on rough surface
When upper, incident light is scattered, and a portion scattering light follows geometric optics rule, this some scattered light is minute surface direction, i.e.,
Usually said the reflected beams 12, another part then scatter to all directions in space, as on ordinary meaning described in us
Scattered beam 13.As shown in Fig. 2, according to optical principle, the distribution of scattered light intensity is related with surface roughness, for roughness compared with
The light intensity on small surface, reflected light is stronger, and the scattered light intensity in other directions is weaker, the larger surface reflection light intensity of roughness compared with
It is weak, and the scattered light intensity in other directions is stronger.This phenomenon can qualitatively illustrate rough object surfaces degree and scattered energy it
Between there are certain correspondences.
Fig. 3 is scattering coordinate system schematic diagram, and scattering face element is located in XOY plane, θi、φiIndicate incident light incidence angle and
Azimuth, θs、φsIndicate angle of scattering and the azimuth of scattering light, LsIndicate that the radiance of scattering face element, E indicate scattering face element
Radiant illumination, two-way dispersion distribution function (BSDF) be defined as it is a certain scattering face element at scattering radiance and incident radiation
The ratio of illumination, surface scattering characteristic determined by the ratio is only related with the characteristic of material surface itself, and three-dimensional with receiving
The measurement factor such as angle is unrelated, has at this time：
For body surface in the scattering properties of arbitrary view angle, unit is surface of sphere under the conditions of it indicates different incidence angles
Inverse (sr-1)。
Full integral scattering (TIS) is double integrals of the BSDF in hemispherical space, and expression formula is as follows：
The relationship between integral scattering (TIS) and rms surface roughness σ is entirely：
In above formula, σ indicates that sample to be tested surface roughness, λ indicate optical source wavelength, thus acquire, sample to be tested surface is thick
Relationship between pol σ and TIS is：
What the present invention was not disclosed in detail partly belongs to techniques known.
Those of ordinary skill in the art it should be appreciated that more than embodiment be intended merely to illustrate the present invention,
And be not used as changing embodiment described above as long as in the spirit of the present invention for limitation of the invention,
Modification will all be fallen in the range of claims of the present invention.
Claims (6)
1. a kind of Surface roughness measurement system based on optical scattering principle, it is characterised in that：The detecting system include light source,
Assemble microscope group, pin hole, collimation microscope group, iris diaphgram, sample to be tested, focus microscope group, photodetector, delustring trap, at data
Reason system；The light wave that light source is sent out is converted into light pencil by assembling microscope group, then after pinhole filter, and collimation microscope group will pass through needle
The optical beam transformation in hole is collimated light beam, and the size of sample to be tested surface hot spot is incident on by iris diaphgram control, is incident on and waits for
The light beam on sample surface is scattered through sample to be tested to hemispherical space, focuses the segment beam energy that microscope group will scatter to hemispherical space
Amount is collected in photodetector, and photodetector is tilted a certain angle placement, and delustring trap is for collecting because of photodetector window
Discharge surface generate specular reflectance beam, enter by sample to be tested surface modulation photodetector light energy contain it is to be measured
The Roughness Information of sample surfaces obtains the surface roughness of sample to be tested through data processing system.
2. the Surface roughness measurement system according to claim 1 based on optical scattering principle, it is characterised in that：Light source
Including but not limited to laser light source, LED light source, halogen light source.
3. the Surface roughness measurement system according to claim 1 based on optical scattering principle, it is characterised in that：It is incident
It is adjustable to sample to be tested surface incident angle, focus the range maximum reachable ± 30 that microscope group collects sample to be tested surface scattering light
Degree.
4. the Surface roughness measurement system according to claim 1 based on optical scattering principle, it is characterised in that：It is to be measured
Sample includes the sample to be tested surface of optical element, mechanical organ.
5. the Surface roughness measurement system according to claim 1 based on optical scattering principle, it is characterised in that：Photoelectricity
Detector is tilted a certain angle placement, and specular light is removed by delustring trap caused by photodetector window.
6. the Surface roughness measurement system according to claim 1 based on optical scattering principle, it is characterised in that：The inspection
Examining system is based on optical scattering principle, can carry out online, quick, contactless non-destructive testing to sample to be tested.
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| CN201810330036.4A CN108662993A (en) | 2018-04-13 | 2018-04-13 | A kind of Surface roughness measurement system based on optical scattering principle |
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| CN201810330036.4A CN108662993A (en) | 2018-04-13 | 2018-04-13 | A kind of Surface roughness measurement system based on optical scattering principle |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110341160A (en) * | 2019-07-31 | 2019-10-18 | 汕头市金明塑料无结网制品有限公司 | A kind of web material is tied knots wrap-up |
| CN111156932A (en) * | 2020-03-10 | 2020-05-15 | 凌云光技术集团有限责任公司 | Mirror surface material roughness detection device |
| CN111707221A (en) * | 2020-06-29 | 2020-09-25 | 西安工业大学 | Multi-exposure scattering signal fusion surface roughness measurement method |
| CN113048921A (en) * | 2021-03-24 | 2021-06-29 | 长江存储科技有限责任公司 | Method and system for measuring surface roughness of wafer |
| WO2021255793A1 (en) * | 2020-06-14 | 2021-12-23 | マシンビジョンライティング株式会社 | Illumination device for inspection and measurement, inspection and measurement system, and inspection and measurement method |
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| CN110341160B (en) * | 2019-07-31 | 2024-05-14 | 汕头市金明塑料无结网制品有限公司 | Net material rope winding device |
| CN110341160A (en) * | 2019-07-31 | 2019-10-18 | 汕头市金明塑料无结网制品有限公司 | A kind of web material is tied knots wrap-up |
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| CN114144661A (en) * | 2020-06-14 | 2022-03-04 | 机械视觉照明有限公司 | Lighting device for inspection and measurement, inspection and measurement system, and inspection and measurement method |
| CN111707221B (en) * | 2020-06-29 | 2021-11-16 | 西安工业大学 | Multi-exposure scattering signal fusion surface roughness measurement method |
| CN111707221A (en) * | 2020-06-29 | 2020-09-25 | 西安工业大学 | Multi-exposure scattering signal fusion surface roughness measurement method |
| CN113048921A (en) * | 2021-03-24 | 2021-06-29 | 长江存储科技有限责任公司 | Method and system for measuring surface roughness of wafer |
| CN114203503A (en) * | 2021-12-03 | 2022-03-18 | 南开大学 | E-T detector for ultrafast scanning secondary electron imaging |
| CN114674372A (en) * | 2022-04-11 | 2022-06-28 | 自然资源部珠宝玉石首饰管理中心北京珠宝研究所 | Pearl multi-grading parameter synchronous measurement device and method based on multi-azimuth observation |
| CN116772757A (en) * | 2023-08-21 | 2023-09-19 | 国镓芯科(成都)半导体科技有限公司 | Be used for semiconductor processing finished product measurement system |
| CN116772757B (en) * | 2023-08-21 | 2023-10-24 | 国镓芯科(成都)半导体科技有限公司 | Be used for semiconductor processing finished product measurement system |
| CN116858811A (en) * | 2023-09-05 | 2023-10-10 | 成都速派光学技术有限公司 | High dynamic range precision scattering characteristic measuring equipment |
| CN116858811B (en) * | 2023-09-05 | 2023-11-21 | 成都速派光学技术有限公司 | High dynamic range precision scattering characteristic measuring equipment |
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Application publication date: 20181016 |