CN100385224C - Bipoint-source interference detection method and device of spherical reflection mirror - Google Patents
Bipoint-source interference detection method and device of spherical reflection mirror Download PDFInfo
- Publication number
- CN100385224C CN100385224C CNB2005101206638A CN200510120663A CN100385224C CN 100385224 C CN100385224 C CN 100385224C CN B2005101206638 A CNB2005101206638 A CN B2005101206638A CN 200510120663 A CN200510120663 A CN 200510120663A CN 100385224 C CN100385224 C CN 100385224C
- Authority
- CN
- China
- Prior art keywords
- spherical reflector
- mirror
- spherical
- double point
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention relates to a detecting method for the double point source interference of spherical-surface reflecting mirrors and the devices thereof. The detecting method comprises procedures of the obtainment of parallel light, the selection of double point sources, the return of a light beam by plane reflection, the return of the light beam by spherical-surface reflection, the output of the returned light beam and the error detection of spherical-surface reflecting mirrors. The devices used by the method comprise a light source, a light beam processor, a grating, a convex lens, a transparent inverse plane mirror, a spatial filter, a small plane reflecting mirror, an installation adjusting platform of the spherical-surface reflecting mirrors, an image screen and a video camera. The devices are arranged on a device clamping and adjusting device. The detecting method for the double point source interference of spherical-surface reflecting mirrors and the devices thereof have the advantages of high precision, small sensitivity to vibration, temperature and airflow, high stability, easy operation and capability of generalization and application.
Description
Technical field
The present invention relates to optical devices, specifically is a kind of double point source interference detection method of spherical reflector;
The invention still further relates to the double point source interference checking device of a kind of spherical reflector of realizing described method.
Background technology
Spherical reflector is the optical device of using always, is widely used at aspects such as uranology, optics and instrument and meters.Spherical reflector needs that before application it is carried out mismachining tolerance and detects and quality assessment, at present, known interference detection method has Michelson (Michelson) interferometer, horse-once (Mach-Zehnder) interferometer and Tai Man-Green's (Twyman-Green) interferometer and striking rope (Fizeau) interferometer etc.
(Mach-Zehnder) interferometer of Michelson (Michelson) interferometer, horse-once and Tai Man-Green (Twyman-Green) interferometer need adopt two optical arms, it is comparatively responsive to vibration, temperature, air-flow etc., stability is bad, and the light path complexity is regulated and operation with being difficult to; Fei Suo (Fizeau) interferometer need adopt the parallel glass flat board of high-quality standard spherical lens or standard, applies being restricted.
Summary of the invention
The object of the present invention is to provide a kind of double point source interference detection method of spherical reflector, overcome deficiency of the prior art, realize detection middle-size and small-size concave spherical mirror.
Another object of the present invention is to provide the double point source interference checking device of a kind of spherical reflector of realizing described method.
The double point source interference detection method of a kind of spherical reflector of the present invention comprises the steps:
(1) obtains directional light:, make it form a branch of directional light through the parallel beam treating apparatus by light emitted one monochromic beam;
(2) select double point source: the directional light that is obtained is formed the great luminous point of a row by grating and convex lens on its focal plane, select wherein two very big luminous points, be double point source with spatial filter;
(3) light beam returns through plane reflection: the facet catoptron is placed the focal plane position of above-mentioned convex lens, and the light beam that a luminous point in the above-mentioned double point source is sent returns by original optical path after the facet mirror reflects;
(4) light beam returns through spheric reflection: spherical reflector to be measured is placed after the described facet catoptron, equal the radius-of-curvature of spherical reflector to be measured with its distance, the light beam that makes another luminous point in the above-mentioned double point source send returns by original optical path after spheric reflection mirror reflection to be measured;
(5) Returning beam output: saturating antiplane mirror is placed between above-mentioned convex lens and the spatial filter, and the feasible light beam that returns through step (3), step (4) is exported interference fringe a long way off through saturating antiplane mirror;
(6) spherical reflector error-detecting: receive the above-mentioned interference striped with image received device, analyze the distribution and the distortion situation thereof of interference fringe, draw the control information of spherical reflector to be measured.
Preferred version is as follows:
Described light source is produced by the laser instrument of coherent length greater than the diameter of spherical reflector to be measured.
Cooperate the acquisition double point source with grating and convex lens by two apertures on the described spatial filter.
Realize the inventive method a kind of spherical reflector the double point source interference checking device by light source, parallel beam treating apparatus, grating, convex lens, saturating antiplane mirror, spatial filter, facet catoptron, spherical reflector install regulate platform, as screen and video camera, the device holding adjuster constitutes, and described light source, parallel beam treating apparatus, grating, convex lens, saturating antiplane mirror, spatial filter, facet catoptron, spherical reflector are installed and regulated platform, image received device is installed on the device holding adjuster successively.
Preferred version is as follows:
Described parallel beam treating apparatus is made of beam expanding lens or short focal length lens, pinhole filter and collimation lens, and wherein, pinhole filter places between beam expanding lens, the collimation lens.
Described facet catoptron is the completely reflecting mirror with optical axis direction and corner fine setting.
Described antiplane mirror be thickness and refractive index evenly, saturating reflectance be 1: 1, with the saturating antiplane mirrors of optical axis angle less than 45 degree.
Described image received device comprises picture screen and ccd video camera.
Described device holding adjuster is made of base, the holding frame that is used for fixing device, and described holding frame is installed on the base that can move forward and backward.
Compared with prior art, advantage of the present invention is:
(1) the double point source interference detection method of spherical reflector of the present invention does not need production standard spherical mirror and standard parallel glass flat board, and light path is simple, and is easy to adjust, is easy to realize;
(2) the double point source interference checking device sound construction of spherical reflector of the present invention, insensitive to vibration, temperature and variations in flow, interference fringe is reliable and stable, and fringe period changes easily;
(3) the double point source interference detection method of spherical reflector of the present invention also is applicable to the inspection of concave spherical surface lens, precision height.
Description of drawings
Fig. 1 is the structural representation of the double point source interference checking device of spherical reflector of the present invention.
Embodiment
Be an embodiment of double point source interference checking device of the present invention below, the present invention is not limited only to this.
Among the embodiment as shown in Figure 1, light source 1, beam expanding lens 2, pinhole filter 3, collimation lens 4, quasi-optical grid 12, convex lens 5, saturating antiplane mirror 6, spatial filter 7, facet catoptron 8, spherical reflector are installed and are regulated platform 9, picture screen 10, ccd video camera 11 is installed on the device holding adjuster successively.
Described light source 1 is selected the He-Ne laser instrument for use, described beam expanding lens 2 is selected the monolithic lenslet for use, described pinhole filter 3 is that to beat diameter on a ferrous metal sheet be 10 to 50 microns aperture, described convex lens 5 are selected the employing Fourier transform lens for use, described antiplane mirror 6 is selected beam splitter for use, described spatial filter 7 is selected the binary amplitude wave filter for use, make by two holes of sheet metal at coating black, only allow two very big luminous points pass through, described facet catoptron 8 is made by metal-coated membrane on the glass substrate or deielectric-coating, described picture screen 10 is selected frosted glass for use, and described grating 12 is selected the RONCHI grating for use.
During testing, earlier spherical reflector to be measured is installed in spherical reflector adjusting platform 9 is installed, follow these steps to operation:
(1) opens light source 1, regulate the position between pinhole filter 3 and the beam expanding lens 2, obtain a branch of hot spot evenly and do not have the parasitic light spherical wave, through a branch of plane parallel light of collimation lens 4 formation;
(2) regulate grating and convex lens, make the directional light that is obtained on the focal plane, form the great luminous point of a row, regulate spatial filter and select two very big luminous points in focal plane position through grating and convex lens;
(3) regulate the facet catoptron in the focal plane position of above-mentioned convex lens, the light beam that a luminous point is wherein sent returns by original optical path after the facet mirror reflects;
(4) distance of adjusting spherical reflector to be measured and above-mentioned facet catoptron equals the radius-of-curvature of spherical reflector to be measured, and the light beam that makes another luminous point send returns by original optical path after spheric reflection mirror reflection to be measured;
(5) position of the saturating antiplane mirror of adjusting, the feasible light beam that returns through step (3), step (4) is exported interference fringe a long way off through saturating antiplane mirror;
(6) with picture screen and ccd video camera reception above-mentioned interference striped, the cycle of recording interference fringe and deformation displacement amount detect the precision of spherical reflector to be measured by calculating;
Described computing formula is: a=(b/d) * λ/2, and a is the difference in height of spherical reflector to be measured part in the formula, and d and b are respectively the cycle and the deformation displacement amount of interference fringe, and λ is an optical source wavelength.
Detection shows: the precision of the inventive method and measurement device spherical reflector local height difference reaches λ/40.
Claims (9)
1. the double point source interference detection method of a spherical reflector is characterized in that comprising the steps:
(1) obtains directional light:, make it form a branch of directional light through the parallel beam treating apparatus by light emitted one monochromic beam;
(2) select double point source: the directional light that is obtained is formed the great luminous point of a row by grating and convex lens on its focal plane, select wherein two very big luminous points, be double point source with spatial filter;
(3) light beam returns through plane reflection: the facet catoptron is placed the focal plane position of above-mentioned convex lens, and the light beam that a luminous point in the above-mentioned double point source is sent returns by original optical path after the facet mirror reflects;
(4) light beam returns through spheric reflection: spherical reflector to be measured is placed after the described facet catoptron, equal the radius-of-curvature of spherical reflector to be measured with its distance, the light beam that makes another luminous point in the above-mentioned double point source send returns by original optical path after spheric reflection mirror reflection to be measured;
(5) Returning beam output: saturating antiplane mirror is placed between above-mentioned convex lens and the spatial filter, and the feasible light beam that returns through step (3), step (4) is exported interference fringe a long way off through saturating antiplane mirror;
(6) spherical reflector error-detecting: receive the above-mentioned interference striped with image received device, analyze the distribution and the distortion situation thereof of interference fringe, draw the control information of spherical reflector to be measured.
2. detection method according to claim 1 is characterized in that described light source is produced by the laser instrument of coherent length greater than the diameter of spherical reflector to be measured.
3. detection method according to claim 1 and 2 is characterized in that cooperating the acquisition double point source with grating and convex lens by two apertures on the described spatial filter.
4. realize the double point source interference checking device of a kind of spherical reflector of one of claim 1-3 described method, it is characterized in that by light source, the parallel beam treating apparatus, grating, convex lens, saturating antiplane mirror, spatial filter, the facet catoptron, spherical reflector is installed and is regulated platform, picture screen and video camera, the device holding adjuster constitutes, described light source, the parallel beam treating apparatus, grating, convex lens, saturating antiplane mirror, spatial filter, the facet catoptron, spherical reflector is installed and is regulated platform, image received device is installed on the device holding adjuster successively.
5. device according to claim 4 is characterized in that described parallel beam treating apparatus is made of beam expanding lens, pinhole filter and collimation lens, and wherein, pinhole filter places between beam expanding lens, the collimation lens.
6. according to claim 4 or 5 described devices, it is characterized in that described facet catoptron is the completely reflecting mirror with optical axis direction and corner fine setting.
7. device according to claim 6, it is characterized in that described antiplane mirror be thickness and refractive index evenly, saturating reflectance be 1: 1, with the saturating antiplane mirrors of optical axis angle less than 45 degree.
8. device according to claim 7 is characterized in that described image received device comprises picture screen and ccd video camera.
9. device according to claim 8 is characterized in that described device holding adjuster is made of base, the holding frame that is used for fixing device, and described holding frame is installed on the base that can move forward and backward.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101206638A CN100385224C (en) | 2005-12-16 | 2005-12-16 | Bipoint-source interference detection method and device of spherical reflection mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005101206638A CN100385224C (en) | 2005-12-16 | 2005-12-16 | Bipoint-source interference detection method and device of spherical reflection mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1793812A CN1793812A (en) | 2006-06-28 |
| CN100385224C true CN100385224C (en) | 2008-04-30 |
Family
ID=36805384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005101206638A Expired - Fee Related CN100385224C (en) | 2005-12-16 | 2005-12-16 | Bipoint-source interference detection method and device of spherical reflection mirror |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100385224C (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101986097B (en) * | 2010-07-09 | 2011-12-21 | 浙江大学 | Method for eliminating defocusing error and tilt error in spherical surface shape interference detection at high precision |
| CN102207378B (en) * | 2011-03-09 | 2012-11-14 | 浙江大学 | High-precision adjustment error correction method based on wavefront difference in spherical interference detection |
| CN102288392A (en) * | 2011-07-29 | 2011-12-21 | 温州医学院 | Two-dimensional Ronchi grating-based freeform surface spectacle lens focal power measuring device |
| CN111650100A (en) * | 2020-06-16 | 2020-09-11 | 辽东学院 | Particle size measuring equipment based on Mie's scattering theory |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1193728A (en) * | 1998-01-21 | 1998-09-23 | 浙江大学 | Laser double focus interfering spherical contourgraph |
| CN2418461Y (en) * | 1999-09-30 | 2001-02-07 | 中国科学院长春光学精密机械研究所 | Double-optical-path optical-reflection method end-point detection apparatus |
| CN2513076Y (en) * | 2001-12-18 | 2002-09-25 | 中国科学院长春光学精密机械与物理研究所 | Convex non-spherical surface detection interferometer |
| CN1447111A (en) * | 2003-01-23 | 2003-10-08 | 华南师范大学 | Method for measuring refractive index of thin film and its device |
| DE10223581A1 (en) * | 2002-05-28 | 2003-12-18 | Dioptic Gmbh | Interferometric testing of curved, spherical and aspherical, reflective surfaces using an interferometer and a diffractive optical element, with the latter generating a reference wave and a measurement wave |
| CN2622670Y (en) * | 2003-05-30 | 2004-06-30 | 成都太科光电技术有限责任公司 | Globoid interfrometer |
| CN1529120A (en) * | 2003-10-08 | 2004-09-15 | ����ʦ����ѧ | Small-sized on-line radical shear interferometer and its aspheric surface measuring method |
-
2005
- 2005-12-16 CN CNB2005101206638A patent/CN100385224C/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1193728A (en) * | 1998-01-21 | 1998-09-23 | 浙江大学 | Laser double focus interfering spherical contourgraph |
| CN2418461Y (en) * | 1999-09-30 | 2001-02-07 | 中国科学院长春光学精密机械研究所 | Double-optical-path optical-reflection method end-point detection apparatus |
| CN2513076Y (en) * | 2001-12-18 | 2002-09-25 | 中国科学院长春光学精密机械与物理研究所 | Convex non-spherical surface detection interferometer |
| DE10223581A1 (en) * | 2002-05-28 | 2003-12-18 | Dioptic Gmbh | Interferometric testing of curved, spherical and aspherical, reflective surfaces using an interferometer and a diffractive optical element, with the latter generating a reference wave and a measurement wave |
| CN1447111A (en) * | 2003-01-23 | 2003-10-08 | 华南师范大学 | Method for measuring refractive index of thin film and its device |
| CN2622670Y (en) * | 2003-05-30 | 2004-06-30 | 成都太科光电技术有限责任公司 | Globoid interfrometer |
| CN1529120A (en) * | 2003-10-08 | 2004-09-15 | ����ʦ����ѧ | Small-sized on-line radical shear interferometer and its aspheric surface measuring method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1793812A (en) | 2006-06-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4869593A (en) | Interferometric surface profiler | |
| JP4312602B2 (en) | Aspheric and wavefront scanning interferometers | |
| CN101788263B (en) | Coaxial Fizeau synchronous phase shifting interferometer capable of adjusting extended light illumination | |
| WO2003001143A2 (en) | Apparatus and method for measuring aspherical optical surfaces and wavefronts | |
| CN108761602B (en) | Adjusting method for auto-collimation of interference light path in holographic grating photoetching system | |
| CN109211934A (en) | Based on interference micro- microballoon planar defect detection device and its detection method | |
| CN110763159B (en) | Optical deflection microscopic surface measuring device and method | |
| CN110057543B (en) | Wave surface measuring device based on coaxial interference | |
| CN100383606C (en) | Method and device for accurately determining optical system focus plane by interferometer | |
| CN100385224C (en) | Bipoint-source interference detection method and device of spherical reflection mirror | |
| TW561277B (en) | Method of aligning optical system using hologram and apparatus thereof | |
| US10989524B2 (en) | Asymmetric optical interference measurement method and apparatus | |
| CN109580182B (en) | Method and device for measuring refractive index of curved optical element based on Brewster's law | |
| JP4667965B2 (en) | Light beam measuring device | |
| CN110631510B (en) | High-precision angle measuring device and method based on Michelson structure | |
| JP5353708B2 (en) | Interferometer | |
| CN109458959A (en) | A kind of change inclination angle phase shift grazing-incidence interferometer measuring device and method | |
| Chatterjee et al. | Measurement of residual wedge angle with a reversal shear interferometer | |
| US5929992A (en) | Compact interferometric test system for ellipses | |
| CN112504164A (en) | Measuring device and method capable of dynamically measuring surface shape of planar optical element | |
| JP4007473B2 (en) | Wavefront shape measurement method | |
| CN105910630B (en) | Optical path difference measurement method and its device based on the modulation of space optical path difference | |
| Scholz et al. | Concept for improving the form measurement results of aspheres and freeform surfaces in a tilted-wave interferometer | |
| CN118129627B (en) | High-sensitivity mirror deformation measurement system and method based on speckle interference | |
| JP2000088546A (en) | Apparatus and method of measuring shape |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |