CN1793812A - Bipoint-source interference detection method and device of spherical reflection mirror - Google Patents
Bipoint-source interference detection method and device of spherical reflection mirror Download PDFInfo
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- CN1793812A CN1793812A CN 200510120663 CN200510120663A CN1793812A CN 1793812 A CN1793812 A CN 1793812A CN 200510120663 CN200510120663 CN 200510120663 CN 200510120663 A CN200510120663 A CN 200510120663A CN 1793812 A CN1793812 A CN 1793812A
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Abstract
A method for detecting double - point source interference of spherical reflector includes obtaining parallel light, selecting out double - point source, returning light beam back through planar reflection, returning light beam back through spherical reflection, outputting returned back light beams and carrying out error detection of spherical reflector. The device for realizing said method is also disclosed.
Description
Technical field
The present invention relates to optical devices, specifically is a kind of double point source interference detection method of spherical reflector;
The invention still further relates to the double point source interference checking device of a kind of spherical reflector of realizing described method.
Background technology
Spherical reflector is the optical device of using always, is widely used at aspects such as uranology, optics and instrument and meters.Spherical reflector needs that before application it is carried out mismachining tolerance and detects and quality assessment, at present, known interference detection method has Michelson (Michelson) interferometer, horse-once (Mach-Zehnder) interferometer and Tai Man-Green's (Twyman-Green) interferometer and striking rope (Fizeau) interferometer etc.
(Mach-Zehnder) interferometer of Michelson (Michelson) interferometer, horse-once and Tai Man-Green (Twyman-Green) interferometer need adopt two optical arms, it is comparatively responsive to vibration, temperature, air-flow etc., stability is bad, and the light path complexity is regulated and operation with being difficult to; Fei Suo (Fizeau) interferometer need adopt the parallel glass flat board of high-quality standard spherical lens or standard, applies being restricted.
Summary of the invention
The object of the present invention is to provide a kind of double point source interference detection method of spherical reflector, overcome deficiency of the prior art, realize detection middle-size and small-size concave spherical mirror.
Another object of the present invention is to provide the double point source interference checking device of a kind of spherical reflector of realizing described method.
The double point source interference detection method of a kind of spherical reflector of the present invention comprises the steps:
(1) obtains directional light:, make it form a branch of directional light through the parallel beam treating apparatus by light emitted one monochromic beam;
(2) select double point source: the directional light that is obtained is formed the great luminous point of a row by grating and convex lens on its focal plane, select wherein two very big luminous points, be double point source with spatial filter;
(3) light beam returns through plane reflection: the facet catoptron is placed the focal plane position of above-mentioned convex lens, and the light beam that a luminous point in the above-mentioned double point source is sent returns by original optical path after the facet mirror reflects;
(4) light beam returns through spheric reflection: spherical reflector to be measured is placed after the described facet catoptron, equal the radius-of-curvature of spherical reflector to be measured with its distance, the light beam that makes another luminous point in the above-mentioned double point source send returns by original optical path after spheric reflection mirror reflection to be measured;
(5) Returning beam output: saturating antiplane mirror is placed between above-mentioned convex lens and the spatial filter, and the feasible light beam that returns through step (3), step (4) is exported interference fringe a long way off through saturating antiplane mirror;
(6) spherical reflector error-detecting: receive the above-mentioned interference striped with image received device, analyze the distribution and the distortion situation thereof of interference fringe, draw the control information of spherical reflector to be measured.
Preferred version is as follows:
Described light source is produced by the laser instrument of coherent length greater than the diameter of spherical reflector to be measured.
Cooperate the acquisition double point source with grating and convex lens by two apertures on the described spatial filter.
Realize the method for the invention a kind of spherical reflector the double point source interference checking device by light source, beam treatment device, grating, convex lens, saturating antiplane mirror, spatial filter, facet catoptron, spherical reflector install regulate platform, as screen and video camera, the device holding adjuster constitutes, and described light source, parallel beam treating apparatus, grating, convex lens, saturating antiplane mirror, spatial filter, facet catoptron, spherical reflector are installed and regulated platform, image received device is installed on the device holding adjuster successively.
Preferred version is as follows:
Described parallel beam treating apparatus is made of beam expanding lens or short focal length lens, pinhole filter and collimation lens, and wherein, pinhole filter places between beam expanding lens, the collimation lens.
Described facet catoptron is the completely reflecting mirror with optical axis direction and corner fine setting.
Described antiplane mirror be thickness and refractive index evenly, saturating reflectance be 1: 1, with the saturating antiplane mirrors of optical axis angle less than 45 degree.
Described image received device comprises picture screen and ccd video camera.
Described device holding adjuster is made of base, the holding frame that is used for fixing device, and described holding frame is installed on the base that can move forward and backward.
Compared with prior art, advantage of the present invention is:
(1) the double point source interference detection method of spherical reflector of the present invention does not need production standard spherical mirror and standard parallel glass flat board, and light path is simple, and is easy to adjust, is easy to realize;
(2) the double point source interference checking device sound construction of spherical reflector of the present invention, insensitive to vibration, temperature and variations in flow, interference fringe is reliable and stable, and fringe period changes easily;
(3) the double point source interference detection method of spherical reflector of the present invention also is applicable to the inspection of concave spherical surface lens, precision height.
Description of drawings
Fig. 1 is the structural representation of the double point source interference checking device of spherical reflector of the present invention.
Embodiment
Be an embodiment of double point source interference checking device of the present invention below, the present invention is not limited only to this.
Among the embodiment as shown in Figure 1, light source 1, beam expanding lens 2, pinhole filter 3, collimation lens 4, quasi-optical grid 12, convex lens 5, saturating antiplane mirror 6, spatial filter 7, facet catoptron 8, spherical reflector are installed and are regulated platform 9, picture screen 10, ccd video camera 11 is installed on the device holding adjuster successively.
Described light source 1 is selected the He-Ne laser instrument for use, described beam expanding lens 2 is selected the monolithic lenslet for use, described pinhole filter 3 is that to beat diameter on a ferrous metal sheet be 10 to 50 microns aperture, described convex lens 5 are selected the employing Fourier transform lens for use, described antiplane mirror 6 is selected beam splitter for use, described spatial filter 7 is selected the binary amplitude wave filter for use, make by two holes of sheet metal at coating black, only allow two very big luminous points pass through, described facet catoptron 8 is made by metal-coated membrane on the glass substrate or deielectric-coating, described picture screen 10 is selected frosted glass for use, and described grating 12 is selected the RONCHI grating for use.
During testing, earlier spherical reflector to be measured is installed in spherical reflector adjusting platform 9 is installed, follow these steps to operation:
(1) opens light source 1, regulate the position between pinhole filter 3 and the beam expanding lens 2, obtain a branch of hot spot evenly and do not have the parasitic light spherical wave, through a branch of plane parallel light of collimation lens 4 formation;
(2) regulate grating and convex lens, make the directional light that is obtained on the focal plane, form the great luminous point of a row, regulate spatial filter and select two very big luminous points in focal plane position through grating and convex lens;
(3) regulate the facet catoptron in the focal plane position of above-mentioned convex lens, the light beam that a luminous point is wherein sent returns by original optical path after the facet mirror reflects;
(4) distance of adjusting spherical reflector to be measured and above-mentioned facet catoptron equals the radius-of-curvature of spherical reflector to be measured, and the light beam that makes another luminous point send returns by original optical path after spheric reflection mirror reflection to be measured;
(5) position of the saturating antiplane mirror of adjusting, the feasible light beam that returns through step (3), step (4) is exported interference fringe a long way off through saturating antiplane mirror;
(6) with picture screen and ccd video camera reception above-mentioned interference striped, the cycle of recording interference fringe and deformation displacement amount detect the precision of spherical reflector to be measured by calculating;
Described computing formula is: a=(b/d) * λ/2, and a is the difference in height of spherical reflector to be measured part in the formula, and d and b are respectively the cycle and the deformation displacement amount of interference fringe, and λ is an optical source wavelength.Detection shows: the precision of the inventive method and measurement device spherical reflector local height difference reaches λ/40.
Claims (9)
1, a kind of double point source interference detection method of spherical reflector is characterized in that comprising the steps:
(1) obtains directional light:, make it form a branch of directional light through the parallel beam treating apparatus by light emitted one monochromic beam;
(2) select double point source: the directional light that is obtained is formed the great luminous point of a row by grating and convex lens on its focal plane, select wherein two very big luminous points, be double point source with spatial filter;
(3) light beam returns through plane reflection: the facet catoptron is placed the focal plane position of above-mentioned convex lens, and the light beam that a luminous point in the above-mentioned double point source is sent returns by original optical path after the facet mirror reflects;
(4) light beam returns through spheric reflection: spherical reflector to be measured is placed after the described facet catoptron, equal the radius-of-curvature of spherical reflector to be measured with its distance, the light beam that makes another luminous point in the above-mentioned double point source send returns by original optical path after spheric reflection mirror reflection to be measured;
(5) Returning beam output: saturating antiplane mirror is placed between above-mentioned convex lens and the spatial filter, and the feasible light beam that returns through step (3), step (4) is exported interference fringe a long way off through saturating antiplane mirror;
(6) spherical reflector error-detecting: receive the above-mentioned interference striped with image received device, analyze the distribution and the distortion situation thereof of interference fringe, draw the control information of spherical reflector to be measured.
2, detection method according to claim 1 is characterized in that described light source is produced by the laser instrument of coherent length greater than the diameter of spherical reflector to be measured.
3, detection method according to claim 1 and 2 is characterized in that cooperating the acquisition double point source with grating and convex lens by two apertures on the described spatial filter.
4, realize the double point source interference checking device of a kind of spherical reflector of one of claim 1-3 described method, it is characterized in that by light source, the beam treatment device, grating, convex lens, saturating antiplane mirror, spatial filter, the facet catoptron, spherical reflector is installed and is regulated platform, picture screen and video camera, the device holding adjuster constitutes, described light source, the parallel beam treating apparatus, grating, convex lens, saturating antiplane mirror, spatial filter, the facet catoptron, spherical reflector is installed and is regulated platform, image received device is installed on the device holding adjuster successively.
5, device according to claim 4 is characterized in that described parallel beam treating apparatus is made of beam expanding lens or short focal length lens, pinhole filter and collimation lens, and wherein, pinhole filter places between beam expanding lens, the collimation lens.
6,, it is characterized in that described facet catoptron is the completely reflecting mirror with optical axis direction and corner fine setting according to claim 4 or 5 described devices.
7, device according to claim 6, it is characterized in that described antiplane mirror be thickness and refractive index evenly, saturating reflectance be 1: 1, with the saturating antiplane mirrors of optical axis angle less than 45 degree.
8, device according to claim 7 is characterized in that described image received device comprises picture screen and ccd video camera.
9, device according to claim 8 is characterized in that described device holding adjuster is made of base, the holding frame that is used for fixing device, and described holding frame is installed on the base that can move forward and backward.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005101206638A CN100385224C (en) | 2005-12-16 | 2005-12-16 | Bipoint-source interference detection method and device of spherical reflection mirror |
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| CNB2005101206638A CN100385224C (en) | 2005-12-16 | 2005-12-16 | Bipoint-source interference detection method and device of spherical reflection mirror |
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| CN1793812A true CN1793812A (en) | 2006-06-28 |
| CN100385224C CN100385224C (en) | 2008-04-30 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101986097A (en) * | 2010-07-09 | 2011-03-16 | 浙江大学 | Method for eliminating defocusing error and tilt error in spherical surface shape interference detection at high precision |
| CN102207378A (en) * | 2011-03-09 | 2011-10-05 | 浙江大学 | High-precision adjustment error correction method based on wavefront difference in spherical interference detection |
| CN102288392A (en) * | 2011-07-29 | 2011-12-21 | 温州医学院 | Two-dimensional Ronchi grating-based freeform surface spectacle lens focal power measuring device |
| CN111650100A (en) * | 2020-06-16 | 2020-09-11 | 辽东学院 | Particle size measuring equipment based on Mie's scattering theory |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1060268C (en) * | 1998-01-21 | 2001-01-03 | 浙江大学 | Laser double focus interfering spherical contourgraph |
| CN2418461Y (en) * | 1999-09-30 | 2001-02-07 | 中国科学院长春光学精密机械研究所 | Double-optical-path optical-reflection method end-point detection apparatus |
| CN2513076Y (en) * | 2001-12-18 | 2002-09-25 | 中国科学院长春光学精密机械与物理研究所 | Convex non-spherical surface detection interferometer |
| DE10223581B4 (en) * | 2002-05-28 | 2004-06-03 | Dioptic Gmbh | Interferometric inspection system for curved surfaces |
| CN1182384C (en) * | 2003-01-23 | 2004-12-29 | 华南师范大学 | Method for measuring refractive index of thin film and its device |
| CN2622670Y (en) * | 2003-05-30 | 2004-06-30 | 成都太科光电技术有限责任公司 | Globoid interfrometer |
| CN1280604C (en) * | 2003-10-08 | 2006-10-18 | 南京师范大学 | Small-sized on-line radical shear interferometer and its aspheric surface measuring method |
-
2005
- 2005-12-16 CN CNB2005101206638A patent/CN100385224C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101986097A (en) * | 2010-07-09 | 2011-03-16 | 浙江大学 | Method for eliminating defocusing error and tilt error in spherical surface shape interference detection at high precision |
| CN102207378A (en) * | 2011-03-09 | 2011-10-05 | 浙江大学 | High-precision adjustment error correction method based on wavefront difference in spherical interference detection |
| CN102207378B (en) * | 2011-03-09 | 2012-11-14 | 浙江大学 | High-precision adjustment error correction method based on wavefront difference in spherical interference detection |
| CN102288392A (en) * | 2011-07-29 | 2011-12-21 | 温州医学院 | Two-dimensional Ronchi grating-based freeform surface spectacle lens focal power measuring device |
| CN111650100A (en) * | 2020-06-16 | 2020-09-11 | 辽东学院 | Particle size measuring equipment based on Mie's scattering theory |
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| CN100385224C (en) | 2008-04-30 |
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