CN2513076Y

CN2513076Y - Convex non-spherical surface detection interferometer

Info

Publication number: CN2513076Y
Application number: CN 01272267
Authority: CN
Inventors: 李凤有; 卢振武
Original assignee: Changchun Institute of Optics Fine Mechanics and Physics of CAS
Current assignee: Changchun Institute of Optics Fine Mechanics and Physics of CAS
Priority date: 2001-12-18
Filing date: 2001-12-18
Publication date: 2002-09-25
Anticipated expiration: 2011-12-18

Abstract

The utility model relates to a convex non-spherical surface detection interferometer, belonging to an inspection machine for convex non-spherical surface forming in the optical detection technical field. The technical problem to be solved is that: can detect the large curvature convex non-spherical surface forming, the technical proposal of the technical problem to be solved is: the inspection template uses PH type refractive-diffractive hybrid inspection template. The utility model consists of a laser light source, a half reflection flat mirror, an illuminating lens, a PH refractive-diffractive hybrid inspection template, a convex non-spherical surface to be measured, a diaphragm, an imaging lens and a CCD camera. The PH refractive-diffractive hybrid inspection template is easy to be made, the function of diffraction and refraction of light are combined to concisely realize a standard convex non-spherical surface wavefront, as the structure is not changed, the convex non-spherical surface detection interferometer still has the original advantages, and the detection effect is improved.

Description

A kind of convex aspheric surface check interferometer

Technical field

The utility model belongs to a kind of inspection machine to convex aspheric surface face type in the optical check technical field.

Background technology

Some optical aspherical surface eyeglass, in optical system, can eliminate aberration and distortion, simultaneously can simplify optical system greatly, improve image quality, therefore, the face type quality of aspherical mirror machining caused the very big concern of optics circle to the work for inspection of optical aspherical surface face type, becomes the important process link of optics cold working aspect.

It is reported in the interferometer of check aspheric surface face type, existing both at home and abroad some kinds of forms exist, the utility model relates to check to convex aspheric surface face type, with the most approaching prior art of the utility model be the astronomical laboratory development of Arizona, USA university convex aspheric surface check interferometer (SPIE Vol 2576/264) as depicted in figs. 1 and 2: form by LASER Light Source 1, half reflection level crossing 2, illuminating lens 3, inspection template 4, convex aspheric surface to be checked 5, half door screen 6, imaging len 7, CCD camera 8.

Hologram on the inspection template of this convex aspheric surface check interferometer is on the curved surface of inspection template, complex manufacturing technology, making difficulty, require the position location of light and dark annulus (striped) very strict, less positioning error, will cause bigger wavefront error, bring quality problems for check convex aspheric surface face type, in order to overcome above-mentioned shortcoming, a kind of new inspection template of ad hoc meter.

Summary of the invention

The technical problems to be solved in the utility model is: can check deep camber convex aspheric surface face type.The technical scheme of technical solution problem is: inspection template adopts phase-type to roll over the mixing inspection template that spreads out.

Detailed content of the present utility model is as shown in Figure 3: spread out by LASER Light Source 9, half reflection level crossing 10, illuminating lens 11, phase-type folding and mix inspection template 12, convex aspheric surface to be measured 13, diaphragm 14, imaging len 15, CCD camera 16 and form.

On the direction of propagation of the light of LASER Light Source 9, on optical axis, place half reflection level crossing 10, illuminating lens 11, phase-type folding successively and spread out and mix inspection template 12, convex aspheric surface to be measured 13; Half reflection level crossing 10 and optical axis placement at 45, diaphragm 14 places the light that reflects along the original optical path position through the 10 reflection back focusing of half reflection level crossing, the position that the focus of imaging len 15 also focuses in half reflection level crossing 10 reflection backs, the receiving plane of CCD camera 16 overlaps with the image planes of imaging len 15.

The utility model compared with the prior art, structure is identical, it is characterized in that on light path, inspection template between illuminating lens 11 and the convex aspheric surface to be measured 13 adopts the phase-type folding to spread out to mix inspection template 12.

The principle of work explanation: inspection template 12 front surface reflection diffraction (1) the level light behind illuminating lens 11 forms standard convex aspheric surface wavefront, the refract light that sees through inspection template 12 impinges perpendicularly on the convex aspheric surface 13 to be tested, return along former road then, see through inspection template 12 once more, the O level overlaps with reflection (1) level light behind the diffraction, diffraction O level has the actual wavefront of convex aspheric surface to be tested like this, two-beam is at diaphragm 14 place's interference imagings, the inferior light of other grades is fallen by the hurdle, interferogram is imaged onto on the receiving plane of CCD camera 16 through imaging len 15, by observing the interference pattern of CCD camera 16 records, can judge and analyze the surface quality of convex aspheric surface.

Good effect: phase-type is rolled over the mixing inspection template that spreads out, and makes easily, and diffraction of light and refraction action combine, realize the wavefront of standard convex aspheric surface exactly, because other structure does not change in the light path, this convex aspheric surface check interferometer still possesses original advantage, and check improves.

Description of drawings

Fig. 1 is the structural representation of prior art, Fig. 2 be in the prior art inspection template face pattern, Fig. 3 is a structural representation of the present utility model, Figure of abstract also adopts Fig. 3.

Embodiment

Implement by structure shown in Figure 3, LASER Light Source 1 adopts helium-neon laser, the bore of wavelength 632.8nm illuminating lens 11 is greater than the bore of inspection template, make light beam be full of the model clear aperature, the size of diaphragm 14 slits should be able to make the interference image before reference wavefront and the ground roll to be measured pass through fully, the inferior light of other grade is blocked, and imaging len 15 is imaged onto on the receiving plane of CCD camera interference image, and the CCD camera adopts 2048 * 2048 pixels.

Claims

1, a kind of convex aspheric surface check interferometer, form by LASER Light Source, half reflection level crossing, illuminating lens, inspection template, aspheric surface to be checked, diaphragm, imaging len, CCD camera, it is characterized in that the inspection template employing phase-type between illuminating lens on the light path (11) and convex aspheric surface to be checked (13) is rolled over the mixing inspection template (12) that spreads out.