CN101936779A - Double-optical wedge splicing pyramid wavefront sensor - Google Patents

Abstract

The invention relates to a double-optical wedge splicing pyramid wavefront sensor comprising two double-side conical prisms, a mirror bracket, two two-dimensional translation platforms, a first lens and a second lens, wherein the ridge edges of the double-side conical prisms are vertically placed and spliced. The two double-side conical prisms are regulated so that the joint of the double-side conical prisms is coincident with the back focus of the first lens, incident distorted wavefronts are focused on the double-side conical prisms by the first lens and then are divided into four light beams by the double-side conical prisms, the first lens behind the first lens images the light beams to a CCD (Charge Coupled Device) image detector, measurement signals are acquired by analyzing the light intensity differences among four light pupils, and then the phase distribution of the incident wavefronts can be obtained by wavefront restoring calculation. The wavefront sensor can realize all functions of a pyramid wavefront sensor, the device processing difficulty of the wavefront sensor is greatly lower than the processing difficulty of a four-pyramid device, and the wavefront sensor is easy to operate and meets the requirements on the optical system of the pyramid wavefront sensor.

Description

Two wedge splicing rectangular pyramid Wavefront sensors

Technical field

The invention belongs to the Primary Component in the technical fields such as adaptive optics, Wavefront detecting, relate to the method for making of the Primary Component of a rectangular pyramid Wavefront sensor.

Background technology

Wavefront sensor is an important devices of measuring wavefront distortion in the adaptive system, can be divided into two classes according to getting in touch between measuring-signal and the corrugated: a class is to obtain Wave-front phase by measuring wavefront slope (being the wavefront first order derivative), Hartmann wave front sensor is more typically arranged, shearing interferometer etc.; Another kind of is to measure wavefront curvature (being the wavefront second derivative) to obtain Wave-front phase, mainly contains the curvature Wavefront sensor.

The most frequently used Hartmann wave front sensor uses microlens array that entrance pupil is cut apart, and finds the solution wavefront slope by the center-of-mass coordinate of each image patch and the difference of reference wavefront center-of-mass coordinate on the measurement lens arra focal plane.The Wavefront sensor of another pupil beam split utilizes the pyramid of the individual faceted pebble of N (N＞1) with the beam splitting of incident corrugated, and then measures wavefront distortion (U.S. Pat 4399356 " Optical wavefront sensing system " that nineteen eighty-three authorizes).

For the Wavefront sensor of top two kinds of branch wavefront, their spatial sampling rate will propose higher requirement to the resolution of photoelectronic imaging element and increase sub-aperture number, and the efficiency of light energy utilization of two kinds of Wavefront sensors is lower by the decision of sub-aperture number.

Rectangular pyramid Wavefront sensor (PWFS) is a kind of slope type Wavefront sensor that Ragazzoni proposed first in 1996, utilize the refracting telescope of Pyramid the far-field focus of incident light to be divided into 4 bundles at the place, focal plane, then utilize relay lens to be imaged onto the ccd image detector, obtain measuring-signal by the light intensity of analyzing four pupil image on the pupil conjugate plane, adopt the linear reconstruction algorithm to restore wavefront (the Australian Patent AU2003267457A1 " Pyramidsensor for determing the wave aberration of the human eye " that authorized in 2002) then.It is compared with the Wavefront sensor of the two kinds of branch wavefront in front, and the spatial resolution with efficiency of light energy utilization height, measurement wavefront is higher, and stronger to weak target detection ability, sampling rate is easy to advantage (A﹠amp such as change; A, 350, L23-L26,1999, Opt.Commun, 268,189-195,2006).In addition, PWFS has the advantage (Opt.lett.Vol.27, No.7,2002 that do not need to change light path when the piston aberration of measuring between splice type telescope minute surface; Opt.Lett.3465-3467, Vol32, No.23,2007), it also is a kind of development prospect Wavefront sensor preferably.

The core devices of PWFS is the refracting prisms of a Pyramid, is called for short rectangular pyramid.When making rectangular pyramid, the place, summit of four cone flank hand-deliver remittances is not to be a proper point, but a platform.Yet, therefore its surfaceness and berm width there is strict demand because the effect of rectangular pyramid in PWFS is at frequency plane incident wave to be carried out beam splitting.Its face shape error of qualified product RMS＜λ/20,

(SPIE, Vol.4007,423-430,2000).

At present, the method for making of rectangular pyramid can be divided into two kinds both at home and abroad:

1. traditional optical polish method; 2. photoetching electroforming pressed film method (LIGA).Adopt the rectangular pyramid of first method processing, the berm width of the vertex of a cone is generally greater than 30um (PhD Thesis, JoanaB ü chler Costa.2005).Though adopt the LIGA method can produce the rectangular pyramid of optical property unanimity in batches, the berm width of the finished product rectangular pyramid that provides at present is also in 20～30um (Microelectronic Engineering 67-68,566-573,2003).And the two sides cone prism that adopts traditional optical polish method to make can guarantee face shape RMS＜λ/20 and seamed edge

If like this two two sides cone prisms are spliced into the requirement that a rectangular pyramid just can satisfy rectangular pyramid Wavefront sensor optical system.

Summary of the invention

The technical matters that purpose of the present invention solves is: reduce the device fabrication difficulty, be convenient to the light path adjustment of real system, overcome the processing problem that the rectangular pyramid cycle is long, face shape error is big and berm width is big, for this reason, provide a kind of pair of wedge splicing rectangular pyramid Wavefront sensor.

For reaching described purpose, the technical solution of the two wedge splicing of the present invention rectangular pyramid Wavefront sensor is: by the first two sides cone prism, the second two sides cone prism, mirror holder, two two-dimension translational platforms, first lens and second lens constitute, first lens, the first two sides cone prism of combination and the second two sides cone prism and second lens are arranged in regular turn along radiation direction, wherein: the first two sides cone prism and the second two sides cone prism are separately fixed in two mirror holders, and mirror holder is used to adjust the direction of the first two sides cone prism and second liang of face cone ridge rib, the inclination of ridge face and luffing angle; The mirror holder of the first two sides cone prism and the mirror holder of the second two sides cone prism are housed are fixed on the two-dimension translational platform, each two-dimension translational platform is used to adjust the front and back and the horizontal level of the first two sides cone prism and the second two sides cone prism; The first two sides cone prism has the first ridge seamed edge, and the second two sides cone prism has the second ridge seamed edge; The first ridge seamed edge and the vertical placement mutually of the second ridge seamed edge, the first ridge seamed edge and the splicing of the second ridge seamed edge, has the splicing intersection point between the first ridge seamed edge and the second ridge seamed edge, described splicing intersection point overlaps with the back focus of first lens, makes the first two sides cone prism have the branch light action identical with rectangular pyramid with the second two sides cone prism; The incident distorted wavefront through the first lens post-concentration to the first two sides cone prism, light beam after the convergence is divided into two bundles along the crest line direction perpendicular to the first ridge seamed edge, through further being divided into four bundles behind the second two sides cone prism, restraint photoimagings by second lens to the ccd image detector with 4, wherein the front focal plane of second lens overlaps with the first lens back focal plane, and the test surface of ccd image detector is a distorted wavefront conjugate plane to be measured.

When the present invention works, the two sides cone prism is fixed in the mirror holder, regulate the direction of the first two sides cone prism and the second two sides cone prism seamed edge, guarantee in two ridge seamed edges one along level and another vertical direction and be close to mutually, the mirror holder that the two sides cone prism is housed is fixed on the two-dimension translational platform, and the position of regulating the two-dimension translational platform makes the intersection point of face cone prism in twos be positioned at the back focus of first lens.The pitching of regulating the two sides cone prism guarantees two faces and the symmetrical of two sides cone prism.

Beneficial effect of the present invention: the present invention proposes the scheme of two wedge splicing rectangular pyramid Wavefront sensors, can reduce the rectangular pyramid difficulty of processing greatly, and it is practical good, workable to have, and satisfies advantages such as rectangular pyramid Wavefront sensor optical system requirement.The present invention compared with prior art has the advantage that is easy to process, make things convenient for adjusting.

Description of drawings

Fig. 1 is the two wedge splicing of a present invention rectangular pyramid Wavefront sensor schematic diagram.

Fig. 1 a is the first two sides cone prism structural representation.

Fig. 1 b is the second two sides cone prism structural representation.

Fig. 2 is the simulation result of pupil image.

Embodiment

For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.

As Fig. 1 two wedge splicing rectangular pyramid Wavefront sensor schematic diagrams are shown, Fig. 1 a is the first two sides cone prism structural representation, Fig. 1 b is the second two sides cone prism structural representation, and the present invention is the mirror holder (not shown mark), two two-dimension translational platforms (not shown mark), the first lens L that are tilted by the first two sides cone prism 1, the second two sides cone prism 2, two adjustable rotations and two dimension ₁With the second lens L ₂Constitute the first lens L ₁, the combination the first two sides cone prism 1 and the second two sides cone prism 2 and the second lens L ₂Arrange in regular turn along radiation direction, wherein: the first two sides cone prism 1 and the second two sides cone prism 2 are separately fixed in two mirror holders, and mirror holder is used to adjust the direction of the first two sides cone prism 1 and second liang of face cone ridge rib 2, the inclination and the luffing angle of ridge face; The mirror holder of the first two sides cone prism 1 and the mirror holder of the second two sides cone prism 2 are housed are fixed on the two-dimension translational platform, each two-dimension translational platform is used to adjust the front and back and the horizontal level of the first two sides cone prism 1 and the second two sides cone prism 2; The first two sides cone prism 1 has the first ridge seamed edge, 11, the second two sides cone prisms 2 and has the second ridge seamed edge 21; The first ridge seamed edge 11 and the 21 mutual vertical placements of the second ridge seamed edge, the first ridge seamed edge 11 and 21 splicings of the second ridge seamed edge have the splicing intersection point between the first ridge seamed edge 11 and the second ridge seamed edge 21, the described splicing intersection point and the first lens L ₁Back focus overlap, make the first two sides cone prism 1 have the branch light action identical with rectangular pyramid with the second two sides cone prism 2; The incident distorted wavefront is through the first lens L ₁Post-concentration is to the first two sides cone prism 1, light beam after the convergence is divided into two bundles along the crest line direction perpendicular to the first ridge seamed edge 11, through further being divided into four bundles behind the second two sides cone prism 2, the second lens front focal plane overlaps with the first lens back focal plane, and the test surface of ccd image detector is a distorted wavefront conjugate plane to be measured.The refractive two sides cone prism that the described first two sides cone prism 1 and the second two sides cone prism 2 are made for the traditional optical device manufacturing process, the first two sides cone prism 1 and the effect equivalence of the second two sides cone prism 2 in light path, the position can exchange.Two drift angles of described two sides cone prism are near 180 °.

The first two sides cone prism 1 and second two sides cone prism 2 base angle separately

α＜5 °, wherein, M is that the ratio of adjacent pupil inconocenter spacing and pupil image is M＞2, and D is the diameter of entrance pupil, and n is the refractive index of material, f ₁Be the first lens L ₁Focal length.

The first two sides cone prism 1 and the second two sides cone prism 2 ridge face and bottom surface plating anti-reflection film separately, transmitance be greater than 99.9%, face shape

The width of seamed edge platform less than

λ is a wavelength, f ₁Be the first lens L ₁Focal length.

The first two sides cone prism and the effect equivalence of the second two sides cone prism in light path, the position can exchange, the splicing intersection point of the first ridge seamed edge 1 and the second ridge seamed edge 2 does not require it must is the center of seamed edge, and the first ridge seamed edge 11 closely contacts with space requirement between the second ridge seamed edge 21.

If the light field E at entrance pupil place ₁(x y) is:

$E_1(x,y)=u_0\exp \left[i\frac{2\mathrm{\π}}{\mathrm{\λ}}\mathrm{\φ}(x,y)\right]P---\left(1\right)$

U wherein ₀And φ (x y) represents the amplitude and the phase place of incident field respectively, and i represents imaginary part unit, and x and y represent the coordinate of distortion to be measured, and P is a pupil function, and λ is a wavelength.Light field E ₁(x, y) being transmitted to focal plane when place can be with its Fourier transform E ₂(u, v) represent:

$E_2(u,v)=\frac{1}{\mathrm{\&lambda;}{\mathrm{<figure-callout\; id="1"\; label="f"\; filenames="HSA00000229685600011.png"\; state="\{\{state\}\}">f</figure-callout>}}_1}\&Integral;\underset{-\&infin;}{\overset{\&infin;}{\&Integral;}}{E}_1(x,y)\exp [-i2\mathrm{\&pi;}(\frac{x}{\mathrm{\&lambda;}{f}_1}u+\frac{y}{\mathrm{\&lambda;}{f}_1}v\left)\right]\mathrm{dxdy}---\left(2\right)$

(u v) is the first lens L ₁The coordinate of back focal plane, f ₁Be the first lens L ₁Focal length.The first two sides cone prism 1 and the phase delay function of the second two sides cone prism 2 in light path according to ridge seamed edge placement direction, can be defined as respectively:

${\mathrm{\&Phi;}}_{\mathrm{FKx}}=\exp [-i2\mathrm{\&pi;}\frac{(n-1)\mathrm{\&alpha;}}{\mathrm{\&lambda;}}\left(\right|u\left|\right)]---\left(3\right)$

${\mathrm{\&Phi;}}_{\mathrm{FKy}}=\exp [-i2\mathrm{\&pi;}\frac{(n-1)\mathrm{\&alpha;}}{\mathrm{\&lambda;}}\left(\right|v\left|\right)]---\left(4\right)$

Φ _FKxAnd Φ _FKyRepresent the phase function when ridge seamed edge and x axle are vertical with the y axle respectively, α represents the angle between cone flank face and the bottom surface, and n is a refractive index, through the light field complex amplitude E behind the first two sides cone prism 1 and the second two sides cone prism 2 ₃(u v) is expressed as:

E ₃(u，v)＝E ₂(u，v)Φ _FKxΦ _FKy (5)

Through the second lens L ₂The complex amplitude E of back on the ccd image plane ₄(ξ η) is expressed as:

$E_4(\mathrm{\&xi;},\mathrm{\&eta;})=\frac{1}{\mathrm{\&lambda;}{f}_2}\&Integral;\underset{-\&infin;}{\overset{\&infin;}{\&Integral;}}{E}_3\exp [-i2\mathrm{\&pi;}(\frac{u}{\mathrm{\&lambda;}{f}_2}\mathrm{\&xi;}+\frac{v}{\mathrm{\&lambda;}{f}_2}\mathrm{\&eta;})]\mathrm{dudv}---\left(6\right)$

(ξ, the η) coordinate system of expression ccd image detector place face, f ₂Represent the second lens L ₂Focal length, by the light intensity I of four pupil image relatively ₁, I ₂, I ₃And I ₄Can obtain measuring-signal S _xAnd S _y, the relational expression between measuring-signal and the wavefront is:

Middle range of integration P (x) in formula (7) and (8) and P (y) represented sensing point, and (x is y) perpendicular to the straight line of coordinate axis and the intersection point on pupil function border, y ₀Be the integral boundary value of pupil function along the y direction, (x ₁, y ₁), (x ₂, y ₂) and (x ', y ') denotation coordination system (x, y) coordinate of middle arbitrfary point.

Use Ze Nike (Zernike) modal representation wave front aberration to be measured

a _mAnd Z _m(x y) represents coefficient and the polynomial expression of m rank Ze Nike respectively, and N represents the Zernike exponent number got.When

Hour, the sine function in formula (7) and (8) can come approximate representation with first in its Taylor expansion, so top two formulas can be write as:

$S_x=\underset{m=1}{\overset{N}{\mathrm{\&Sigma;}}}{a}_m\{\underset{-P\left(y\right)}{\overset{P\left(y\right)}{\&Integral;}}\frac{Z_m(x,y)-Z_m(x^{\&prime;},y)}{\mathrm{\&lambda;}(x-x^{\&prime;})}d{x}^{\&prime;}+$

$\underset{-P\left(x\right)}{\overset{P\left(x\right)}{\&Integral;}}{\mathrm{dy}}_2\underset{-y_0}{\overset{y_0}{\&Integral;}}{\mathrm{dy}}_1\underset{-P\left(y_1\right)}{\overset{P\left(y_1\right)}{\&Integral;}}\frac{Z_m(x,y_2)-Z_m(x_1,y_1)}{\mathrm{\&lambda;}{\mathrm{\&pi;}}^3(x-x_1)(y-y_1)(y-y_2)}d{x}_1\}---\left(9\right)$

$S_y=\underset{m=1}{\overset{N}{\mathrm{\&Sigma;}}}{a}_m\{\underset{-P\left(x\right)}{\overset{P\left(x\right)}{\&Integral;}}\frac{Z_m(x,y)-Z_m(x^{\&prime;},y)}{\mathrm{\&lambda;}(y-y^{\&prime;})}d{y}^{\&prime;}+$

$\underset{-P\left(y\right)}{\overset{P\left(y\right)}{\&Integral;}}{\mathrm{dx}}_2\underset{-y_0}{\overset{y_0}{\&Integral;}}{\mathrm{<figure-callout\; id="1"\; label="dx"\; filenames="HSA00000229685600011.png"\; state="\{\{state\}\}">dx</figure-callout>}}_1\underset{-P\left(y_1\right)}{\overset{P\left(y_1\right)}{\&Integral;}}\frac{Z_m(x_2,y)-Z_m(x_1,y_1)}{\mathrm{\&lambda;}{\mathrm{\&pi;}}^3(x-x_1)(y-y_1)(y-y_2)}d{x}_1\}---\left(10\right)$

The integral of formula (9) and (10) is expressed as:

$G_{\mathrm{xm}}=\underset{-P\left(y\right)}{\overset{P\left(y\right)}{\&Integral;}}\frac{Z_m(x,y)-Z_m(x^{\&prime;},y)}{\mathrm{\&lambda;}(x-x^{\&prime;})}d{x}^{\&prime;}+\underset{-P\left(x\right)}{\overset{P\left(x\right)}{\&Integral;}}{\mathrm{dy}}_2\underset{-y_0}{\overset{y_0}{\&Integral;}}{\mathrm{<figure-callout\; id="1"\; label="dy"\; filenames="HSA00000229685600011.png"\; state="\{\{state\}\}">dy</figure-callout>}}_1\underset{-P\left(y_1\right)}{\overset{P\left(y_1\right)}{\&Integral;}}\frac{Z_m(x,y_2)-Z_m(x_1,y_1)}{{\mathrm{\&lambda;\&pi;}}^3(x-x_1)(y-y_1)(y-y_2)}{\mathrm{<figure-callout\; id="1"\; label="dx"\; filenames="HSA00000229685600011.png"\; state="\{\{state\}\}">dx</figure-callout>}}_1$

(11)

$G_{\mathrm{ym}}=\underset{-P\left(x\right)}{\overset{P\left(x\right)}{\&Integral;}}\frac{Z_m(x,y)-Z_m(x^{\&prime;},y)}{\mathrm{\&lambda;}(y-y^{\&prime;})}d{y}^{\&prime;}+\underset{-P\left(y\right)}{\overset{P\left(y\right)}{\&Integral;}}{\mathrm{dx}}_2\underset{-y_0}{\overset{y_0}{\&Integral;}}{\mathrm{<figure-callout\; id="1"\; label="dx"\; filenames="HSA00000229685600011.png"\; state="\{\{state\}\}">dx</figure-callout>}}_1\underset{-P\left(y_1\right)}{\overset{P\left(y_1\right)}{\&Integral;}}\frac{Z_m(x_2,y)-Z_m(x_1,y_1)}{{\mathrm{\&lambda;\&pi;}}^3(x-x_1)(y-y_1)(x-x_2)}{\mathrm{<figure-callout\; id="1"\; label="dx"\; filenames="HSA00000229685600011.png"\; state="\{\{state\}\}">dx</figure-callout>}}_1$

(12)

S _xAnd S _yBe preceding N rank Zernike item at coefficient hour each rank signal G _XmAnd G _YmLinear superposition, when using PWFS to measure aberration, with G _XmAnd G _YmAs restructuring matrix G, just can utilize this linear relationship to carry out wavefront measurement and closed-loop corrected.

Because G _XmAnd G _YmDo not have analytic solution, in actual light path, adopt distorting lens to produce m rank Zernike aberration (RMS＜0.1 λ) usually in advance, obtain PWFS the response signal on this corrugated is just obtained G _XmAnd G _Ym, set up linear reconstruction response matrix G thus, the matrix form of formula (9) and (10) can be expressed as S=GA like this.The spatial sampling rate of supposing wavefront to be measured is M, and the Zernike pattern exponent number of getting was N when pattern was restored, so each rank Zernike coefficient A of wavefront to be measured calculates by following formula:

A＝G ⁺S (13)

Wherein, $A=\left[\begin{array}{c}{a}_1\\ a_2\\ \&CenterDot;\&CenterDot;\&CenterDot;\\ a_N\end{array}\right];$ $G=\left[\begin{array}{cccc}{G}_{x1}\left(1\right)& G_{x2}\left(1\right)& \&CenterDot;\&CenterDot;\&CenterDot;& G_{\mathrm{xN}}\left(1\right)\\ G_{y1}\left(1\right)& G_{y2}\left(1\right)& \&CenterDot;\&CenterDot;\&CenterDot;& G_{\mathrm{yN}}\left(1\right)\\ G_{x1}\left(2\right)& G_{x2}\left(2\right)& \&CenterDot;\&CenterDot;\&CenterDot;& G_{\mathrm{xN}}\left(2\right)\\ G_{y1}\left(2\right)& G_{y2}\left(2\right)& \&CenterDot;\&CenterDot;\&CenterDot;& G_{\mathrm{yN}}\left(2\right)\\ \&CenterDot;\&CenterDot;\&CenterDot;& \&CenterDot;\&CenterDot;\&CenterDot;& \&CenterDot;\&CenterDot;\&CenterDot;& \&CenterDot;\&CenterDot;\&CenterDot;\\ G_{x1}\left(M\right)& G_{x2}\left(M\right)& \&CenterDot;\&CenterDot;\&CenterDot;& G_{\mathrm{xN}}\left(M\right)\\ G_{y1}\left(M\right)& G_{y2}\left(M\right)& \&CenterDot;\&CenterDot;\&CenterDot;& G_{\mathrm{yN}}\left(M\right)\end{array}\right];$ $S=\left[\begin{array}{c}{S}_x\left(1\right)\\ S_y\left(1\right)\\ S_x\left(2\right)\\ S_y\left(2\right)\\ \&CenterDot;\&CenterDot;\&CenterDot;\\ S_x\left(M\right)\\ S_y\left(M\right)\end{array}\right],$

G ⁺Expression wave front restoration matrix utilizes singular value decomposition method (SVD) response matrix G is found the solution generalized inverse and to obtain.a _NBe N rank zernike coefficient, S _x(M) and S _y(M) represent M sampled point of x and y orientation detection signal respectively, G _XN(M) and G _YN(M) represent M sampled point in the corresponding matrix of N rank Ze Nike item respectively.

When wave aberration to be measured was big, formula (7) and (8) will produce bigger error to the approximation of formula (9) and (10), thereby measurement result can only embody the direction of wavefront to be measured.At this moment can use distorting lens that incident field is carried out negative feedback and proofread and correct, correction back irreducible phase errors is reduced gradually, till reaching the correction accuracy that needs, thereby can obtain wavefront to be measured by this close loop maneuver.

Fig. 2 is astigmatic image error (the 5th rank Zernike aberration, Z ₅) through the first lens L ₁Assemble, then by the prismatic decomposition of a two wedge splicing rectangular pyramid, again through the second lens L ₂The simulation result of the pupil image that the back is become on the ccd image detector.Adjacent pupil inconocenter is spaced apart 4 pupil image sizes in the emulation; The first lens L ₁, the second lens L ₂Focal length equate; Select the effective coverage of the border circular areas of one 63 * 63 pixel as entrance pupil in the picture centre of 511 * 511 pixels, the phase delay function of two face cones is seen formula (3) and (4).

The above; only be the embodiment among the present invention; but protection scope of the present invention is not limited thereto; anyly be familiar with the people of this technology in the disclosed technical scope of the present invention; can understand conversion or the replacement expected; all should be encompassed in of the present invention comprising within the scope, therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.

Claims (5)

1. two wedge splicing rectangular pyramid Wavefront sensors, it is characterized in that: constitute by the first two sides cone prism, the second two sides cone prism, mirror holder, two two-dimension translational platforms, first lens and second lens, the first two sides cone prism of first lens, combination and the second two sides cone prism and second lens are arranged in regular turn along radiation direction, wherein: the first two sides cone prism and the second two sides cone prism are separately fixed in two mirror holders, and mirror holder is used to adjust the direction of the first two sides cone prism and second liang of face cone ridge rib, the inclination and the luffing angle of ridge face; The mirror holder of the first two sides cone prism and the mirror holder of the second two sides cone prism are housed are fixed on the two-dimension translational platform, each two-dimension translational platform is used to adjust the front and back and the horizontal level of the first two sides cone prism and the second two sides cone prism; The first two sides cone prism has the first ridge seamed edge, and the second two sides cone prism has the second ridge seamed edge; The first ridge seamed edge and the vertical placement mutually of the second ridge seamed edge, the first ridge seamed edge and the splicing of the second ridge seamed edge, has the splicing intersection point between the first ridge seamed edge and the second ridge seamed edge, described splicing intersection point overlaps with the back focus of first lens, makes the first two sides cone prism have the branch light action identical with rectangular pyramid with the second two sides cone prism; The incident distorted wavefront through the first lens post-concentration to the first two sides cone prism, light beam after the convergence is divided into two bundles along the crest line direction perpendicular to the first ridge seamed edge, through further being divided into four bundles behind the second two sides cone prism, restraint photoimagings by second lens to the ccd image detector with 4, wherein the front focal plane of second lens overlaps with the first lens back focal plane, and the test surface of ccd image detector is a distorted wavefront conjugate plane to be measured.

2. according to claim 1 pair of wedge splicing rectangular pyramid Wavefront sensor is characterized in that: the refractive two sides cone prism that the described first two sides cone prism and the second two sides cone prism are made for the traditional optical device manufacturing process.

3. according to claim 1 pair of wedge splicing rectangular pyramid Wavefront sensor is characterized in that: the first two sides cone prism and the second two sides cone prism base angle separately

α＜5 °, wherein, M is that the ratio of adjacent pupil inconocenter spacing and pupil image is M＞2, and D is the diameter of entrance pupil, and n is the refractive index of material, f ₁Be the first lens L ₁Focal length.

4. according to claim 1 pair of wedge splicing rectangular pyramid Wavefront sensor is characterized in that: the first two sides cone prism and second two sides cone prism ridge face and bottom surface plating anti-reflection film separately, transmitance be greater than 99.9%, face shape The width of seamed edge platform less than

λ is a wavelength, f ₁It is the focal length of first lens.

5. according to claim 1 pair of wedge splicing rectangular pyramid Wavefront sensor, it is characterized in that: the first two sides cone prism and the effect equivalence of the second two sides cone prism in light path, the position can exchange, the splicing intersection point of the first ridge seamed edge and the second ridge seamed edge does not require it must is the center of seamed edge, and the first ridge seamed edge closely contacts with space requirement between the second ridge seamed edge.

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