JPS5461483A - Power semiconductor element - Google Patents
Power semiconductor elementInfo
- Publication number
- JPS5461483A JPS5461483A JP12832977A JP12832977A JPS5461483A JP S5461483 A JPS5461483 A JP S5461483A JP 12832977 A JP12832977 A JP 12832977A JP 12832977 A JP12832977 A JP 12832977A JP S5461483 A JPS5461483 A JP S5461483A
- Authority
- JP
- Japan
- Prior art keywords
- region
- concentration
- emitter
- window
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To reduce the element area and to improve the dielectric strength, by lowering the surface concentration of the base and emitter region and by increasing the concentration for the surface region near the emitter base junction in the emitter region.
CONSTITUTION: SiO2 window is provided for the N type semiconductor 10 being the collector region, and the diffusion from this window forms the base region 1 of which surface concentration is 2×1018cm-3 or less. Similarly, the emitter region 2 of which surface impurity concentration is less than 2×1019cm-3. Further, the thickness of the oxide film 4 at the surface of the emitter region 2 is made thinner than the oxide film at the surface of the base region 1, window 5 is opened with etching, phosphorus diffusion is made through this window and the phosphorus region 6 of high concentration is placed. Next, oxidation grows the oxide film 7 and the surface region concentration near the emitter and base junction is taken less than 2×1019 cm-3. After that, the contact window is formed and the bade electrode 8 and the emitter region 9 are formed
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12832977A JPS5461483A (en) | 1977-10-25 | 1977-10-25 | Power semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12832977A JPS5461483A (en) | 1977-10-25 | 1977-10-25 | Power semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5461483A true JPS5461483A (en) | 1979-05-17 |
Family
ID=14982085
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12832977A Pending JPS5461483A (en) | 1977-10-25 | 1977-10-25 | Power semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5461483A (en) |
-
1977
- 1977-10-25 JP JP12832977A patent/JPS5461483A/en active Pending
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