JPS5459075A - Diffusing method of impurity - Google Patents

Diffusing method of impurity

Info

Publication number
JPS5459075A
JPS5459075A JP12630477A JP12630477A JPS5459075A JP S5459075 A JPS5459075 A JP S5459075A JP 12630477 A JP12630477 A JP 12630477A JP 12630477 A JP12630477 A JP 12630477A JP S5459075 A JPS5459075 A JP S5459075A
Authority
JP
Japan
Prior art keywords
diffusion
vapor pressure
impurity
source
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12630477A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6122855B2 (enExample
Inventor
Yoshinari Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12630477A priority Critical patent/JPS5459075A/ja
Publication of JPS5459075A publication Critical patent/JPS5459075A/ja
Publication of JPS6122855B2 publication Critical patent/JPS6122855B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP12630477A 1977-10-19 1977-10-19 Diffusing method of impurity Granted JPS5459075A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12630477A JPS5459075A (en) 1977-10-19 1977-10-19 Diffusing method of impurity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12630477A JPS5459075A (en) 1977-10-19 1977-10-19 Diffusing method of impurity

Publications (2)

Publication Number Publication Date
JPS5459075A true JPS5459075A (en) 1979-05-12
JPS6122855B2 JPS6122855B2 (enExample) 1986-06-03

Family

ID=14931878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12630477A Granted JPS5459075A (en) 1977-10-19 1977-10-19 Diffusing method of impurity

Country Status (1)

Country Link
JP (1) JPS5459075A (enExample)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492511A (enExample) * 1972-04-20 1974-01-10
JPS5023562A (enExample) * 1973-06-29 1975-03-13
JPS5311574A (en) * 1976-07-19 1978-02-02 Fujitsu Ltd Production of semiconductor device
JPS6011801A (ja) * 1983-06-30 1985-01-22 Fujitsu Ltd 立体デイスプレイ装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS492511A (enExample) * 1972-04-20 1974-01-10
JPS5023562A (enExample) * 1973-06-29 1975-03-13
JPS5311574A (en) * 1976-07-19 1978-02-02 Fujitsu Ltd Production of semiconductor device
JPS6011801A (ja) * 1983-06-30 1985-01-22 Fujitsu Ltd 立体デイスプレイ装置

Also Published As

Publication number Publication date
JPS6122855B2 (enExample) 1986-06-03

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