JPS5458691A - Manufacture of magnetic recording medium - Google Patents

Manufacture of magnetic recording medium

Info

Publication number
JPS5458691A
JPS5458691A JP12552177A JP12552177A JPS5458691A JP S5458691 A JPS5458691 A JP S5458691A JP 12552177 A JP12552177 A JP 12552177A JP 12552177 A JP12552177 A JP 12552177A JP S5458691 A JPS5458691 A JP S5458691A
Authority
JP
Japan
Prior art keywords
glow discharge
substrate
manufacture
pci3
evaporated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12552177A
Other languages
Japanese (ja)
Other versions
JPS5933245B2 (en
Inventor
Koichi Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12552177A priority Critical patent/JPS5933245B2/en
Publication of JPS5458691A publication Critical patent/JPS5458691A/en
Publication of JPS5933245B2 publication Critical patent/JPS5933245B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To manufacture a medium of high coercive force described in the title which is suitable for high density recording, by forming ferromagnetic film on the substrate surface by the flow of Co or Co-Ni vapor in a glow discharge atmosphere of a gas contg. PH3 or PCI3. CONSTITUTION:A vacuum vessel 1 is evacuated continuously by means of a evacuation system 14, and simultaneously a discharge gas 16 contg. at least PH3 or PCI3 is introduced from outside by adjustment of a variable leak valve 15 in order to maintain the glow discharge and to keep the vessel 1 at a prescribed optimum press. A substrate 2, e.g., plastic film etc., is moved along the peripheral sides of cooling cans and the material to be evaporated 4 consisting of Co or Co-Ni alloy contained in a water-cooled copper hearth is heated 3 and evaporated by an electron gun 5. A high-frequency electrode 9 produces glow discharge, which causes to form ferromagnetic Co-P, Co-Ni-P film of high coercive force on the substrate 2.
JP12552177A 1977-10-18 1977-10-18 Method for manufacturing magnetic recording media Expired JPS5933245B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12552177A JPS5933245B2 (en) 1977-10-18 1977-10-18 Method for manufacturing magnetic recording media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12552177A JPS5933245B2 (en) 1977-10-18 1977-10-18 Method for manufacturing magnetic recording media

Publications (2)

Publication Number Publication Date
JPS5458691A true JPS5458691A (en) 1979-05-11
JPS5933245B2 JPS5933245B2 (en) 1984-08-14

Family

ID=14912204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12552177A Expired JPS5933245B2 (en) 1977-10-18 1977-10-18 Method for manufacturing magnetic recording media

Country Status (1)

Country Link
JP (1) JPS5933245B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57199209A (en) * 1981-06-02 1982-12-07 Nippon Gakki Seizo Kk Magnetic recording tape
US7494302B2 (en) 2002-09-11 2009-02-24 Kyocera Corporation Throw-away tip

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57199209A (en) * 1981-06-02 1982-12-07 Nippon Gakki Seizo Kk Magnetic recording tape
US7494302B2 (en) 2002-09-11 2009-02-24 Kyocera Corporation Throw-away tip

Also Published As

Publication number Publication date
JPS5933245B2 (en) 1984-08-14

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