JPS57152545A - Manufacture of magnetic recording medium - Google Patents

Manufacture of magnetic recording medium

Info

Publication number
JPS57152545A
JPS57152545A JP3836081A JP3836081A JPS57152545A JP S57152545 A JPS57152545 A JP S57152545A JP 3836081 A JP3836081 A JP 3836081A JP 3836081 A JP3836081 A JP 3836081A JP S57152545 A JPS57152545 A JP S57152545A
Authority
JP
Japan
Prior art keywords
base
mixed gas
gaseous
vacuum
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3836081A
Other languages
Japanese (ja)
Inventor
Tsunemi Oiwa
Osamu Kitagami
Hideaki Niimi
Kunio Wakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Holdings Ltd
Original Assignee
Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Maxell Ltd filed Critical Hitachi Maxell Ltd
Priority to JP3836081A priority Critical patent/JPS57152545A/en
Publication of JPS57152545A publication Critical patent/JPS57152545A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851—Coating a support with a magnetic layer by sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Thin Magnetic Films (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To manufacture a recording medium having superior magnetic characteristics efficiently by ionizing and sending mixed gas of gaseous N2 and Ar, etc., to a base under specific conditions when forming a vacuum-deposited layer of Co or Co alloy on the base. CONSTITUTION:When a magnetic layer is formed on a base 5 by vacuum-depositing Co or Co alloy on the base 5, mixed gas of gaseous N2, and gaseous Ar or He is ionized by a cold cathode type ion source 9 and sent to the base 5. In this case, the gaseous N2, and Ar or He are mixed at a 0.2-5 gas pressure rate (N2/Ar or He), and this mixed gas is allowed to exit in a system within a 60-20,000mum/min/Torr range of the deposition speed/mixed gas pressure value of the mixed gas. For example, a polyester base film 5 is set on a water-cooled base plate 4 in a vacuum-deposition device, which is evacuated; and Co8 in a hearth 6 is heated to vapor, thus performing vacuum deposition under said conditions.
JP3836081A 1981-03-17 1981-03-17 Manufacture of magnetic recording medium Pending JPS57152545A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3836081A JPS57152545A (en) 1981-03-17 1981-03-17 Manufacture of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3836081A JPS57152545A (en) 1981-03-17 1981-03-17 Manufacture of magnetic recording medium

Publications (1)

Publication Number Publication Date
JPS57152545A true JPS57152545A (en) 1982-09-20

Family

ID=12523107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3836081A Pending JPS57152545A (en) 1981-03-17 1981-03-17 Manufacture of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS57152545A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0187169A2 (en) * 1983-12-27 1986-07-16 Hitachi Metals, Ltd. Process of manufacturing magnetic recording media and the media
JPS62255137A (en) * 1986-04-28 1987-11-06 日新電機株式会社 Film carrier type substrate and manufacture thereof
JPH0720147U (en) * 1993-09-17 1995-04-11 株式会社タイガークラウン Ball with drainer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0187169A2 (en) * 1983-12-27 1986-07-16 Hitachi Metals, Ltd. Process of manufacturing magnetic recording media and the media
JPS62255137A (en) * 1986-04-28 1987-11-06 日新電機株式会社 Film carrier type substrate and manufacture thereof
JPH0720147U (en) * 1993-09-17 1995-04-11 株式会社タイガークラウン Ball with drainer
JP2555580Y2 (en) * 1993-09-17 1997-11-26 株式会社 タイガークラウン Ball with drainer

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