JPS57145979A - Formation of protective film - Google Patents

Formation of protective film

Info

Publication number
JPS57145979A
JPS57145979A JP3184181A JP3184181A JPS57145979A JP S57145979 A JPS57145979 A JP S57145979A JP 3184181 A JP3184181 A JP 3184181A JP 3184181 A JP3184181 A JP 3184181A JP S57145979 A JPS57145979 A JP S57145979A
Authority
JP
Japan
Prior art keywords
substrate
protective film
film
metallic thin
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3184181A
Other languages
Japanese (ja)
Other versions
JPH0112834B2 (en
Inventor
Kunio Hibino
Takashi Suzuki
Toshiaki Kunieda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3184181A priority Critical patent/JPS57145979A/en
Publication of JPS57145979A publication Critical patent/JPS57145979A/en
Publication of JPH0112834B2 publication Critical patent/JPH0112834B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE:To enhance the corrosion and wear resistances of a substrate by depositing a target made of olefin polymer on the surface of the substrate by sputtering in a mixed atmosphere of a reducing gas and an inert gas. CONSTITUTION:An olefin polymer is molded into a film or formed as a coat on an Al plate and used as a target. The target is evaporated by ion bombardment in a mixed atmosphere of a reducing gas and an inert gas, and the vapor is deposited on the surface of a substrate to be protected such as a metallic thin film type magnetic recording medium to form a protective film having <= about 1,000Angstrom thickness. By this protective film the corrosion resistance of the metallic thin film and the wear resistance to a magnetic head are enhanced remarkably. In the formation of a protective film on a metallic thin film type magnetic recording medium using a plastic film as the substrate, a magnetron type RF sputtering method is optimum.
JP3184181A 1981-03-04 1981-03-04 Formation of protective film Granted JPS57145979A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3184181A JPS57145979A (en) 1981-03-04 1981-03-04 Formation of protective film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3184181A JPS57145979A (en) 1981-03-04 1981-03-04 Formation of protective film

Publications (2)

Publication Number Publication Date
JPS57145979A true JPS57145979A (en) 1982-09-09
JPH0112834B2 JPH0112834B2 (en) 1989-03-02

Family

ID=12342273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3184181A Granted JPS57145979A (en) 1981-03-04 1981-03-04 Formation of protective film

Country Status (1)

Country Link
JP (1) JPS57145979A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60157725A (en) * 1984-01-26 1985-08-19 Denki Kagaku Kogyo Kk Magnetic storage medium
JPH0467447A (en) * 1990-07-05 1992-03-03 Sharp Corp Magneto-optical disk and production thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60157725A (en) * 1984-01-26 1985-08-19 Denki Kagaku Kogyo Kk Magnetic storage medium
JPH0467447A (en) * 1990-07-05 1992-03-03 Sharp Corp Magneto-optical disk and production thereof

Also Published As

Publication number Publication date
JPH0112834B2 (en) 1989-03-02

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