JPS57145980A - Formation of protective film - Google Patents

Formation of protective film

Info

Publication number
JPS57145980A
JPS57145980A JP3184281A JP3184281A JPS57145980A JP S57145980 A JPS57145980 A JP S57145980A JP 3184281 A JP3184281 A JP 3184281A JP 3184281 A JP3184281 A JP 3184281A JP S57145980 A JPS57145980 A JP S57145980A
Authority
JP
Japan
Prior art keywords
protective film
film
substrate
metallic thin
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3184281A
Other languages
Japanese (ja)
Other versions
JPH0160545B2 (en
Inventor
Kunio Hibino
Takashi Suzuki
Toshiaki Kunieda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3184281A priority Critical patent/JPS57145980A/en
Publication of JPS57145980A publication Critical patent/JPS57145980A/en
Publication of JPH0160545B2 publication Critical patent/JPH0160545B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Magnetic Record Carriers (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE:To form a protective film with superior corrosion and wear resistances by depositing a target made of poly(meth)acrylic ester on the surface of a substrate by sputtering in a mixed atmosphere of a reducing gas and an inert gas. CONSTITUTION:An acrylic polymer represented by the formula (where R1 is H or CH3, and R2 is alkyl) is molded into a film or formed as a coat on an Al plate and used as a target. The target is evaporated by ion bombardment in a mixed atmosphere of a reducing gas and an inert gas, and the vapor is deposited on the surface of a substrate to be protected such as a metallic thin film type magnetic recording medium to form a protective film having <= about 1,000Angstrom thickness. By this protective film the corrosion resistance of the metallic thin film and the wear resistance to a magnetic head are enhanced remarkably. In the formation of a protective film on a metallic thin film type magnetic recording medium using a plastic film as the substrate, a magnetron type RF sputtering method is optimum.
JP3184281A 1981-03-04 1981-03-04 Formation of protective film Granted JPS57145980A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3184281A JPS57145980A (en) 1981-03-04 1981-03-04 Formation of protective film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3184281A JPS57145980A (en) 1981-03-04 1981-03-04 Formation of protective film

Publications (2)

Publication Number Publication Date
JPS57145980A true JPS57145980A (en) 1982-09-09
JPH0160545B2 JPH0160545B2 (en) 1989-12-22

Family

ID=12342300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3184281A Granted JPS57145980A (en) 1981-03-04 1981-03-04 Formation of protective film

Country Status (1)

Country Link
JP (1) JPS57145980A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59171030A (en) * 1983-03-18 1984-09-27 Matsushita Electric Ind Co Ltd Magnetic recording medium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59171030A (en) * 1983-03-18 1984-09-27 Matsushita Electric Ind Co Ltd Magnetic recording medium

Also Published As

Publication number Publication date
JPH0160545B2 (en) 1989-12-22

Similar Documents

Publication Publication Date Title
JPS5615014A (en) Metallic thin film type magnetic recording medium
JPS57164432A (en) Magnetic recording medium
JPS56153534A (en) Magnetic recording medium
GB1366146A (en) Magnetic storage devices
ES483670A1 (en) Amorphous magnetic films and a method of making such films.
FI900721A0 (en) MAGNETIC OPTICAL SKIKT OCH FOERFARANDE FOER DESS FRAMSTAELLNING.
JPS57145980A (en) Formation of protective film
JPS5778123A (en) Manufacture of anisotropic thin magnetic film
JPS57145979A (en) Formation of protective film
JPS57145977A (en) Formation of protective film
JPS57145978A (en) Formation of protective film
JPS5720919A (en) Magnetic recording medium and its manufacture
JPS57164433A (en) Magnetic recording medium and its manufacture
JPS57141025A (en) Production for magnetic recording medium
JPS54141107A (en) Magnetic recording medium
JPS5755531A (en) Vertical magnetic recording medium
JPS5680831A (en) Producing device for magnetic recording medium
JPS57138035A (en) Magnetic recording medium
JPS57105838A (en) Photo-thermal magnetic recording medium
JPS57116771A (en) Formation of protecting film
JPS6438996A (en) Manufacture of thin film el element
JPS57180110A (en) Manufacture of magnetic recording medium
JPS576440A (en) Manufacture of magnetic recording medium
JPS57120227A (en) Magnetic recording medium
JPS56148732A (en) Thin metallic film type magnetic recording medium