JPS5456199A - Humidity sensitive element manufacturing process - Google Patents

Humidity sensitive element manufacturing process

Info

Publication number
JPS5456199A
JPS5456199A JP12170477A JP12170477A JPS5456199A JP S5456199 A JPS5456199 A JP S5456199A JP 12170477 A JP12170477 A JP 12170477A JP 12170477 A JP12170477 A JP 12170477A JP S5456199 A JPS5456199 A JP S5456199A
Authority
JP
Japan
Prior art keywords
humidity sensitive
humidity
sensitive element
solution
nasio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12170477A
Other languages
Japanese (ja)
Inventor
Koji Uchiyama
Kunihiko Tasai
Akira Okada
Hidetaka Yada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP12170477A priority Critical patent/JPS5456199A/en
Publication of JPS5456199A publication Critical patent/JPS5456199A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Non-Adjustable Resistors (AREA)

Abstract

PURPOSE: To prevent the surface of an element from going into solution in the high humidity area by mixing a humidity sensitive metal oxide with water soluble silicate and coating it on a substrate.
CONSTITUTION: Humidity sensitive metal oxides, for example, each powder of zinc oxide (ZnO) and stannic oxide (SnO2) are mixed with water soluble silicate, for example, sodium silicate (NaSiO4) water solution in proper quantity. Then, this mixture is coated on a glass substrate 1 on which both sides gold electrodes 2 are formed spaced at a gap and the NaSiO4 film is formed. After it is naturally dried, it is dried for 60 minutes at 100°C in a dryer. After that, an electrode lead wire 4 is connected to the gold electrodes 2 and a humidity sensitive element is obtained. The surface of this humidity sensitive element does not go into solution even in the almost 100% high humidity area. Also, when the relative humidity suddenly changes from 60% to 0%, its excellent response speed is approximately 1 second
COPYRIGHT: (C)1979,JPO&Japio
JP12170477A 1977-10-11 1977-10-11 Humidity sensitive element manufacturing process Pending JPS5456199A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12170477A JPS5456199A (en) 1977-10-11 1977-10-11 Humidity sensitive element manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12170477A JPS5456199A (en) 1977-10-11 1977-10-11 Humidity sensitive element manufacturing process

Publications (1)

Publication Number Publication Date
JPS5456199A true JPS5456199A (en) 1979-05-04

Family

ID=14817805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12170477A Pending JPS5456199A (en) 1977-10-11 1977-10-11 Humidity sensitive element manufacturing process

Country Status (1)

Country Link
JP (1) JPS5456199A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58173458A (en) * 1982-04-05 1983-10-12 Tokyo Kosumosu Denki Kk Humidity sensor and its manufacture
US4456902A (en) * 1982-03-30 1984-06-26 Mitsubishi Denki Kabushiki Kaisha Gas and humidity sensing element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4456902A (en) * 1982-03-30 1984-06-26 Mitsubishi Denki Kabushiki Kaisha Gas and humidity sensing element
JPS58173458A (en) * 1982-04-05 1983-10-12 Tokyo Kosumosu Denki Kk Humidity sensor and its manufacture

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