JPS5583843A - Humidity sensor - Google Patents
Humidity sensorInfo
- Publication number
- JPS5583843A JPS5583843A JP15979978A JP15979978A JPS5583843A JP S5583843 A JPS5583843 A JP S5583843A JP 15979978 A JP15979978 A JP 15979978A JP 15979978 A JP15979978 A JP 15979978A JP S5583843 A JPS5583843 A JP S5583843A
- Authority
- JP
- Japan
- Prior art keywords
- humidity sensor
- pore rate
- surface layer
- hermetical structure
- providing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
PURPOSE: To prevent degradation to improve reliability and sensitivity by giving a hermetical structure, where a pore rate is regulated for a part of the surface layer at least, in a humidity sensor having a porous metallic oxide layer where electrodes are given.
CONSTITUTION: A humidity sensor is constituted by providing electrode 102 in a humidity sensitive porcelain of a pore rate of 10W40% and an average pore diameter below 2μm and providing hermetical structure material 104 of a pore rate below 10% in a part of the surface layer including electrode 102 at least. In respect to hermetical structure material 104, low-melting point glass (melted at 500°C), epoxy resin, Pb Sn alloy solder, etc., are used.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15979978A JPS5583843A (en) | 1978-12-21 | 1978-12-21 | Humidity sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15979978A JPS5583843A (en) | 1978-12-21 | 1978-12-21 | Humidity sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5583843A true JPS5583843A (en) | 1980-06-24 |
Family
ID=15701505
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15979978A Pending JPS5583843A (en) | 1978-12-21 | 1978-12-21 | Humidity sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5583843A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56153942U (en) * | 1979-10-15 | 1981-11-17 | ||
JPS59183356A (en) * | 1983-04-04 | 1984-10-18 | Hitachi Ltd | Humidity sensor |
JPS62291541A (en) * | 1986-06-11 | 1987-12-18 | Shimadzu Corp | Humidity sensor and its preparation |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS496200B1 (en) * | 1968-07-30 | 1974-02-13 | ||
JPS52149397A (en) * | 1976-06-08 | 1977-12-12 | Matsushita Electric Ind Co Ltd | Moisture sensing element |
-
1978
- 1978-12-21 JP JP15979978A patent/JPS5583843A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS496200B1 (en) * | 1968-07-30 | 1974-02-13 | ||
JPS52149397A (en) * | 1976-06-08 | 1977-12-12 | Matsushita Electric Ind Co Ltd | Moisture sensing element |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56153942U (en) * | 1979-10-15 | 1981-11-17 | ||
JPS6224280Y2 (en) * | 1979-10-15 | 1987-06-20 | ||
JPS59183356A (en) * | 1983-04-04 | 1984-10-18 | Hitachi Ltd | Humidity sensor |
JPS62291541A (en) * | 1986-06-11 | 1987-12-18 | Shimadzu Corp | Humidity sensor and its preparation |
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