JPS5444477A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5444477A
JPS5444477A JP11070377A JP11070377A JPS5444477A JP S5444477 A JPS5444477 A JP S5444477A JP 11070377 A JP11070377 A JP 11070377A JP 11070377 A JP11070377 A JP 11070377A JP S5444477 A JPS5444477 A JP S5444477A
Authority
JP
Japan
Prior art keywords
film
etching
polycrystal
fine pattern
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11070377A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6143847B2 (enrdf_load_stackoverflow
Inventor
Onori Ishikawa
Takeya Ezaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11070377A priority Critical patent/JPS5444477A/ja
Publication of JPS5444477A publication Critical patent/JPS5444477A/ja
Publication of JPS6143847B2 publication Critical patent/JPS6143847B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
JP11070377A 1977-09-14 1977-09-14 Manufacture for semiconductor device Granted JPS5444477A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11070377A JPS5444477A (en) 1977-09-14 1977-09-14 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11070377A JPS5444477A (en) 1977-09-14 1977-09-14 Manufacture for semiconductor device

Publications (2)

Publication Number Publication Date
JPS5444477A true JPS5444477A (en) 1979-04-07
JPS6143847B2 JPS6143847B2 (enrdf_load_stackoverflow) 1986-09-30

Family

ID=14542306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11070377A Granted JPS5444477A (en) 1977-09-14 1977-09-14 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5444477A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5563844A (en) * 1978-11-03 1980-05-14 Ibm Method of forming insulator between conductive layers
JPS57112028A (en) * 1980-12-29 1982-07-12 Fujitsu Ltd Manufacture of semiconductor device
US10195808B2 (en) 2012-07-31 2019-02-05 Wincor Nixdorf International, GmbH Compacting apparatus for compacting receptacles

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS639848U (enrdf_load_stackoverflow) * 1986-07-02 1988-01-22

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5563844A (en) * 1978-11-03 1980-05-14 Ibm Method of forming insulator between conductive layers
JPS57112028A (en) * 1980-12-29 1982-07-12 Fujitsu Ltd Manufacture of semiconductor device
US10195808B2 (en) 2012-07-31 2019-02-05 Wincor Nixdorf International, GmbH Compacting apparatus for compacting receptacles

Also Published As

Publication number Publication date
JPS6143847B2 (enrdf_load_stackoverflow) 1986-09-30

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