JPS5412685A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5412685A
JPS5412685A JP7874677A JP7874677A JPS5412685A JP S5412685 A JPS5412685 A JP S5412685A JP 7874677 A JP7874677 A JP 7874677A JP 7874677 A JP7874677 A JP 7874677A JP S5412685 A JPS5412685 A JP S5412685A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
pattern
forming
poly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7874677A
Other languages
Japanese (ja)
Inventor
Takashi Hirao
Kazuhiko Tsuji
Kaoru Inoue
Shigetoshi Takayanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7874677A priority Critical patent/JPS5412685A/en
Publication of JPS5412685A publication Critical patent/JPS5412685A/en
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)

Abstract

PURPOSE: To form a minute element formation region by separating the element isolation layer forming pattern from the channel stopper use impurity introducing pattern and forming these patterns through self-matching and with removal of the poly Si surface oxide film.
COPYRIGHT: (C)1979,JPO&Japio
JP7874677A 1977-06-30 1977-06-30 Manufacture of semiconductor device Pending JPS5412685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7874677A JPS5412685A (en) 1977-06-30 1977-06-30 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7874677A JPS5412685A (en) 1977-06-30 1977-06-30 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5412685A true JPS5412685A (en) 1979-01-30

Family

ID=13670443

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7874677A Pending JPS5412685A (en) 1977-06-30 1977-06-30 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5412685A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876337A (en) * 1981-10-30 1983-05-09 Shin Meiwa Ind Co Ltd Automatic closing device for rear flap door of dump truck
US5208181A (en) * 1992-08-17 1993-05-04 Chartered Semiconductor Manufacturing Pte Ltd. Locos isolation scheme for small geometry or high voltage circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5876337A (en) * 1981-10-30 1983-05-09 Shin Meiwa Ind Co Ltd Automatic closing device for rear flap door of dump truck
US5208181A (en) * 1992-08-17 1993-05-04 Chartered Semiconductor Manufacturing Pte Ltd. Locos isolation scheme for small geometry or high voltage circuit

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