JPS5412685A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5412685A JPS5412685A JP7874677A JP7874677A JPS5412685A JP S5412685 A JPS5412685 A JP S5412685A JP 7874677 A JP7874677 A JP 7874677A JP 7874677 A JP7874677 A JP 7874677A JP S5412685 A JPS5412685 A JP S5412685A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- pattern
- forming
- poly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Element Separation (AREA)
Abstract
PURPOSE: To form a minute element formation region by separating the element isolation layer forming pattern from the channel stopper use impurity introducing pattern and forming these patterns through self-matching and with removal of the poly Si surface oxide film.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7874677A JPS5412685A (en) | 1977-06-30 | 1977-06-30 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7874677A JPS5412685A (en) | 1977-06-30 | 1977-06-30 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5412685A true JPS5412685A (en) | 1979-01-30 |
Family
ID=13670443
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7874677A Pending JPS5412685A (en) | 1977-06-30 | 1977-06-30 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5412685A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5876337A (en) * | 1981-10-30 | 1983-05-09 | Shin Meiwa Ind Co Ltd | Automatic closing device for rear flap door of dump truck |
US5208181A (en) * | 1992-08-17 | 1993-05-04 | Chartered Semiconductor Manufacturing Pte Ltd. | Locos isolation scheme for small geometry or high voltage circuit |
-
1977
- 1977-06-30 JP JP7874677A patent/JPS5412685A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5876337A (en) * | 1981-10-30 | 1983-05-09 | Shin Meiwa Ind Co Ltd | Automatic closing device for rear flap door of dump truck |
US5208181A (en) * | 1992-08-17 | 1993-05-04 | Chartered Semiconductor Manufacturing Pte Ltd. | Locos isolation scheme for small geometry or high voltage circuit |
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