JPS5441069A - Production of semiconductor elements - Google Patents

Production of semiconductor elements

Info

Publication number
JPS5441069A
JPS5441069A JP10848477A JP10848477A JPS5441069A JP S5441069 A JPS5441069 A JP S5441069A JP 10848477 A JP10848477 A JP 10848477A JP 10848477 A JP10848477 A JP 10848477A JP S5441069 A JPS5441069 A JP S5441069A
Authority
JP
Japan
Prior art keywords
production
semiconductor elements
wafer
steel plates
central part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10848477A
Other languages
English (en)
Inventor
Yasuo Matsumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Home Electronics Ltd
NEC Corp
Original Assignee
NEC Home Electronics Ltd
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Home Electronics Ltd, Nippon Electric Co Ltd filed Critical NEC Home Electronics Ltd
Priority to JP10848477A priority Critical patent/JPS5441069A/ja
Publication of JPS5441069A publication Critical patent/JPS5441069A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Dicing (AREA)
JP10848477A 1977-09-08 1977-09-08 Production of semiconductor elements Pending JPS5441069A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10848477A JPS5441069A (en) 1977-09-08 1977-09-08 Production of semiconductor elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10848477A JPS5441069A (en) 1977-09-08 1977-09-08 Production of semiconductor elements

Publications (1)

Publication Number Publication Date
JPS5441069A true JPS5441069A (en) 1979-03-31

Family

ID=14485919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10848477A Pending JPS5441069A (en) 1977-09-08 1977-09-08 Production of semiconductor elements

Country Status (1)

Country Link
JP (1) JPS5441069A (ja)

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