JPS5437683A - Unit for oxidation - Google Patents
Unit for oxidationInfo
- Publication number
- JPS5437683A JPS5437683A JP10356877A JP10356877A JPS5437683A JP S5437683 A JPS5437683 A JP S5437683A JP 10356877 A JP10356877 A JP 10356877A JP 10356877 A JP10356877 A JP 10356877A JP S5437683 A JPS5437683 A JP S5437683A
- Authority
- JP
- Japan
- Prior art keywords
- atmosphere
- oxidation
- unit
- oxidized
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To obtain the oxide film having uniform thickness and less in dispersion, by constituting the dynamic atmosphere from the oxidizing a atmosphere with mixing, when the Si wafer is oxidized acceleratingly under high pressure oxidized atmosphere and SiO2 film is grown.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10356877A JPS5437683A (en) | 1977-08-31 | 1977-08-31 | Unit for oxidation |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10356877A JPS5437683A (en) | 1977-08-31 | 1977-08-31 | Unit for oxidation |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5437683A true JPS5437683A (en) | 1979-03-20 |
Family
ID=14357396
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10356877A Pending JPS5437683A (en) | 1977-08-31 | 1977-08-31 | Unit for oxidation |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5437683A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62163931U (en) * | 1986-04-09 | 1987-10-17 |
-
1977
- 1977-08-31 JP JP10356877A patent/JPS5437683A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62163931U (en) * | 1986-04-09 | 1987-10-17 |
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